VAT 653 AQ Series, Инструкции по установке, эксплуатации и обслуживанию

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Series 65 INSTALLATION
982156EB Edition 2019-06-05 47/110
Parameter Description
Bank Selection Select one of four learn bank to place the result of the learn procedure.
Important: It’s important that after the learn pressure controller select this
learn bank!
Pressure Limit [SFS] Set learn limit pressure (to which pressure the learn shall be executed).
The value is related to the sensor full scale of high sensor.
1.0 means the whole pressure range of the sensors
Open Speed Define the speed for opening the valve during the learn procedure.
1.0 means full speed
Status State of the current learn
0:Not Started
1:In Progress
2:Completed Successfully
3:Aborted
4:Failed
Warning Info
Warning of current learn procedure:
Bit 0: Learn is running
Bit 1: Checksum error (learn data corrupt)
Bit 2: Learn procedure terminated by user
Bit 3: Pressure at position open > 50% of pressure limit
Bit 4: Pressure at minimal conductance position < 10 % of pressure limit
Bit 5: Pressure falls while move valve in direction of close
Bit 6: Pressure at open position does not match pressure of previous open
Bit 7: Learn procedure terminated by program
Bit 8: Pressure <= 0 at open position (no gas flow set?)
Parameter location:
CPA DEVICENET
Pressure Control.Adaptive Learn Limited access in S-Single Stage Controller
(Class 51)
Execute a learn procedure (via CPA):
1. Set specific gas flow according to calculation below and wait until flow is stable. Learn does not
need to be performed with the process gas. Instead N
2
or Ar may be used.
2. Set parameter Bank Selection, if only one learn is used take Bank 1. Be sure that the pressure
controller also selects this learn bank!
3. Set parameter Open Speed. If it’s critical for the chamber, if the pressure falls rapidly while
opening the valve, reduce the open speed.
4. Set parameter Controller Mode = LEARN.
5. Wait till Controller Mode leave to LEARN state
 Learn procedure is finished
6. Check if the learn was successful by checking if Status shows value 2 (=Completed
Successfully). In best case Warning Info shows no warning.
Sensor signal must not shift during LEARN. Wait until sensor signal is stable before
LEARN is performed. Learn may take several minutes. Do not interrupt the routine as
a single full run is required to ensure fast and accurate pressure control. The PID
controller covers 5% to 5000% of the gas flow which was used for learn.