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Series 642

DESIGN AND FUNCTION

605593EC

Edition 2017-11-24

11/113

3.2.1

Pressure control system overview and function

Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.

Seff

Example: Downstream control

1 Valve

2 Process chamber

3 Gas inlet

4 Pressure sensor(s)

5 Sensor cable

6 Controller and actuator

7 Cable to remote control unit

8 Cable to power supply

9 HV Pump

eff

Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (mbar)

p Pressure (mbar)

or units used in USA

eff

= 12.7 • Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (sccm)

p Pressure (mTorr)

Содержание 642 AP Series

Страница 1: ... the valve ordering number s 642 GP 1 sensor input 642 GQ 2 sensor inputs 642 AP 1 sensor input 15V SPS 642 AQ 2 sensor inputs 15V SPS 642 HP 1 sensor input PFO 642 HQ 2 sensor inputs PFO 642 CP 1 sensor input 15V SPS PFO 642 CQ 2 sensor inputs 15V SPS PFO SPS Sensor Power Supply PFO Power Failure Option configured with firmware 600P 1G 00 08 and 375487 DeviceNet Sample picture ...

Страница 2: ... duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products The VAT firmware contains a limited time unlimited user license The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the ...

Страница 3: ...langes 18 4 3 2 Mounting with centering rings 18 4 3 3 Mounting with O ring in grooves 19 4 4 Admissible forces 20 4 4 1 Requirements to sensor connection 21 4 5 Electrical connection 21 4 5 1 Ground connection 22 4 5 2 Sensor supply concepts 23 4 5 3 Power and sensor connection 24 VDC sensors 24 4 5 4 Power 24 VDC and sensor connection 15 VDC sensors with SPS module26 4 5 5 DeviceNet interface co...

Страница 4: ...eration 81 5 6 3 Errors 81 5 6 4 DeviceNet LEDs 82 5 6 5 Safety mode 83 5 6 6 Service indication 83 5 7 Operation during power up 84 5 8 Behavior in case of power failure 84 5 9 Operation under increased temperature 84 6 Trouble shooting 85 7 Maintenance 88 7 1 Maintenance intervals 88 7 2 Maintenance procedures 89 7 2 1 Replacement of gate seals and valve cleaning 90 7 2 2 Replacement of Option b...

Страница 5: ...nstream pressure control applications Use product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation Description CPA Control Performance Analyzer PFO Power Failure Option SFS Sensor Full Scale SPS Sensor Power Supply ADC Analog to digital converter 1 4 Related documents Product Data Sheet Dimensional...

Страница 6: ...nector SENSOR Sensor input Signal input voltage ADC resolution Sampling time 0 10 VDC Ri 100 kΩ 0 23 mV 10 ms connector SENSOR LOGIC I O 3 configurable 1 digital input 1 digital output connector LOGIC I O PFO 4 battery pack 642 C 642 H Charging time Durability 2 minutes max up to 10 years 25 C ambient refer to Durability of power fail battery for details Ambient temperature 0 C to 50 C max 35 C re...

Страница 7: ...tical position with extended closing time fewer cycles Process side materials body plate Stainless steel 304 1 4301 other parts Stainless steel 301 1 4310 304 1 4301 420 1 4034 420D 1 4037 430 1 4016 Seals plate FKM e g Viton rotary feed through FKM e g Viton bonnet FKM e g Viton DN63 200 vulcanized Operating time s for DN 63 2 DN 80 3 DN 100 4 DN 160 6 DN 200 8 DN 250 10 DN 320 12 DN 350 14 DN 40...

Страница 8: ...tion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and accessible for anybody who is authorized to work with the system at any time 2 2 Danger levels DANGER High risk Indicates a hazardous situation which if not avoided will result in death or serious injury...

Страница 9: ...tions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part No Location on valve T 9001 156 On protective foil covering of valve opening ...

Страница 10: ...s 10 Bonnet seal 5 Detents 11 Rotary feed through seals 6 Crank bolt 3 2 Function The valve gate 1 acts as a throttling element and varies the conductance of the valve opening Actuation is performed with a stepper motor and controller The stepper motor controller version ensures accurate pressure control due to exact gate positioning For leak tight closing the VATLOCK principle is applied For deta...

Страница 11: ... differences M 3 4 5 7 8 2 1 9 Q p V Seff 6 Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV Pump Seff Q p Seff effective pump speed ls 1 Q Gas flow mbar p Pressure mbar or units used in USA Seff 12 7 Q p Seff effective pump speed ls 1 Q Gas flow sccm p Pressure ...

Страница 12: ...as is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and process chamber This changes the effective pumping speed at the process chamber Pressure and gas flow can be independently controlled over a wide range 2 Upstream control The pressure is controlled by cha...

