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VAT 642 GP Series, Инструкции по установке, эксплуатации и обслуживанию

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Series 642 

DESIGN AND FUNCTION 

 

605593EC 

Edition 2017-11-24 

11/113

 

3.2.1 

Pressure control system overview and function 

Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. 
 

 

M

3

4

5

7

8

2

1

9

Q

p

V

Seff

6

 

 

Example: Downstream control 

1  Valve 

2  Process chamber 

3  Gas inlet 

4  Pressure sensor(s) 

5  Sensor cable 

6  Controller and actuator 

7  Cable to remote control unit 

8  Cable to power supply 

9  HV Pump 

 

S

eff

 Q / p 

S

eff 

effective pump speed (ls

-1

) 

Q  Gas flow (mbar) 

p  Pressure (mbar) 

 

or units used in USA 

S

eff

 = 12.7 • Q / p 

S

eff 

effective pump speed (ls

-1

) 

Q  Gas flow (sccm) 

p  Pressure (mTorr) 

 

 

Содержание 642 GP Series

Страница 1: ...the valve ordering number s 642 GP 1 sensor input 642 GQ 2 sensor inputs 642 AP 1 sensor input 15V SPS 642 AQ 2 sensor inputs 15V SPS 642 HP 1 sensor input PFO 642 HQ 2 sensor inputs PFO 642 CP 1 sens...

Страница 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Страница 3: ...anges 18 4 3 2 Mounting with centering rings 18 4 3 3 Mounting with O ring in grooves 19 4 4 Admissible forces 20 4 4 1 Requirements to sensor connection 21 4 5 Electrical connection 21 4 5 1 Ground c...

Страница 4: ...ration 81 5 6 3 Errors 81 5 6 4 DeviceNet LEDs 82 5 6 5 Safety mode 83 5 6 6 Service indication 83 5 7 Operation during power up 84 5 8 Behavior in case of power failure 84 5 9 Operation under increas...

Страница 5: ...stream pressure control applications Use product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation D...

Страница 6: ...ector SENSOR Sensor input Signal input voltage ADC resolution Sampling time 0 10 VDC Ri 100 k 0 23 mV 10 ms connector SENSOR LOGIC I O 3 configurable 1 digital input 1 digital output connector LOGIC I...

Страница 7: ...ical position with extended closing time fewer cycles Process side materials body plate Stainless steel 304 1 4301 other parts Stainless steel 301 1 4310 304 1 4301 420 1 4034 420D 1 4037 430 1 4016 S...

Страница 8: ...ion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acce...

Страница 9: ...ions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part...

Страница 10: ...10 Bonnet seal 5 Detents 11 Rotary feed through seals 6 Crank bolt 3 2 Function The valve gate 1 acts as a throttling element and varies the conductance of the valve opening Actuation is performed wi...

Страница 11: ...differences M 3 4 5 7 8 2 1 9 Q p V Seff 6 Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit...

Страница 12: ...s is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and proce...

Страница 13: ...ysical overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it d...

Страница 14: ...rect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all ca...

Страница 15: ...space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below sample picture Overview table DN to required distance d for mainten...

Страница 16: ...ction overview System M 3 4 5 6 7 2 1 9 8 10 11 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Cable to remote control unit 7 Cable to power supply 8 Controller 9 Connect...

Страница 17: ...sor manufacturer and directives given under Requirements to sensor connection 5 Connect pressure sensor cable 5 to sensor s and then to valve connector SENSOR Refer to chapter Electrical connection fo...

Страница 18: ...13 15 13 15 30 44 16 16 20 350 12 17 20 17 20 40 60 13 15 13 15 30 44 16 16 20 400 16 17 20 30 35 55 80 13 15 22 26 41 59 25 25 NA The torque values below are dependent on many factors such as materia...

Страница 19: ...F JIS ASA LP ISO F JIS ASA LP 63 4 N A N A N A N A N A N A 13 13 15 80 4 N A N A N A N A N A N A 13 13 15 100 4 N A N A N A N A N A N A 13 13 15 160 6 N A N A N A N A N A N A 14 14 15 200 8 N A N A N...

