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Installation, Operating & Maintenance Instructions

Series 651 DN 320-400 (I.D. 12“ - 16”), Logic

VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com

267736ED

2008-02-26

22/53

Gasflow calculation for LEARN:

Do not apply a different gasflow for learn than determined below. Otherwise pressure control
performance may be insufficient.

Note: Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific
application.

1. At first it is necessary to find out about the required control range respectively its conductance values. Each working

point (pressure / flow) must be calculated with one following formulas.
Choose the applicable formula depending on units you are familiar with.

1000

•

q

WP

C

WP

=

p

WP

C

WP

required conductance of working point [l/s]

q

WP

gasflow of working point [Pa m

3

/s]

p

WP

pressure of working point [Pa]

q

WP

C

WP

=

p

WP

C

WP

required conductance of working point [l/s]

q

WP

gasflow of working point [mbar l/s]

p

WP

pressure of working point [mbar]

q

WP

C

WP

=

78.7

•

p

WP

C

WP

required conductance of working point [l/s]

q

WP

gasflow of working point [sccm]

p

WP

pressure of working point [Torr]

2. Out of these calculated conductance values choose the lowest.

C

R

= min(C

WP1,

C

WP2, . . . ,

C

WPn

)

C

R

required lower conductance [l/s]

C

WPx

required conductance of working points [l/s]

Note: To make sure that the valve is capable to control the most extreme working point verify that
C

R

≥

C

min

of the valve (refer to «Technical data»).

3. Calculate gasflow for learn. Choose the applicable formula depending on units you are familiar with.

p

max

•

C

R

q

L

=

2000

q

L

gasflow for learn [Pa m

3

/s]

p

max

max. pressure to control [Pa]

C

R

required lower conductance [l/s]

p

max

•

C

R

q

L

=

2

q

L

gasflow for learn [mbar l/s]

p

max

max. pressure to control [mbar]

C

R

required lower conductance [l/s]

q

L

= 39.4

•

p

max

•

C

R

q

L

gasflow for learn [sccm]

p

max

max. pressure to control [Torr]

C

R

required lower conductance [l/s]

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21
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Содержание Series 651

Страница 1: ...O SPS Sensor Power Supply PFO Power Failure Option configured with firmware 651P 1E 05 The fabrication number is indicated on each product as per the label below or similar made in Switzerland Fabrication No patented 651 A Fabrication number sample picture Explanation of symbols Read declaration carefully before you start any other action Keep body parts and objects away from the valve opening Att...

Страница 2: ...Service port connection 14 3 Operation 15 3 1 Introduction 15 3 1 1 Local operation 15 3 1 2 Remote operation 16 3 1 3 Safety mode 16 3 2 Operation under increased temperature 16 3 3 Behavior during power up 16 3 4 Behavior in case of power failure 17 3 5 Display information 17 3 6 Setup procedure 19 3 6 1 Interface configuration 19 3 6 2 Valve and sensor configuration 20 3 6 3 ZERO 20 3 6 4 LEARN...

Страница 3: ...l data only Other applications are only allowed with the written permission of VAT 1 1 Technical data Control and actuating unit Power input 1 α 24 VDC 10 0 5 V pk pk max connector POWER 651 A 651 G 651 C 651 H 50 W max operation of valve with max load without PFO 4 50 W plus 10 W for PFO 4 Sensor power supply 2 β 651 A 651 C Input Output 24 VDC 1500 mA max 15 VDC 5 1000 mA max connector POWER con...

Страница 4: ...il battery for details Compressed air supply 4 7 bar 55 100 psi above ATM Ambient temperature 0 C to 50 C max 35 C recommended Pressure control accuracy 0 1 of sensor full scale DN 320 12 65150 DN 350 14 65151 DN 400 16 65152 Position resolution position control capability 13333 steps full stroke 13422 steps full stroke 13511 steps full stroke Closing time throttling only 1 1 s typ full stroke 1 3...

Страница 5: ...only Wetted materials Body 651 A Aluminum 3 2315 AA6082 Body 651 H Aluminum 3 2315 AA6082 hard anodized Body 651 I Aluminum 3 2315 AA6082 nickel coated Pendulum plate 651 A Aluminum 3 2315 AA6082 1 4310 301 PTFE Pendulum plate 651 H Aluminum 3 2315 AA6082 hard anodized 1 4310 301 PTFE Pendulum plate 651 I Aluminum 3 2315 AA6082 nickel coated 1 4310 301 PTFE Sealing ring 651 A Aluminum 3 2315 AA608...

Страница 6: ...ese attachment points for lifting The attachment points are indicated on the dimensional drawing of the specific valve part number available on request Never lay the valve down with control and actuating unit downwards as it may be damaged 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts The valve plate may start to move just aft...