Страница 13: ...hysical overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it does not meet your requirements please contact VAT immediately Store the original packaging material It may be useful if products must be returned to VAT 1 Open the transport case and remove inside pa...

Страница 14: ...rrect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all cables exactly as shown in the following descriptions and schematics NOTICE Burned connector pins spark Connector pins or electronic parts could damage if plugged and unplugged under power Do not plug ...

Страница 15: ... space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below sample picture Overview table DN to required distance d for maintenance DN 63 80 100 160 200 250 320 350 400 d 180 220 300 350 450 550 600 100 d ...

Страница 16: ...ection overview System M 3 4 5 6 7 2 1 9 8 10 11 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Cable to remote control unit 7 Cable to power supply 8 Controller 9 Connection cable controller actuator 10 Actuator 11 Pump Actuator Controller ...

Страница 17: ...nsor manufacturer and directives given under Requirements to sensor connection 5 Connect pressure sensor cable 5 to sensor s and then to valve connector SENSOR Refer to chapter Electrical connection for correct wiring Input for second sensor is available on 642 Q version only 6 Connect valve to DeviceNet 6 DeviceNet connector Refer to DeviceNet interface connection for correct wiring 7 Connect pow...

Страница 18: ...3 15 13 15 30 44 16 16 20 350 12 17 20 17 20 40 60 13 15 13 15 30 44 16 16 20 400 16 17 20 30 35 55 80 13 15 22 26 41 59 25 25 NA The torque values below are dependent on many factors such as materials involved surface quality surface treatment and lubrication The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter min 1d and the friction coeffici...

Страница 19: ...O F JIS ASA LP ISO F JIS ASA LP 63 4 N A N A N A N A N A N A 13 13 15 80 4 N A N A N A N A N A N A 13 13 15 100 4 N A N A N A N A N A N A 13 13 15 160 6 N A N A N A N A N A N A 14 14 15 200 8 N A N A N A N A N A N A 16 16 20 250 10 N A N A N A N A N A N A 16 16 20 320 12 N A N A N A N A N A N A 16 16 20 350 12 NA N A N A N A N A N A 16 16 20 400 16 NA N A N A N A N A N A 25 25 N A ...

Страница 20: ...e the valve body as specified The following forces are admissible DN nom I D Axial traction or pressure force FA Bending moment M FA mm inch N lbf Nm lbf ft 63 2 1960 440 78 58 80 3 1960 440 78 58 100 4 2450 560 98 72 160 6 2940 660 147 108 200 8 2940 660 147 108 250 10 3430 770 196 145 320 12 3920 880 294 217 350 14 3920 880 294 217 400 16 7840 1760 980 722 In case of both kind of forces are occu...

Страница 21: ...be present Make also sure that there is no obstruction in front of sensor connection port inside the chamber The sensor should also be mounted free of mechanical shock and vibration Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded 4 5 Electrical connection NOTICE Wrong connection Wrong connection may result in damage of controller or power supply...

Страница 22: ...tomized Connection plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground strap at system chamber if it is well connected to PE Avoid low chassis cross section to the system PE connection min same cross section as ground strap d2 Chassis PE Protective Earth B1 B2 d1 L PE Re...

Страница 23: ...er to supply 24 VDC sensors via controller o 24 VDC power to supply 24 VDC sensors externally External 24 VDC supplied to POWER connector is converted into 15 VDC by the valve internal SPS and supplied to SENSOR connector to supply 15 VDC sensors Refer to chapter Power and sensor connection 15 VDC sensors with opt SPS module for schematic and correct wiring External 15 VDC power to supply 15 VDC s...

Страница 24: ...recommendation a 5AF b Safety switch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 24V 0V at DB 15 female sensor connector exactly as shown in the drawing above Pins 2 and 3 must be bridged for operation An optional switch would allow for motor interlock to prevent valve...

Страница 25: ...e shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sensor connector exactly as shown in the drawing above Pins 2 and 3 must be bridged for operation An optional switch would allow for motor interlock to prevent valve from moving SC1 091 A ...

Страница 26: ... switch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V 15 VDC at DB 15 female sensor connector exactly as shown in the drawing above Pins 2 and 3 must be bridged for operation An optional switch would allow for motor interlock to prevent valve from moving SC 1090 A ...

Страница 27: ...tch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sensor connector exactly as shown in the drawing above SC 1092 A Pins 2 and 3 must be bridged for operation An optional switch would allow for motor interlock to prevent valve from moving ...

Страница 28: ...he system At valve controller DeviceNet cable PIN Name Wire color Description 1 Drain Bare Shield 2 V Red DeviceNet power supply 3 V Black DeviceNet power supply 4 CAN_H White DeviceNet signal 5 CAN_L Blue DeviceNet signal The DeviceNet interface is galvanic isolated from control unit 4 5 5 1 Micro Connector Pinout Male pins at valve controller Female sockets at DeviceNet cable 5 1 2 3 4 1 5 2 3 4...