Страница 20: ...the valve body as specified The following forces are admissible DN nom I D Axial traction or pressure force FA Bending moment M FA mm inch N lbf Nm lbf ft 63 2 1960 440 78 58 80 3 1960 440 78 58 100...

Страница 21: ...e present Make also sure that there is no obstruction in front of sensor connection port inside the chamber The sensor should also be mounted free of mechanical shock and vibration Dynamic stray magne...

Страница 22: ...omized Connection plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground s...

Страница 23: ...r to supply 24 VDC sensors via controller o 24 VDC power to supply 24 VDC sensors externally External 24 VDC supplied to POWER connector is converted into 15 VDC by the valve internal SPS and supplied...

Страница 24: ...ecommendation a 5AF b Safety switch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector a...

Страница 25: ...shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sensor connector...

Страница 26: ...switch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V 15 VDC at DB 15...

Страница 27: ...ch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sen...

Страница 28: ...e system At valve controller DeviceNet cable PIN Name Wire color Description 1 Drain Bare Shield 2 V Red DeviceNet power supply 3 V Black DeviceNet power supply 4 CAN_H White DeviceNet signal 5 CAN_L...

Страница 29: ...t protocol In addition there is a digital input and a digital output Digital input may only be operated by a switch Active digital input has higher priority than DeviceNet commands higher priority tha...

Страница 30: ...function will indicate that the valve is closed If the function ON is configured the output is continous on Configuration can be changed in local operation via service port with CV CPA or Hyper termin...

Страница 31: ...configuration for details 5 ZERO Compensation of the sensor offset voltage Refer to chapter ZERO for details 6a LEARN Determination of the vacuum system characteristic to accommodate the PID controll...

Страница 32: ...kBaud 500kBaud the rate will be used and stored in the device memory as actual baudrate Factory default is 500kb In this case baudrate is not selectable by DeviceNet service If an invalid baudrate is...

Страница 33: ...nalyzer or Service Box 2 Remote operation Refer to chapter Explicit messaging setup commands for details It s not possible to make assembly object configuration in local operation 1 Select POLL CONNEC...

Страница 34: ...Digital input to change the configuration s 2601abcdef CR to read the configuration i 2601 CR It s not possible to configuration in remote operation Each element is separated with square brackets for...

Страница 35: ...power up configuration in menu Setup Valve Do power fail configuration in menu Setup Valve 1 Select POWER UP CONFIGURATION 2 Select POWER FAIL CONFIGURATION 4 6 5 Sensor configuration Basic sensor co...

Страница 36: ...for details With CPA Do the ZERO in menu Sensor Zero With SB2 Go to menu Zero ZERO and follow instructions 1 Send EXECUTING if not yet selected 2 Select SETPOINT TYPE position control 3 Select CONTRO...

Страница 37: ...VE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter Explicit me...

Страница 38: ...ssure of working point mbar qWP CWP 78 7 pWP CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance va...

Страница 39: ...r Pressure controller Fixed pressure controller Refer to chapter Pressure controller Fixed pressure controller Refer to chapter Pressure controller Soft Pump Soft Pump Refer to chapter Pressure contro...

Страница 40: ...tual pressure controller a i 02Z00a This command selects pressure controller a Pressure controller 0 Adaptive downstream 1 Fixed 1 2 Fixed 2 3 Soft pump It s not possible to do Pressure controller con...

Страница 41: ...ue using data type unsigned integer or floating point dependend on the corresponding data type For details commands etc see next tables Note Each pressure control algorithm has its own parameters That...

Страница 42: ...the pressure detection Pipes and orifices for sensor attachment can cause delays in response time and could impact badly the pressure control stability By adapting this parameter to the approximate d...

Страница 43: ...r response higher over undershoot of pressure A lower gain results in slower response lower over undershoot of pressure Example Set SENSOR DELAY of the adaptive pressure controller to the value 0 75 C...

Страница 44: ...tant Time The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation That means the ramp time from the actual value to the setpoint valu...

Страница 45: ...and Request Data Type Values RAMP TIME Pressure setpoint ramp time s Set s 02C01c s 02 FLOAT c 0 00 1 000 000 0 Default is 0 00 Get i 02C01 i 02C01c RAMP MODE Set s 02C02c s 02 UINT c 0 or 1 0 constan...

