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3.2. Principle of operation

Axis
movements

To position the specimens in the electron microscope, the six axes of the 105-mm DC stage can
be tilted, rotated and moved in linear direction.

The following overview shows the movement of the X-, Y-, and R-axis.

Axis

Movement
direction

Initial position of axis

Axis travel

X-axis

Back-, and
forwards

Y-axis

Sidewards

R-axis

Rotates 360°
continuously

Table 1.1: Top view on axis travel of X-, Y-, and R-axis

cham

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door

ch
am

ber

door

cham

b

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r door

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...
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12
13
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Содержание 348247-9013-000

Страница 1: ...Microscopy Electron and Ion Beam Microscopy Enabling the Nano Age World 105 mm DC stage Optional Stage for Field Emission Scanning Electron Microscopes 105 mm DC stage Optional stage for Field Emission Scanning Electron Microscopes ...

Страница 2: ...trieval system Violations will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a specific statement that such names are exempt from the relevant protective laws and regulations and therefore free for general use Software programs will fully remain the property of Carl Zeiss Microscopy No program documentation...

Страница 3: ...tware 7 2 4 Safety labels 8 3 Description 10 3 1 The 105 mm DC stage 10 3 2 Principle of Operation 11 3 3 Tool for specimen exchange 13 3 4 Technical Data 14 3 5 Customer service 16 4 Installation 16 5 Operation 17 5 1 Preparing the specimen holder 18 5 2 Loading the specimen chamber via an airlock 19 5 3 Loading the specimen chamber via open chamber door 19 5 4 Locating the specimen 25 6 Maintena...

Страница 4: ...ff fåëíêìÅíáçå j åì ä NMRJãã a ëí ÖÉ ÉåMO çåíÉåíë ...

Страница 5: ...built in Operators of the 105 mm DC stage must not deviate from the instructions provided in this docu ment Safety instructions The safety instructions in this manual are classified as follows CAUTION This safety symbol and signal word indicates a potentially hazardous situation Disregarding this warning MAY result in minor or moderate injury CAUTION This signal word used without a safety symbol i...

Страница 6: ...ure size 30 µm Set FIB Fil V Target to zero Values to be selected are printed in italics Text Meaning Click Press the left mouse button Right click Press the right mouse button Double click Press the left mouse button twice FESEM Field emission scanning electron microscope 105 mm DC stage 6 axes super eucentric stage driven by a DC Direct Current motor SmartSEM software Operating software for Carl...

Страница 7: ...other purpose is not allowed and could be hazardous 2 2 Prevention of accidents and improper use CAUTION Risk of injury or damage due to improper operation of the 105 mm DC stage Read the user documentation carefully Do not operate the 105 mm DC stage until you have completely read and understood this instruction manual CAUTION There are moving parts at the specimen stage Loose clothes jewellery o...

Страница 8: ...rt working distance when opening the chamber door Always move the specimen stage to a large working distance before opening the chamber door CAUTION Opening the chamber door with stage tilted Detectors and the motor of the stage could be damaged Set the tilt angle of the stage to 0 before opening the chamber door CAUTION Risk of property damage FESEM or specimen could be damaged if a detector is i...

Страница 9: ...hamber door interlock is located at the inner bottom front side of the specimen chamber It ensures that the door of the specimen chamber is closed properly When this interlock is activated i e no electrical contact EHT Vac ready no is indicated in the SmartSEM user interface EHT and SE2 detector voltages are blocked 2 3 2 Touch alarm To prevent damages caused by accidental touch of a conductive sa...

Страница 10: ...e safety labels on the 105 mm DC stage warn users of possible hazards Each safety label is affixed to the point where a particular hazard exists Fig 1 1 Safety labels at the chamber door Position Subject Label A Safety information B Safety information C Type plate for SUPRA and ULTRA series A B C ...

Страница 11: ...fåëíêìÅíáçå j åì ä NMRJãã a ëí ÖÉ ÉåMOKÑã V çÑ PM OK p ÑÉíó ëìãã êó C Type plate for Cross Beam series Position Subject Label ...

Страница 12: ...105 mm DC stage The 105 mm DC stage is a 6 axes super eucentric stage It is used for precise positioning of samples up to 500 g in the electron microscope The following overview shows the arrangement of the six axes Fig 1 2 Axes arrangement of the 105 mm DC stage 5 Z T M R X Y M T Z X Y R ...

Страница 13: ... axes of the 105 mm DC stage can be tilted rotated and moved in linear direction The following overview shows the movement of the X Y and R axis Axis Movement direction Initial position of axis Axis travel X axis Back and forwards Y axis Sidewards R axis Rotates 360 continuously Table 1 1 Top view on axis travel of X Y and R axis chamber door chamber door chamber door ...

Страница 14: ...e whole stage is moving Only the M axis can be moved without changing the position of the other axes This characteristic is used to adjust the eucentricity of the stage Eucentricity A stage is eucentric when the selected sample feature stays in the centre of the screen during stage tilt In that case the specimen detail is exactly in the tilt axis Axis Movement direction Initial position of axis Ax...

Страница 15: ...hen you mount the specimen holder to the specimen stage and when you remove it The use of the tool ensures that contamination is kept low during specimen exchange and that no dirt particles can fall on the glas scales The glas scales are used as position measurement system They are very sensitive to dirt Fig 1 3 Tool for specimen exchange 1 Threaded pins 3 Knob 2 Rod 1 2 3 ...

Страница 16: ... vibrations Less than 0 2 mm s at 10 Hz Less than 0 1 mm s at 10 Hz Noise level Less than 40 dBA at 100 Hz Less than 55 dBA at 100 Hz Degree of pollution 2 Travel Axis Travel Travel speed Counter resolution X axis 105 mm 15 mm s 10 nm Y axis 105 mm 15 mm s 10 nm Z axis SEM 50 mm 2 mm s 78 nm NVision 40 45 mm 2 mm s 78 nm T axis 15 to 70 5 s 0 0003 R axis 360 15 s 0 0001 M axis 5 to 15 mm 2 mm s 5 ...