Страница 29: ...et protocol In addition there is a digital input and a digital output Digital input may only be operated by a switch Active digital input has higher priority than DeviceNet commands higher priority than Local commands Configuration with switch for digital input Do not connect other pins than indicated in the schematics above Connector type Binder M8 99 3363 00 04 ...

Страница 30: ... function will indicate that the valve is closed If the function ON is configured the output is continous on Configuration can be changed in local operation via service port with CV CPA or Hyper terminal Refer to chapter LOGIC I O configuration 4 Digital common Common for all digital output Connect or terminal of source with common See also chapter LOGIC I O 4 5 7 Service port connection The servi...

Страница 31: ...r configuration for details 5 ZERO Compensation of the sensor offset voltage Refer to chapter ZERO for details 6a LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEARN adaptive for details 6b PRESSURE CONTROL COFIGURATION Accommodation of PID controller to the vacuum system characteristic Refer to chapter Pressure control configuration for...

Страница 32: ...0kBaud 500kBaud the rate will be used and stored in the device memory as actual baudrate Factory default is 500kb In this case baudrate is not selectable by DeviceNet service If an invalid baudrate is selected the baudrate will be read from the device memory and the rate is settable by DeviceNet 3 DeviceNet offers many parameters that may be set Many of them are not directly used to operate the va...

Страница 33: ...Analyzer or Service Box 2 Remote operation Refer to chapter Explicit messaging setup commands for details It s not possible to make assembly object configuration in local operation 1 Select POLL CONNECTION OUTPUT assembly 2 Select POLL CONNECTION INPUT assembly 3 Select CHANGE OF STATE CYCLING INPUT assembly 4 Reestablish poll I O connection ...

Страница 34: ...r Digital input to change the configuration s 2601abcdef CR to read the configuration i 2601 CR It s not possible to configuration in remote operation Each element is separated with square brackets for clarity Square brackets are not part of command syntax All elements are ASCII characters There are no spaces between the elements necessary Command is case sensitive data length 6 characters a 0 clo...

Страница 35: ...o power up configuration in menu Setup Valve Do power fail configuration in menu Setup Valve 1 Select POWER UP CONFIGURATION 2 Select POWER FAIL CONFIGURATION 4 6 5 Sensor configuration Basic sensor configuration must be adapted according to application needs ZERO function This may be disabled or enabled Default is enabled Refer also to chapter ZERO Sensor configuration for 2 sensors versions 642 ...

Страница 36: ...s for details With CPA Do the ZERO in menu Sensor Zero With SB2 Go to menu Zero ZERO and follow instructions 1 Send EXECUTING if not yet selected 2 Select SETPOINT TYPE position control 3 Select CONTROL MODE for position open valve 4 Wait until process chamber is evacuated and sensor signal is not shifting anymore 5 Send ZERO Do not perform ZERO as long as pressure gauge voltage is shifting otherw...

Страница 37: ...LVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter Explicit messaging control commands resp Explicit messaging setup commands for details Go to Learn LEARN menu and follow instructions Gasflow calculation according to recommendation below is done automatically ...

Страница 38: ...essure of working point mbar qWP CWP 78 7 pWP CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR min CWP1 CWP2 CWPn CR required lower conductance l s CWPx required conductance of working points l s To make sure that the valve is capable to control the most extreme worki...

Страница 39: ...er Pressure controller Fixed pressure controller Refer to chapter Pressure controller Fixed pressure controller Refer to chapter Pressure controller Soft Pump Soft Pump Refer to chapter Pressure controller Use the formula below to define the applicable pressure control algorithm PSFS CV Tv qL qL gasflow for learn mbarl s pSFS sensor full scale pressure mbar Tv Vacuum time constant sec CV Chamber V...

Страница 40: ...ctual pressure controller a i 02Z00a This command selects pressure controller a Pressure controller 0 Adaptive downstream 1 Fixed 1 2 Fixed 2 3 Soft pump It s not possible to do Pressure controller configuration via remote operation For easy setup Local operation of Pressure controller and Pressure control parameter please use the VAT Control Performance Analyzer CPA 3 0 There is a free download o...

Страница 41: ...lue using data type unsigned integer or floating point dependend on the corresponding data type For details commands etc see next tables Note Each pressure control algorithm has its own parameters That means the adjustment of a e g adaptive downstream parameter e g Ramp Time Adaptive downstream doesn t influence one of the other Ramp time parameter of other pressure control algorithms and vice ver...

Страница 42: ...g the pressure detection Pipes and orifices for sensor attachment can cause delays in response time and could impact badly the pressure control stability By adapting this parameter to the approximate delay time stability problems can be reduced But control response time will be slowed down by this measure RAMP TIME Pressure setpoint ramp time s RAMP MODE Mode 0 Cocnstant Time The RAMP TIME is depe...