Страница 46: ...adjusted parameter ramp time value Mode 1 Constant Slope The RAMP TIME is dependent on the adjusted parameter ramp time and is different depending on the control deviation The RAMP TIME is calculated...

Страница 47: ...ptive algorithm Normally the default settings will result in good pressure control performance For some applications tuning may be required to improve performance The tuning procedures for each parame...

Страница 48: ...e 3 Control a typical pressure flow situation 4 Repeat from step 2 with lower higher gain factors until optimal pressure response is achieved and stability is ok Normally adjustments down to gain fact...

Страница 49: ...equirements to sensor connection This is the most effective measure against stability issues If your gauge attachment fulfills these criteria do not use this parameter Adjustment procedure 1 Start wit...

Страница 50: ...t with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situation 3 Control a lower pressure 4 Repeat from step 2 with longer setpoint ra...

Страница 51: ...may be of advantage to have a slower valve response OPEN and CLOSE are always done with maximum speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ramp according to pr...

Страница 52: ...ils It s not possible to optimize P gain and I Gain via DeviceNet Introduction PI controller mode is used if for any reason e g too long system time constant the adaptive control mode does not provide...

Страница 53: ...If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P gain is too high If there is no over shoot and the pressure reaches SP1 asymptoti...

Страница 54: ...essure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in just a slight pressure over shoot a s...

Страница 55: ...e process pressure The P gain value evaluated for soft pump control mode might be different than the P gain value evaluated for PI controller mode When switching to soft pump control mode the P gain v...

Страница 56: ...essure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position shou...

Страница 57: ...ocedure Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type...

Страница 58: ...4 2 or 4 1 100 64h Input EXCEPTION STATUS PRESSURE POSITION DEVICE STATUS 2 ACCESS MODE 1 2 or 4 2 or 4 1 1 101 65h Input EXCEPTION STATUS PRESSURE POSITION VALVE CLOSED OPEN CHECK 4 DEVICE STATUS 2 1...

Страница 59: ...Bit1 Bit0 Control valve 0 0 0 0 0 0 0 0 Close valve 0 0 0 0 0 0 0 1 Open valve 0 0 0 0 0 0 1 0 Hold valve 0 0 0 0 0 0 1 1 SETPOINT may be set to any value between the lowest and the highest value Dep...

Страница 60: ...No warning no error present 80h 1 0 0 0 0 0 0 0 PRESSURE will respond with any value between the lowest and the highest value see also Explicit messaging inquiry commands Description Bit7 Bit6 Bit5 B...

Страница 61: ...ons will be overwritten SETPOINT TYPE Set 16 51 0 8 1 Y Get 14 51 0 8 1 Y 0 pressure control 1 position control This command selects returns current setpoint type It toggles valve operation mode betwe...

Страница 62: ...4 Y Get 14 51 1 6 2 or 4 Y pressure setpoint according to selected DATA TYPE nominal pressure range is 0 10 000 sensor full scale but it may be scaled refer also to command GAIN for details This comma...

Страница 63: ...1 READING Get 14 100 1 108 2 or 4 This function returns direct reading from sensor 1 according to selected DATA TYPE Nominal range is 0 10 000 but it may be scaled Refer also to command GAIN and pict...

Страница 64: ...em In this configuration sensor 2 covers low range 100 mTorr and sensor 1 covers high range 1 Torr Switchover between sensors is done automatically according to Pressure control operation with 2 senso...

Страница 65: ...LEARN terminated by user 3 0 ok 1 pressure in position OPEN 50 sensor full scale of high range sensor in case of a 2 sensor system or LEARN PRESSURE LIMIT 4 0 ok 1 pressure in position 0 10 sensor fu...

Страница 66: ...ommand returns the exception status Bit Explanation LSB 0 0 reserved 1 0 reserved 2 This bit is set to 1 in case of a manufacturer specific alarm 3 0 reserved 4 0 reserved 5 0 reserved 6 This bit is s...