Страница 17: ...ëí ÖÉ ÉåMOKÑã NR çÑ PM PK aÉëÅêáéíáçå Technical data of the stage board Nominal voltage 21VDC max 5A 5VDC max 3 15A Cooling water max 3bar Dimensions LxBxH 470 x 230 x 90mm Weight 2 kg Degree of protection IP20 Protection class I ...

Страница 18: ...r customer service contact your local Carl Zeiss service engineer A list of Carl Zeiss locations and authorised service partners can be found at http www zeiss com microscopy 4 Installation The 105 mm DC stage is either factory installed or retrofitted by authorised Carl Zeiss service staff ...

Страница 19: ...arted and is ready to control the FESEM Parts required No Allen wrench 1 5 mm delivered with the FESEM Stub delivered with the FESEM Tweezers for specimen delivered with the FESEM Specimen holder delivered with the FESEM If necessary carbon tape conductive carbon adhesive metal tape or similar Appropriate specimen with conducting properties e g gold on carbon Lint free gloves Tool for specimen exc...

Страница 20: ...ee gloves when touching specimen specimen holder or stage 1 Attach the specimen to the stub by using con ductive carbon adhesive metal or carbon tape etc 2 Ensure that the specimen area to be analysed is in proper contact with the stub 3 Ensure that the specimen lies flat on the stub 4 Use the tweezers to insert the stub into the specimen holder 5 Properly fix the stub to the specimen holder Use t...

Страница 21: ... you exchange the specimen via the specimen chamber obey the following instructions Use the tool for specimen exchange CAUTION The glase scales are sensitive to dirt If something falls on the glas scales they could get damaged Use the special tool for specimen exchange CAUTION Pinch hazard Fingers could be trapped When you exchange the specimen via the vented specimen chamber always use the specia...

Страница 22: ...s while driving the stage Change to TV mode to observe the moving stage IMPORTANT A stage safety function is integrated in SmartSEM software When the chamber door is opened the Z M and T axis cannot be moved anymore The X Y and R axis can only be moved with reduced velocity 2 Move the specimen stage to an appropriate exchange position 3 Select Tools Goto Control Panel from the menu The SEM Control...

Страница 23: ...ce the specimen chamber is ventilated with nitrogen After the specimen exchange keep the chamber door open as short as possible Avoid inhaling the air from within the specimen chamber Ensure the area around the FESEM is sufficiently ventilated 7 Take hold of the door handle and slowly open the chamber door IMPORTANT Contamination caused by fingerprints can lead to vacuum deterioration or prolonged...

Страница 24: ...that the position of the specimen holder is exactly defined 9 Mount the specimen holder on the stage Push the specimen holder to the mechan ical stop 10 Unscrew the special tool 11 Look into the specimen chamber to ensure that the specimen cannot hit any components when the door is closed CAUTION Pinch hazard when closing the chamber door Use the door handle to close the chamber door Ensure not to...

Страница 25: ...çå j åì ä NMRJãã a ëí ÖÉ ÉåMOKÑã OP çÑ PM RK léÉê íáçå 12 Carefully close the chamber door 13 In the SEM Control panel click on the Pump button The vacuum status messages show the current vacuum levels achieved ...

Страница 26: ... or your specimen Ensure not to hit the objective lens while driving the stage Change to TV mode to observe the moving stage 2 Move the specimen by using the dual joystick optional or by calling the Soft Joystick via Tools Goto Panel Soft Joystick 3 Carefully move the specimen closer to the objective lens The distance between objective lens and specimen surface should be less than about 10 mm ...

Страница 27: ...aintenance and repair 6 1 Cleaning the chamber door CAUTION There are moving parts at the specimen stage Fingers could be trapped Only clean the chamber door not the stage 1 Clean the outside of the chamber door 1 Use a moistened lint free cloth Parts required No Lint free cloth 1 ...

Страница 28: ...he 105 mm DC stage and blocks the travel Motion error Axis moves stiffly Call the local Carl Zeiss service engineer to have the 105 mm DC stage lubricated Interpolation or counter error Dirt on stage Glass scale is dirty Call the local Carl Zeiss service engineer to have glass slides cleaned Interpolation or counter error Glass scale is damaged Call the local Carl Zeiss service engineer to have th...

Страница 29: ...ëíêìÅíáçå j åì ä NMRJãã a ëí ÖÉ ÉåMOKÑã OT çÑ PM TK aÉáåëí ää íáçå åÇ Çáëéçë ä 7 Deinstallation and disposal The 105 mm DC stage is de installed and disposed of by authorised Carl Zeiss service staff only ...

Страница 30: ...OU çÑ PM fåëíêìÅíáçå j åì ä NMRJãã a ëí ÖÉ ÉåMOKÑã TK aÉáåëí ää íáçå åÇ Çáëéçë ä ...

Страница 31: ...nts 14 Eucentricity 11 12 F Floor vibrations 14 I Installation 16 instruction 3 Intended Use 5 L Loading the specimen chamber 19 M Maintenance and repair 26 N Noise level 14 O Operation 17 Overview 10 P Preparing the specimen holder 18 Prevention of accidents and improper use 5 Principle of Operation 11 R Relative humidity 14 S Safety devices 7 Safety instructions 3 Safety labels 8 Stage Points Li...

Страница 32: ...idge Cambridgeshire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microscopy Due to a policy of continuous development we reserve the right to change specifications without notice Carl Zeiss Microscopy GmbH Oberkochen ...

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