Страница 43: ...er response higher over undershoot of pressure A lower gain results in slower response lower over undershoot of pressure Example Set SENSOR DELAY of the adaptive pressure controller to the value 0 75 Command Pressure controller Parameter selection variable Parameter value seconds s 02 A a 00 bb 0 75 c s 02A000 75 To optimize adaptive control algorithm refer to chapter Tuning of control performance...

Страница 44: ...stant Time The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation That means the ramp time from the actual value to the setpoint value is the adjusted parameter ramp time value Mode 1 Constant Slope The RAMP TIME is dependent on the adjusted parameter ramp time and is different depending on the control deviation The RAMP TIME is c...

Страница 45: ...mand Request Data Type Values RAMP TIME Pressure setpoint ramp time s Set s 02C01c s 02 FLOAT c 0 00 1 000 000 0 Default is 0 00 Get i 02C01 i 02C01c RAMP MODE Set s 02C02c s 02 UINT c 0 or 1 0 constant time 1 constant slope Default is 0 Get i 02C02 i 02C02c CONTROL DIRECTION Set s 02C03c s 02 UINT c 0 or 1 0 downstream 1 upstream Default is 0 Get i 02C03 i 02C03c P GAIN Set s 02C04c s 02 FLOAT c ...

Страница 46: ... adjusted parameter ramp time value Mode 1 Constant Slope The RAMP TIME is dependent on the adjusted parameter ramp time and is different depending on the control deviation The RAMP TIME is calculated corresponding to the sensor full scale value 10V Ramp time 10 sec ramp time slope is SFS 10V in 10 Seconds P GAIN The P GAIN is the proportional factor of the soft pump control algorithm To optimize ...

Страница 47: ...aptive algorithm Normally the default settings will result in good pressure control performance For some applications tuning may be required to improve performance The tuning procedures for each parameter grey boxes and its default values are described separately below Strictly keep the procedure order ...

Страница 48: ...ve 3 Control a typical pressure flow situation 4 Repeat from step 2 with lower higher gain factors until optimal pressure response is achieved and stability is ok Normally adjustments down to gain factors of 0 42 should lead to good results Otherwise you may need to improve sensor connection Refer to Requirements to sensor connection Local operation Control View Control Performance Analyzer or Ser...

Страница 49: ...Requirements to sensor connection This is the most effective measure against stability issues If your gauge attachment fulfills these criteria do not use this parameter Adjustment procedure 1 Start with gain factor 1 0 and sensor delay 0s 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with higher sensor delays until best possible stability is achieved 5 Adjustment ga...

Страница 50: ...rt with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situation 3 Control a lower pressure 4 Repeat from step 2 with longer setpoint ramps until best response is achieved 5 Verify pressure control response for a setpoint raise situation In case a long ramp time is required to get optimal performance for pressure decrease situations ...

Страница 51: ... may be of advantage to have a slower valve response OPEN and CLOSE are always done with maximum speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed until required response is achieved Local operation Control View Control Per...

Страница 52: ...ails It s not possible to optimize P gain and I Gain via DeviceNet Introduction PI controller mode is used if for any reason e g too long system time constant the adaptive control mode does not provide satisfying control performance In PI controller mode the parameters P gain and I gain have to be set according to the systems characteristics The best set of parameters can be found by using the emp...

Страница 53: ... If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P gain is too high If there is no over shoot and the pressure reaches SP1 asymptotically and very slow P gain is too low The optimal P gain value is found if the transition from SP2 to SP1 results in a slight pressure over shoot It does not matter if there is still a deviation betw...

Страница 54: ...ressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in just a slight pressure over shoot a stable valve position and the actual pressure matches SP2 exactly Example Check control performance over the whole control range with parameters above 4 7 2 1 Required information for support in case ...

Страница 55: ...me process pressure The P gain value evaluated for soft pump control mode might be different than the P gain value evaluated for PI controller mode When switching to soft pump control mode the P gain value evaluated fort the PI controller has to be send to the valve controller When switching back into PI controller mode the respective P gain value has to be send again Adaptive pressure control mod...

Страница 56: ...ressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position should be data logged to compare the actual pump down curve with the ideal straight pump down line If the pressure follows the ideal pump down line with significant delay the P gain is too low If the pre...

Страница 57: ...rocedure Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System description Problem description Send diagnostic file with and all required information to tuning support vat ch ...