Страница 7: ...ads 3 Install pressure sensor s 2 according to the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 4 Connect sensor cable 3 to sensor s and then to valve connector SENSOR Refer to chapter Electrical connection for correct wiring Note Input for second sensor is available on 651 E versions only 5 Connect valve to Logic 4 connector INTERFACE Ref...

Страница 8: ...ing table Higher tightening torques deforms the valve body and may lead to malfunction of the valve 2 3 1 Mounting with centering rings ISO F ISO F Valve size max tightening torque Nm max tightening torque lbs ft DN320 12 65150 17 20 13 15 DN350 14 65151 DN400 16 65152 17 20 13 15 hole depth mm hole depth inch DN320 12 65150 18 0 71 DN350 14 65151 DN400 16 65152 20 0 79 Caution Make sure that scre...

Страница 9: ...ke sure that screws are not too long otherwise the valve body may be damaged Note These torques are valid if depth of the mounting screws is min 1 x thread diameter Make sure that screws in use are capable to withstand applied torques Lubricate screws slightly 2 4 Admissible forces Forces from evacuating the system from the weight of other components and from baking can lead to deformation and mal...

Страница 10: ...ctrical connection 2 6 1 Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor s with power This depends on the sensor type and valve version that is used This valve is available with an optional sensor power supply module SPS that converts 15 VDC from the 24 VDC Concepts External 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC...

Страница 11: ...r cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and 8 must be bridged for operation An optional switch would allow for ...

Страница 12: ...elded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and 8 must be bridged for operation An optional switch would...

Страница 13: ...ded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and 8 must be bridged for operation An optional switch would a...

Страница 14: ... service cable and a software from VAT You can either use our freeware Control View which can be downloaded from www vatvalve com or purchase our Control Performance Analyzer Alternatively the VAT Service Box 2 can be connected to the service port for setup and local operation The service port is not galvanic isolated Therefore we recommend using this only for setup testing and maintenance and not...

Страница 15: ...r purchase our Control Performance Analyzer These software are beneficial especially for setup testing and maintenance How to start Connect service cable start software and push button LOCAL to enable for operation Then enter menu Setup Sensor and do sensor configuration according to your application to make sure that you get the correct pressure displayed Control view supports parameter setup man...

Страница 16: ... not able to synchronize Display shows D C or D999 In this case synchronization cycle will be done when motor interlock is deactivated Then Display shows INIT for a moment followed by SYNC When safety mode is entered from operation i e pressure control mode the unit will automatically switch to position control mode and remain at current position Once motor interlock is deactivated the unit remain...

Страница 17: ...51 C 651 U 651 W Closed isolated Valve remains closed Valve open or in any intermediate position Sealing ring moves down and blocks the pendulum plate at the current position Valve will close or open depending on valve configuration Default is not defined Display indicates F Provided that battery pack of the VAT controller is charged Charging time after power up is 2 minutes max All parameters are...

Страница 18: ...lay shows alternately C C and INIT Synchronization will be done when first movement command is received 1 Logic interface 0 basic 1 with SPS 1 2 with PFO 2 3 with SPS 1 and PFO 2 1 1 sensor version 2 2 sensor version SYNC indicates that synchronization is running S Y N C 1 SPS optional 15 VDC Sensor Power Supply module 2 PFO optional Power Failure Option Operation Description Mode Digit 1 Digit 2 ...

Страница 19: ...r details 3 VALVE CONFIGURATION Basic configurations of the valve must be adapted according to application needs Refer to chapter Valve configuration for details 4 ZERO Compensation of the sensor offset voltage Refer to chapter ZERO for details 5 LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEARN for details Note Without LEARN the valve...

Страница 20: ...nd sensor configuration via remote operation 3 Enable or disable ZERO function in menu Setup Sensor 4 Do 2 sensor configuration in menu Setup Sensor 3 6 3 ZERO ZERO allows for the compensation of the sensor offset voltage When ZERO is performed the current value at the sensor input is equated to pressure zero In case of a 2 sensor system both sensor inputs will be adjusted A max offset voltage of ...

Страница 21: ...wnloaded via Control Performance Analyzer software or remote interface Due to encoding the data may not be interpreted directly By an OPEN VALVE CLOSE VALVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter Digital inputs for details 1 Set OPEN VALVE 2 Set specifi...

Страница 22: ...point Pa m 3 s pWP pressure of working point Pa qWP CWP pWP CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar qWP CWP 78 7 pWP CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR min CWP1 CWP2 CWPn CR r...

Страница 23: ...and Analog inputs and outputs for details 1 Set CONTROL MODE to POSITION CONTROL Select or enter position setpoint 2 Set position SETPOINT Note In case CLOSE VALVE OPEN VALVE or HOLD is also set these have higher priority 3 10 Pressure control To prepare valve for PRESSURE CONTROL perform complete Setup procedure The valve has parameters that may be modified to tune pressure control performance Re...

