Zeiss 348247-9013-000, Инструкция по эксплуатации

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Table of Contents
1. About this manual ........................................................................................ 3
1.1. Definition of terms ........................................................................................... 4
2. Safety summary ........................................................................................... 5
2.1. Intended use ..................................................................................................... 5
2.2. Prevention of accidents and improper use ................................................... 5
2.3. Safety devices .................................................................................................. 7
2.3.1. Chamber door interlock ........................................................................................... 7
2.3.2. Touch alarm ............................................................................................................ 7
2.3.3. Stage safety function in SmartSEM
®
software ........................................................ 7
2.4. Safety labels ..................................................................................................... 8
3. Description ................................................................................................. 10
3.1. The 105-mm DC stage .................................................................................... 10
3.2. Principle of Operation .................................................................................... 11
3.3. Tool for specimen exchange ......................................................................... 13
3.4. Technical Data ................................................................................................ 14
3.5. Customer service ........................................................................................... 16
4. Installation .................................................................................................. 16
5. Operation .................................................................................................... 17
5.1. Preparing the specimen holder .................................................................... 18
5.2. Loading the specimen chamber via an airlock ........................................... 19
5.3. Loading the specimen chamber via open chamber door ........................... 19
5.4. Locating the specimen .................................................................................. 25
6. Maintenance and repair ............................................................................. 26
6.1. Cleaning the chamber door ........................................................................... 26
6.2. Troubleshooting ............................................................................................. 27
7. Deinstallation and disposal ....................................................................... 28
8. Index ............................................................................................................ 29