Страница 58: ... 4 2 or 4 1 100 64h Input EXCEPTION STATUS PRESSURE POSITION DEVICE STATUS 2 ACCESS MODE 1 2 or 4 2 or 4 1 1 101 65h Input EXCEPTION STATUS PRESSURE POSITION VALVE CLOSED OPEN CHECK 4 DEVICE STATUS 2 1 2 or 4 2 or 4 1 1 102 66h Output CONTROL MODE SETPOINT 3 SETPOINT TYPE LEARN 5 LEARN PRESSURE LIMIT ZERO 5 1 2 or 4 1 1 2 or 4 1 1 Depending on DATA TYPE configuration signed integer or floating poi...

Страница 59: ...2 Bit1 Bit0 Control valve 0 0 0 0 0 0 0 0 Close valve 0 0 0 0 0 0 0 1 Open valve 0 0 0 0 0 0 1 0 Hold valve 0 0 0 0 0 0 1 1 SETPOINT may be set to any value between the lowest and the highest value Depending on SETPOINT TYPE it reflects position or pressure setpoint see also Explicit messaging control commands Description Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Lowest value 0 low byte 0 0 0 0 0 0 ...

Страница 60: ...0 No warning no error present 80h 1 0 0 0 0 0 0 0 PRESSURE will respond with any value between the lowest and the highest value see also Explicit messaging inquiry commands Description Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Lowest value 0 0000h low byte 00h 0 0 0 0 0 0 0 0 high byte 00h 0 0 0 0 0 0 0 0 Highest value 10000 2710h low byte 10h 0 0 0 1 0 0 0 0 high byte 27h 0 0 1 0 0 1 1 1 POSITION w...

Страница 61: ...ions will be overwritten SETPOINT TYPE Set 16 51 0 8 1 Y Get 14 51 0 8 1 Y 0 pressure control 1 position control This command selects returns current setpoint type It toggles valve operation mode between position and pressure control To perform either position or pressure control also correct CONTROL MODE must be selected CONTROL MODE Set 16 51 1 pressure 2 position 5 1 Y Get 14 51 1 pressure 2 po...

Страница 62: ... 4 Y Get 14 51 1 6 2 or 4 Y pressure setpoint according to selected DATA TYPE nominal pressure range is 0 10 000 sensor full scale but it may be scaled refer also to command GAIN for details This command transfers reads the pressure setpoint to from the valve ASSEMBLY OBJECTS Set 16 4 7 8 102 3 X Y Get 14 4 3 4 5 13 14 100 101 3 X X Y depending on respective assembly object refer to Assembly objec...

Страница 63: ...R 1 READING Get 14 100 1 108 2 or 4 This function returns direct reading from sensor 1 according to selected DATA TYPE Nominal range is 0 10 000 but it may be scaled Refer also to command GAIN and picture on the following page for details SENSOR 2 READING Get 14 100 1 109 2 or 4 This function returns direct reading from sensor 2 according to selected DATA TYPE Nominal range is 0 10 000 but it may ...

Страница 64: ...tem In this configuration sensor 2 covers low range 100 mTorr and sensor 1 covers high range 1 Torr Switchover between sensors is done automatically according to Pressure control operation with 2 sensors 0 10V High range sensor Low range sensor 0 10V SENSOR 1 READING 0 10 000 100 mTorr 1 Torr 0 mTorr SENSOR 2 READING 0 10 000 PRESSURE 0 10 000 ...

Страница 65: ...1 LEARN terminated by user 3 0 ok 1 pressure in position OPEN 50 sensor full scale of high range sensor in case of a 2 sensor system or LEARN PRESSURE LIMIT 4 0 ok 1 pressure in position 0 10 sensor full scale of low range sensor in case of a 2 sensor system 5 0 ok 1 pressure falling during LEARN 6 0 ok 1 sensor not stable during LEARN 7 reserved 8 reserved 9 reserved 10 0 ok 1 LEARN terminated by...

Страница 66: ...command returns the exception status Bit Explanation LSB 0 0 reserved 1 0 reserved 2 This bit is set to 1 in case of a manufacturer specific alarm 3 0 reserved 4 0 reserved 5 0 reserved 6 This bit is set to 1 in case of a manufacturer specific warning MSB 7 1 The exception status byte only indicates that alarms or warnings are present In order to find out which alarm or warning is present you must...

Страница 67: ... 0 Manufacturer Exception Detail Byte 1 Reserved Reserved Isolation valve position failure Sensor ratio exceeded PFO not ready Compressed air failure Learn data set invalid Service request Manufacturer Exception Detail Byte 2 Reserved Reserved Reserved Reserved Reserved ADC not responding Reserved Reserved Manufacturer Exception Detail Byte 3 Reserved Reserved Reserved Wrong Device Status 2 Wrong ...

Страница 68: ...unsigned long integer A movement from max throttle position to open back to max throttle position counts as one cycle Partial movements will be added up until equivalent movement is achieved ISOLATION CYCLE COUNTER Get 14 100 1 106 4 This command returns the number of isolation cycles Data type is unsigned long integer Each closing of the sealing ring counts as one cycle Unless otherwise specified...