Страница 24: ...een the pressure gauges Max ratio is 100 1 It is required that the high range pressure gauge is connected to sensor 1 input and the low range pressure gauge to the sensor 2 input Between 90 and 100 of the low range sensor full scale the low range sensor is phased out while high range sensor is phased in This maintains a functional response behavior in case of small calibration errors between the t...

Страница 25: ...tely below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System description Problem description Send diagnostic file with and all required information to tuning support vat...

Страница 26: ...nu Setup Control Parameter Note It s not possible to do Interface configuration via remote operation 3 10 2 2 Sensor delay adjustment Sensor delay adjustment effects Stability Default value is 0 Adjustment range is from 0 to 1 0s Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability By adapting this parameter to the approximate delay time stabi...

Страница 27: ...Choose the applicable formula depending on units you are familiar with END START SFS RAMP P P P S t t ramptime s PSFS sensor full scale pressure SRAMP setpoint ramp s PSTART pressure start PEND pressure end Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situation 3 Control a lower pressure 4 Repeat f...

Страница 28: ...valve speed In particular applications it may be of advantage to have a slower valve response Note OPEN and CLOSE are always done with max speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed until required response is achieve...

Страница 29: ...08 02 26 29 53 3 11 1 Functions and Wiring Logic interface allows for remote operation by means of digital and analog signals Digital inputs may be operated either by switches or by voltage sources a Configuration with switches for digital inputs Note Use a shielded cable for analog inputs Do not connect other pins than indicated above Connector Use only screws with 4 40UNC thread for fastening th...

Страница 30: ...land Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 267736ED 2008 02 26 30 53 b Configuration with voltage source for digital inputs Note Use a shielded cable for analog inputs Do not connect other pins than indicated above Connector Use only screws with 4 40UNC thread for fastening the DB 25 connector ...

Страница 31: ...xample with SFS 100mTorr Not active 10V 100 10V setpoint 100mTorr Active 10V 10 10V setpoint 10mTorr N A 16 HOLD Digital input 1 This function stops the valve at the current position After release of the signal the valve will return to the selected CONTROL MODE This function is activated as long as optocoupler is on 5 2 17 OPEN VALVE Digital input 1 This function will open the valve This function ...

Страница 32: ...e interrupted by another function with higher priority If on remains established after completion this will not re initiate the function and does also not block functions with lower priorities Note Without a LEARN data set the PID controller is not able to perform pressure control 4 2 18 LOCK Digital input 1 This function locks the valve in remote operation In case the valve is in local operation ...

Страница 33: ...operation modes and indicates either that the valve is close or that a service is requested A service request is indicated when the valve requires cleaning due to contamination Configuration of the functionality of this output can be done in local operation via service port By default the output indicates close 22 ALARM Digital output 1 The meaning of the alarm output depends on the operation mode...

Страница 34: ... scale or 10 of sensor full scale In case of 2 sensor operation 10V relates to sensor 1 full scale high range POSITION CONTROL A voltage of 0 10V shall be applied to this input as position setpoint The position setpoint is in linear relation to the applied voltage 0V is closed but not isolation function and 10V is open position Use digital input for isolation function 12 PRESSURE Analog output 1 T...

Страница 35: ...minated or gate seal heavyly sticking Clean valve and or replace gate seal according to Maintenance procedures CLOSE VALVE does not work Safety mode active check for D on display Maintenance mode active Provide power to motor to allow for operation Refer to Electrical connection for details Refer to Display shows M C in this table OPEN VALVE does not work Safety mode active check for D on display ...

Страница 36: ...ng ZERO Pressure is not 0 after ZERO Sensor offset voltage exceeds 1 4V Replace pressure gauge Safety mode active check for D on display Provide power to motor to allow for operation Refer to Electrical connection for details PRESSURE CONTROL selected check for P on display Select PRESSURE CONTROL mode Refer to Pressure control for details PRESSURE CONTROL does not work LEARN done Perform LEARN Re...

Страница 37: ...rformed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No patented A Fabrication number has always to be specified All supplies e g compressed air electrical power must be disconnected for removal installation of the valve from into the system Even with disconnected supply loaded springs and or air cushions in cylinders can be po...

Страница 38: ...under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT can give the following recommendations for preventive maintenance unheated heated 80 C heated 80 C isolation seals gate and body seal of sealing ring 200 000 cycles 6 months but max 200 000 cycles 3 months but max 200 000 cycles actuator shaft seals 1 000 000 cycles 6 ...

Страница 39: ... and remove valve bonnet Caution Weight of valve bonnet is approx DN320 12 65150 13 0 kg DN350 14 65151 15 0 kg DN400 16 65152 18 0 kg snap in fixation Allen wrench 8mm 3 Open valve Caution Stand away from valve pendulum plate moves out of the valve body 4 Unfasten mounting screw for pendulum plate 5 Remove pendulum plate pendulum plate mounting screw for pendulum plate open end wrench 13mm 6 With...