Страница 67: ...0 Manufacturer Exception Detail Byte 1 Reserved Reserved Isolation valve position failure Sensor ratio exceeded PFO not ready Compressed air failure Learn data set invalid Service request Manufacturer...

Страница 68: ...nsigned long integer A movement from max throttle position to open back to max throttle position counts as one cycle Partial movements will be added up until equivalent movement is achieved ISOLATION...

Страница 69: ...results in 0 32 767 GAIN POSITION Set 16 49 3 14 4 X Get 14 49 3 14 4 X gain max value is 3 2767 data type is floating point This command selects the gain for POSITION and allows for scaling Default v...

Страница 70: ...service port 1 Remote operation via DeviceNet 2 Locked in remote mode This command controls returns the access mode of the valve POWER UP CONFIGURATION Set 16 100 1 112 1 X Get 14 100 1 112 1 X 0 clos...

Страница 71: ...the high range sensor is used for for monitoring purpose only select sensor operation modes 1 or 3 for pressure control with low range sensor and read high range sensor from SENSOR 1 READING resp SENS...

Страница 72: ...orrect learn gas flow and procedure DOWNLOAD LEARN DATA 51 48 1 11 XY X index 000 103 whereas these indices must be ASCII coded e g 000 30h 30h 30h 001 30h 30h 31h etc Y 8 data bytes ASCII coded e g 3...

Страница 73: ...mmand selects returns the sensor delay for the PID controller Refer to Sensor delay adjustment for details PID CONTROLLER SETPOINT RAMP Set 16 51 1 108 1 X Get 14 51 1 108 1 X 0 0 1 0 5 2 1 0 3 1 5 4...

Страница 74: ...NING Valve opening Risk of serious injury Human body parts must be kept out of the valve opening and away from moving parts Do not connect the controller to power before the valve is installed complet...

Страница 75: ...start software and push button LOCAL to enable for operation Then enter menu Sensor Setup and do sensor configuration according to your application to make sure that you get the correct pressure displ...

Страница 76: ...ails Control Performance Analyzer software or Service Box 2 may be used for monitoring during remote control Control Performance Analyzer software Service Box 2 In case Control Performance Analyzer so...

Страница 77: ...mote operation Refer to chapter Explicit messaging control commands for details Push OPEN button 1 Send EXECUTING if not yet selected 2 Send SETPOINT TYPE position control 3 Send CONTROL MODE for posi...

Страница 78: ...re according to the pressure setpoint by means of the valve position The PID controller works with an adaptive algorithm to achieve best results under altering conditions gasflow gas type Local operat...

Страница 79: ...w range sensor is phased out while high range sensor is phased in during pressure rise During pressure decrease the high range sensor is phased out while low range sensor is phased in This maintains a...

Страница 80: ...s are illuminated 1 st information for about 3s Firmware generation e g 1G 1 G 2 st information for about 3s Firmware version and firmware revision e g 00 08 0 0 0 8 3 nd information for about 3s Valv...

Страница 81: ...E CONTROL mode P 0 100 valve position 0 closed 100 open POSITION CONTROL mode V Valve closed C Valve open O HOLD position frozen activated H ZERO running Z LEARN running L Safety mode established Refe...

Страница 82: ...tus LED on Green Turn Network Status LED on Green for approximately 0 25 seconds Turn Network Status LED on Red for approximately 0 25 seconds Turn Network Status LED off 5 6 4 1 Module Status LED Thi...

Страница 83: ...diagrams Electrical connection the motor power supply can be interrupted In this case the valve enters the safety mode This motor interlock prevents the valve from moving e g maintenance work Data rea...

Страница 84: ...r up is closed Valve position after power up is open Refer also to chapter Display information 5 8 Behavior in case of power failure Valve position before power failure Reaction of valve Without Power...

Страница 85: ...r to ODVA specification volume II release 2 0 incl errata 1 IDENTITY OBJECT figure 6 2 state event matrix for identity object Network Status LED is off Device is not on line DeviceNet power supply ok...

Страница 86: ...y shows E 22 or E 23 and position is 009999 fatal error movement of valve plate limited during operation Valve unit heavy contaminated Valve plate mechanically obstructed Check differential pressure o...