Страница 69: ... results in 0 32 767 GAIN POSITION Set 16 49 3 14 4 X Get 14 49 3 14 4 X gain max value is 3 2767 data type is floating point This command selects the gain for POSITION and allows for scaling Default value is 1 3Fh 80h 00h 00h high byte first notation e g Gain 0 1 position value range results in 0 1 000 3Dh CCh CCh CCh Gain 1 position value range results in 0 10 000 3Fh 80h 00h 00h Gain 3 2767 pos...

Страница 70: ... service port 1 Remote operation via DeviceNet 2 Locked in remote mode This command controls returns the access mode of the valve POWER UP CONFIGURATION Set 16 100 1 112 1 X Get 14 100 1 112 1 X 0 closed 1 open This command controls returns the valve position after power up POWER FAIL CONFIGURATION Set 16 100 1 113 1 X Get 14 100 1 113 1 X 0 closed 1 open This command controls returns the target v...

Страница 71: ... the high range sensor is used for for monitoring purpose only select sensor operation modes 1 or 3 for pressure control with low range sensor and read high range sensor from SENSOR 1 READING resp SENSOR 2 READING SENSOR RATIO Set 16 49 1 103 2 or 4 X Get 14 49 1 103 2 or 4 X sensor ratio according to selected DATA TYPE range is 100 10 000 This command defines the sensor ratio for 2 sensor operati...

Страница 72: ...correct learn gas flow and procedure DOWNLOAD LEARN DATA 51 48 1 11 XY X index 000 103 whereas these indices must be ASCII coded e g 000 30h 30h 30h 001 30h 30h 31h etc Y 8 data bytes ASCII coded e g 30h 32h 33h 33h 33h 30h 33h 36h Example of XY 30h 30h 30h 30h 32h 33h 33h 33h 30h 33h 36h 11 bytes in total This command loads the learn data sets from the host down to the valve There are a total num...

Страница 73: ...ommand selects returns the sensor delay for the PID controller Refer to Sensor delay adjustment for details PID CONTROLLER SETPOINT RAMP Set 16 51 1 108 1 X Get 14 51 1 108 1 X 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 10 5 0 11 5 5 12 6 0 13 6 5 14 7 0 15 7 5 16 8 0 17 8 5 18 9 0 19 9 5 20 10 0 This command selects returns the setpoint ramp for the PID controller Refer to Setpoint...

Страница 74: ...RNING Valve opening Risk of serious injury Human body parts must be kept out of the valve opening and away from moving parts Do not connect the controller to power before the valve is installed complete into the system 5 1 Normal operation This valve is designed for downstream pressure control in vacuum chambers It can be employed in a pressure control mode or a position control mode In both cases...

Страница 75: ... start software and push button LOCAL to enable for operation Then enter menu Sensor Setup and do sensor configuration according to your application to make sure that you get the correct pressure displayed Control Performance Analyzer supports Valve setup Sensor setup Pressure control Interface setup Manual control Sequence ontrol Numeric and graphical monitoring Data recording Data analysis Advan...

Страница 76: ...tails Control Performance Analyzer software or Service Box 2 may be used for monitoring during remote control Control Performance Analyzer software Service Box 2 In case Control Performance Analyzer software is connected to valve make sure REMOTE button is pushed to enable for remote operation In case Service Box 2 is connected to valve make sure the LED on button LOCAL is OFF for remote operation...

Страница 77: ...emote operation Refer to chapter Explicit messaging control commands for details Push OPEN button 1 Send EXECUTING if not yet selected 2 Send SETPOINT TYPE position control 3 Send CONTROL MODE for position open valve 5 4 Position control The valve position is directly controlled according to the position setpoint Local operation Control View Control Performance Analyzer or Service Box 2 Remote ope...

Страница 78: ...ure according to the pressure setpoint by means of the valve position The PID controller works with an adaptive algorithm to achieve best results under altering conditions gasflow gas type Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter Explicit messaging control commands for details Select or enter pressure setpoint 1 Send EXECUTING if ...

Страница 79: ...ow range sensor is phased out while high range sensor is phased in during pressure rise During pressure decrease the high range sensor is phased out while low range sensor is phased in This maintains a functional response behavior in case of small calibration errors between the two sensors The PRESSURE output in this range is a blend between both sensors For monitoring purpose each sensor signal m...

Страница 80: ...ts are illuminated 1 st information for about 3s Firmware generation e g 1G 1 G 2 st information for about 3s Firmware version and firmware revision e g 00 08 0 0 0 8 3 nd information for about 3s Valve type e g 612 6 1 2 4 nd information for about 3s Controller configuration In case D999 is displayed motor interlock is active Refer to Safety mode for details 4 DeviceNet Interface 0 basic 1 with S...