Страница 40: ...roughs to air stream 13 Clean or replace gate seal if necessary Install gate o ring to sealing ring without grease body seal Valve size Quantity of grease ml DN320 12 65150 0 3 DN350 14 65151 0 4 14 Clean or replace body seal if necessary Lubricate body o ring with the quantity of vacuum grease listed in the table to the right DN400 16 65152 0 4 15 Install body o ring into sealing ring Valve size ...

Страница 41: ...ils 20 Move the valve to position 50 half opened This is necessary in order to dismount the actuator See step 24 21 Disable PFO option feature via Power Fail Status in menu System of CV or CPA software and turn off the power CV software CPA software or Service Box 2 22 Disconnect 24VDC power Wait for 60s then disconnect cable and compressed air from valve actuator 23 Unfasten all 4 controller scre...

Страница 42: ...ase 28 Clean or replace seals if necessary Lubricate each o ring with 0 05 ml vacuum grease 29 Install o rings 30 Deposit 0 1 ml vacuum grease on each o ring Pay attention that grease is distributed constantly over the whole circumference 31 Remove fixation kit and mounting screw for pendulum plate 32 Clean screw and slightly lubricate thread with 0 1 ml vacuum grease then reinstall fixation kit 3...

Страница 43: ...ge Check can be done either visual or by measurement When the valve is mounted to a tool the bonnet has to be removed and the center position can be measured by a depth gauge see picture If the centering or distance is not correct proceed with point 39 D 400 62 0 0 5 39 f necessary adjust pendulum plate a Move pendulum plate a little towards open e g position 1 of full stroke b Use adjustment scre...

Страница 44: ...ure PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition max sensor load 1 A valve heating temperature 150 degree C If the SPS is not fully loaded 1 A or heating temperature of ...

Страница 45: ...ESD Precaution All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel removed Note All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above Do not try out other positions that may be d...

Страница 46: ...771 48 30 CH vatvalve com www vatvalve com 267736ED 2008 02 26 46 53 Description Required tool 1 Remove female screw locks from POWER SENSOR and INTERFACE connectors Open end wrench 4 5 mm 2 Remove the panel screws Pozidriv screw driver size 1 3 Lift the panel carefully 4 Push the connector release 1 a little down and disconnect fan cable 2 from option board 2 1 ...

Страница 47: ... board 6 Remove or replace master board 7 Remove or replace option board 8 Insert master board and interface board in reverse order as disassembled at correct positions seesteps 6 to 5 9 Reconnect fan cable to option board see step 4 10 Insert option board see step 7 11 Place the panel and tighten panel screws with 1 1 Nm see steps 3 to 2 Pozidriv screw driver size 1 12 Tighten female screw locks ...

Страница 48: ...ing Maintenance Instructions Series 651 DN 320 400 I D 12 16 Logic VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 267736ED 2008 02 26 48 53 6 Drawing ...

Страница 49: ...lve see yellow label on valve when ordering spare parts This is to ensure that the appropriate spare parts are supplied 7 1 Control unit Item Description Valve size Product ordering number All sizes 651 Control unit Too many to list Depends on configuration please contact VAT Option board with SPS module 15VDC sensor power supply 238091 Option board with PFO module power failure option 242413 Opti...

Страница 50: ...Seal kit vacuum Viton This consists of item 2 and 3 206528 230884 244437 2ml 206792 Syringe of vacuum grease 5ml 206793 4 Actuator shaft seals Viton N 5111 329 2 pcs required per valve 5 Sealing ring shaft seals Viton N 7121 112 24 pcs required per valve Pendulum plate Blank B1 251926 251933 251934 Blank B2 on request on request on request Hardanodized B1 249821 251918 251924 Hardanodized B2 24993...

Страница 51: ...DC power supply unit input 100 240 VAC 249775 Control Performance Analyzer package for Windows consisting of software and cable 600SP 99NN AAA Control View software for Windows 248126 free download from www vatvalve com or available on order against charge Service cable PC to valve connection 230327 free wiring information available for download from www vatvalve com Connector kit consisting of DB...

Страница 52: ...land Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 267736ED 2008 02 26 52 53 7 3 1 Centering ring with Viton o ring Description Valve size Product ordering number DN 320 12 65150 DN 350 14 65151 DN 400 16 65152 Centering ring with Viton o ring for ISO F installation only Aluminum 32050 QAZV 32052 QAZV ...

Страница 53: ...s or expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging storage or use of any product sold or delivered by VAT shall fail to conform to the foregoing warranty or to the description thereof contained herein the purchaser thereof as its exclusive remedy shall u...

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