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A TV view inside the specimen chamber is shown.
CAUTION
Risk of damaging the objective lens and/or your specimen
Ensure not to hit the objective lens while driving the stage. Change to TV mode to observe
the moving stage.
IMPORTANT
A stage safety function is integrated in SmartSEM
®
software. When the chamber door is
opened, the Z-, M-, and T-axis cannot be moved anymore. The X-,Y-, and R-axis can only
be moved with reduced velocity.
2
Move the specimen stage to an
appropriate exchange position.
3
Select
Tools/Goto Control Panel
from the menu.
The
SEM Control
panel opens