Страница 81: ...RE CONTROL mode P 0 100 valve position 0 closed 100 open POSITION CONTROL mode V Valve closed C Valve open O HOLD position frozen activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode for details D Service request 1 S R Power failure F 1 SR is blinking alternatively with the actual mode display e g C SR 5 6 3 Errors Description Digit 1 Digit 2 Digit 3 Digit 4 Fata...

Страница 82: ...atus LED on Green Turn Network Status LED on Green for approximately 0 25 seconds Turn Network Status LED on Red for approximately 0 25 seconds Turn Network Status LED off 5 6 4 1 Module Status LED This bi color green red LED provides device status It indicates whether or not the device has power and is operating properly Table below define the Module Status LED states State LED Description No Pow...

Страница 83: ... diagrams Electrical connection the motor power supply can be interrupted In this case the valve enters the safety mode This motor interlock prevents the valve from moving e g maintenance work Data reading from the control unit remains possible When motor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize Display shows D C or D999 In this c...

Страница 84: ...er up is closed Valve position after power up is open Refer also to chapter Display information 5 8 Behavior in case of power failure Valve position before power failure Reaction of valve Without Power Failure Option PFO 642 G 642 A 642 T 642 V With Power Failure Option PFO 642 H 642 C 642 U 642 W Any Valve remains at current position Valve will close or open depending on valve configuration 1 Def...

Страница 85: ...er to ODVA specification volume II release 2 0 incl errata 1 IDENTITY OBJECT figure 6 2 state event matrix for identity object Network Status LED is off Device is not on line DeviceNet power supply ok Connect valve to DeviceNet according to DeviceNet connection and make sure that power is provided Network Status LED is flashing green on line but no connections in the established state Allocate dev...

Страница 86: ...ay shows E 22 or E 23 and position is 009999 fatal error movement of valve plate limited during operation Valve unit heavy contaminated Valve plate mechanically obstructed Check differential pressure on gate Clean valve unit according to Maintenance procedure Resolve obstruction Reset control unit Cycle power OFFàON or Send reset command local via service port with CV CPA Service Box2 Display show...

Страница 87: ...s 1 4V Replace pressure gauge PRESSURE CONTROL does not work Safety mode active check for D on display Provide power to motor to allow for operation Refer to Electrical connection for details PRESSURE CONTROL selected check for P on display Select PRESSURE CONTROL mode Refer to Pressure control for details LEARN done Perform LEARN Refer to Setup procedure for details PRESSURE CONTROL not optimal S...

Страница 88: ...lve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve 7 1 Maintenance intervals Under clean operating conditions the valve does not require any maintenance during the specified cycle life Contamination from the process may in...

Страница 89: ...alve cleaning Required frequency of cleaning and replacement of seals is depending on process conditions VAT can give the following recommendations for preventive maintenance Replacement of Recommendation Gate seal gate and bonnet seal Every 100 000 cycles For spare parts of gate and bonnet seal refer to chapter Spare parts All pictures in maintenance procedure are sample pictures DN63 400 ...

Страница 90: ...hol Vacuum grease see chapter spare parts O ring removal tool see chapter Accessories Clean room wiper Description Required tool 1 Vent both valve chambers 2 Open the valve 3 Turn off power to valve controller 4 Disable power fail option wait 60 seconds CPA or Service Box 2 5 Disconnect power cable at controller 6 Unfasten and remove the bonnet screws 2 Open end wrench 10 mm DN 63 100 2 Open end w...

Страница 91: ... crank bolt can be reached 10 Loosen and remove the crank bolt screw Allen wrench 4 mm 11 Remove the crank bolt from lever 12 Pull out the gate assembly complete Caution Take care that gate is not scratching at lever while pulling out 13 Place the gate on a clean place 14 Remove the gate o ring O ring removal tool ...

Страница 92: ...ually in o ring groove for new o ring refer to chapter Spare parts 17 Clean the valve body inside Cleaning tool a little soaked with isopropyl alcohol refer to chapter Spare parts for cleaning tool 18 Clean the sealing surface of valve Clean room wiper a little soaked with isopropyl alcohol 19 Push in the gate assembly until see step 20 Caution Take care that gate is not scratching at lever and bo...

Страница 93: ...len torque wrench 4 mm 22 Push in the gate assembly into valve body 23 Clean the valve bonnet Clean room wiper a little soaked with isopropyl alcohol 24 Clean or replace the bonnet seal 25 Lubricate the seal side with 0 1 ml vacuum grease If necessary to use a new bonnet seal for new bonnet seal refer to chapter Spare parts If new bonnet seal is used also in case of VATSEAL no cleaning and lubrica...

