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3. Description
3.1. The 105-mm DC stage
The 105-mm DC stage is a 6-axes, super eucentric stage. It is used for precise positioning of
samples up to 500 g in the electron microscope.
The following overview shows the arrangement of the six axes.
Fig. 1.2: Axes arrangement of the 105-mm DC stage
5
Z
T
M
R
X
Y
M
T
Z
+
+
X
Y
R
+
+
