OPERATION
Series 642
78/113
Edition 2017-11-24
605593EC
5.5
Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control
performance. Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means
of the valve position. The PID controller works with an adaptive algorithm to achieve best results under
altering conditions (gasflow, gas type).
Local operation:
(‘Control View’, ‘Control Performance Analyzer’
or ‘Service Box 2‘)
Remote operation:
(Refer to chapter «Explicit messaging control
commands» for details)
Select or enter pressure setpoint
1. Send EXECUTING
(if not yet selected)
2. Send SETPOINT TYPE
= pressure control
3. Send MODE for pressure
= control mode
4. Send CONTROL SETPOINT = pressure