Страница 94: ...Required tool 26 Reassemble the bonnet and bonnet seal with valve 27 Fasten the bonnet screws with DN 63 100 with 10 Nm DN 160 400 with 18 Nm DN 63 100 1 Open end torque wrench 13 mm 1 Open end wrench 13 mm DN 160 400 1 Open end torque wrench 13 mm 1 Open end wrench 13 mm ...

Страница 95: ...rs under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the valve which are 15 VDC sensor power supply SPS Power failure option PFO It is available in 3 versions These are SPS module only PFO module only SPS and PFO module The modules may be retrofitted or repl...

Страница 96: ...s lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap battery Option board This graph shows estimated life of Ultra Cap PFO for reference and not as guaranteed value 0 20 40 60 80 100 120 20 25 30 35 40 45 50 Ambient temperature C Durability months w o ...

Страница 97: ... position into control and actuating unit It is not possible to fit a board in other position as shown in picture above 7 2 3 1 Needed tools Ballpoint Open end wrench 10 mm Open end wrench 7 mm Open end wrench 4 5 mm Pozidriv screw driver size 1 Screw driver size 2 Screw driver size 00 Master board DeviceNet board Connector board Option board Motor driver board ...

Страница 98: ...ention to ESD protection Pozidriv screw driver size1 Open end wrench 7 mm 2 Write down the NODE ADDRESS and DATA RATE in case of Interface board replacement Ballpoint 3 Remove the panel screws Pozidriv screw driver size1 4 Remove this screws and the cover Screw driver size 2 5 Remove female screw locks from connectors Open end wrench 4 5 mm ...

Страница 99: ...593EC Edition 2017 11 24 99 113 Description Required tool 6 Loosen and remove the LOCIC connector screw Open end wrench 10mm 7 Lift controller panel carefully 8 Remove or replace option board 9 Remove or replace connector board ...

Страница 100: ... replace interface board 11 Remove or replace master board 12 Remove or replace motor driver board 13 Insert all boards in reverse order as they disassembled at correct positions see steps 12 to 7 14 Reassemble all parts in reverse order see steps 6 3 15 Tighten panel screws with 1 1 Nm see step 3 ...

Страница 101: ...t Interface board adjust the NODE ADDRESS and DATA RATE see step 2 Screw driver size 00 17 Connect all electrical connections Pozidriv screw driver size1 Open end wrench 7 mm If you need any further information please contact one of our service centers You can find the addresses on our website www vatvalve com ...

Страница 102: ...Repairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service centers You will find the addresses on our website www vatvalve com ...

Страница 103: ...ed work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position Valve body may become damaged if valve gate is in open position Move valve gate to the closed position before dismounting the valve 1 Close the valve 2 For dismounting the valve please follow the inst...

Страница 104: ...ve humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care 1 Clean decontaminate valve 2 Cover all valve openings with a protective foil 3 Pack valve appropriately by using the original packaging m...

Страница 105: ...ning products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www vatvalve com Section Services Aftersales If products are radioactively contaminated the VAT form Contamination and Radiation Report must be filled out Please contact VAT in advance If products are sent ...

Страница 106: ...3EC 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT disclaims any liability for damages resulting from inappropriate packaging ...

Страница 107: ...SAL 605593EC Edition 2017 11 24 107 113 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work ...

Страница 108: ...der for spare parts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff The following table s contain spare parts that may be replaced by the customer If you need any other spare parts please contact one of our...

Страница 109: ...Series 642 SPARE PARTS 605593EC Edition 2017 11 24 109 113 12 1 Drawing Sample picture All Item refer to chapter Drawing ...

Страница 110: ...9236 478357 487706 478357 487706 711045 539937 711045 539937 707681 587193 11 Static actuator seal N 5100 222 N 5100 222 N 5100 222 N 5100 225 N 5100 225 N 5100 228 N 5100 228 N 5100 228 21 Locking balls N 6121 052 8 pcs N 6121 052 8 pcs N 6121 052 12 pcs N 6121 051 18 pcs N 6121 051 24 pcs N 6121 081 18 pcs N 6121 081 24 pcs N 6121 097 32 pcs 23 Controller On request To many to list 22 Ball beari...

Страница 111: ...2 602BS 29LE 000 O ring removal tool 234859 VAT valve cleaning tool 305709 12 1 3 1 Centering ring with Viton o ring Valve size Product ordering number DN 63 2 64236 DN 80 3 64238 DN 100 4 64240 Centering ring with Viton o ring for ISO F installation only Aluminum 32036 QAZV 32038 QAZV 32040 QAZV Stainless steel 32036 QEZV 32038 QEZV 32040 QEZV Valve size Product ordering number DN 160 6 64244 DN ...

Страница 112: ...APPENDIX Series 642 112 113 Edition 2017 11 24 605593EC 13 Appendix No information entered on time ...

Страница 113: ...Series 642 605593EC Edition 2017 11 24 113 113 This page left blank intentionally ...

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