Ulvac GN-30i, Инструкция по эксплуатации

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ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions ·························································································· 1
1. GN-30i Overview ······················································································ 5
1.1 General ································································································ 5
1.2 Features ······························································································· 5
1.3 Specifications ························································································ 6
2. Unpacking and Installation ·········································································· 7
2.1 Unpacking and inspection ········································································ 7
2.2 Cautions for Installation ··········································································· 7
2.3 Electric Wiring ························································································ 7
3. Component Descriptions ············································································ 9
3.1 External Dimensions and Component Description ········································· 9
3.2 Component Details ··············································································· 10
4. System Diagram ···················································································· 12
5. Operation ····························································································· 13
5.1 Preparation before Operation ·································································· 13
5.2 Start-up and Stop (Local operation) ·························································· 13
5.3 Start-up and Stop (Remote: Operation by input external signals) ···················· 13
6. Operating Precautions ············································································· 14
6.1 Operating Precautions ··········································································· 14
7. Troubleshooting ····················································································· 15
8. Maintenance ························································································· 17
8.1 Daily Inspections and Maintenance ·························································· 17
8.2 Total Inspection ···················································································· 17
9. Warranty ······························································································ 18