
UltraLo-1800 Alpha Particle Counter
XIA LLC
Page 73
E.
Tiling Samples
Sometimes a sample will be very small, but many identical samples are available. When this is the
case tiling the samples on the tray can provide more complete coverage and therefore better results.
This is easily accomplished with identical squares or rectangles, as they can simply be pushed together
to cover the surface of the tray. For other shapes or samples where each piece is slightly different, other
solutions are required. Often overlapping the samples is the best course of action. Keep in mind that the
UltraLo works best with as flat a surface as possible, and so keep vertical disruptions to a minimum for
the most accurate measurement. For an example of a tiled sample, see Figure IX-2.
Figure IX-2: Irregularly shaped pieces of metal tiled to cover the Wafer configuration.