Страница 87: ...1 4V Replace pressure gauge PRESSURE CONTROL does not work Safety mode active check for D on display Provide power to motor to allow for operation Refer to Electrical connection for details PRESSURE...

Страница 88: ...ve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glo...

Страница 89: ...lve cleaning Required frequency of cleaning and replacement of seals is depending on process conditions VAT can give the following recommendations for preventive maintenance Replacement of Recommendat...

Страница 90: ...ol Vacuum grease see chapter spare parts O ring removal tool see chapter Accessories Clean room wiper Description Required tool 1 Vent both valve chambers 2 Open the valve 3 Turn off power to valve co...

Страница 91: ...crank bolt can be reached 10 Loosen and remove the crank bolt screw Allen wrench 4 mm 11 Remove the crank bolt from lever 12 Pull out the gate assembly complete Caution Take care that gate is not scra...

Страница 92: ...ally in o ring groove for new o ring refer to chapter Spare parts 17 Clean the valve body inside Cleaning tool a little soaked with isopropyl alcohol refer to chapter Spare parts for cleaning tool 18...

Страница 93: ...en torque wrench 4 mm 22 Push in the gate assembly into valve body 23 Clean the valve bonnet Clean room wiper a little soaked with isopropyl alcohol 24 Clean or replace the bonnet seal 25 Lubricate th...

Страница 94: ...equired tool 26 Reassemble the bonnet and bonnet seal with valve 27 Fasten the bonnet screws with DN 63 100 with 10 Nm DN 160 400 with 18 Nm DN 63 100 1 Open end torque wrench 13 mm 1 Open end wrench...

Страница 95: ...s under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the va...

Страница 96: ...lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap...

Страница 97: ...position into control and actuating unit It is not possible to fit a board in other position as shown in picture above 7 2 3 1 Needed tools Ballpoint Open end wrench 10 mm Open end wrench 7 mm Open en...

Страница 98: ...ntion to ESD protection Pozidriv screw driver size1 Open end wrench 7 mm 2 Write down the NODE ADDRESS and DATA RATE in case of Interface board replacement Ballpoint 3 Remove the panel screws Pozidriv...

Страница 99: ...93EC Edition 2017 11 24 99 113 Description Required tool 6 Loosen and remove the LOCIC connector screw Open end wrench 10mm 7 Lift controller panel carefully 8 Remove or replace option board 9 Remove...

Страница 100: ...replace interface board 11 Remove or replace master board 12 Remove or replace motor driver board 13 Insert all boards in reverse order as they disassembled at correct positions see steps 12 to 7 14 R...

Страница 101: ...Interface board adjust the NODE ADDRESS and DATA RATE see step 2 Screw driver size 00 17 Connect all electrical connections Pozidriv screw driver size1 Open end wrench 7 mm If you need any further in...

Страница 102: ...epairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service c...

Страница 103: ...d work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position V...

Страница 104: ...e humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use...

Страница 105: ...ing products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www vat...

Страница 106: ...EC 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT disclai...

Страница 107: ...AL 605593EC Edition 2017 11 24 107 113 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out th...

Страница 108: ...er for spare parts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer...

Страница 109: ...Series 642 SPARE PARTS 605593EC Edition 2017 11 24 109 113 12 1 Drawing Sample picture All Item refer to chapter Drawing...

Страница 110: ...236 478357 487706 478357 487706 711045 539937 711045 539937 707681 587193 11 Static actuator seal N 5100 222 N 5100 222 N 5100 222 N 5100 225 N 5100 225 N 5100 228 N 5100 228 N 5100 228 21 Locking bal...

Страница 111: ...602BS 29LE 000 O ring removal tool 234859 VAT valve cleaning tool 305709 12 1 3 1 Centering ring with Viton o ring Valve size Product ordering number DN 63 2 64236 DN 80 3 64238 DN 100 4 64240 Center...

Страница 112: ...APPENDIX Series 642 112 113 Edition 2017 11 24 605593EC 13 Appendix No information entered on time...

Страница 113: ...Series 642 605593EC Edition 2017 11 24 113 113 This page left blank intentionally...

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