3 Automatic Needle Alignment
3-5
the image processing.
Confirm of Auto Needle Height Adjustment
If “No” is selected, the probing starts immediately
after the completion of the automatic needle
height determination on the lot initial wafer. If
“Yes” is selected, the prober halts temporarily
when the automatic needle height determination is
completed, and the confirmation of the needle
height determination result by the operator will be
awaited.
Upper Limit of Auto Needle Height
When “Assort. Of Auto Needle Height Setting”
above is set to “TTL” or ‘GP-IB’, the probe card
may be damaged if the chuck height keeps
increasing due to operation error. This is tolerant
value for this case. And “Contact position” means
contact height measured in the image processing.
Upper Limit of <Z-UP> Switch
This parameter is used to set the upper limit when
adjusting the contact height by manually
increasing the chuck height after the needle height
setting.
