Ulvac GN-30i, Инструкция по эксплуатации

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10 ULVAC CRYOGENICS INCORPORATED
3.2 Component Details
①
Operation panel
②
Air inlet
Port to intake the atmosphere.
③
Handle
④
Maintenance port
Make sure to turn off the power supply before opening the port. Use cautions to
conduct maintenance works.
⑤
Ventilation fan
Do not block the air exit by placing the fan too close to walls or in other ways.
Take space of more than 200mm from walls.
⑥
Spare entrance port
⑦
Nitrogen gas discharge port (Rc1/4)
Exit port of nitrogen gas (produced gas)
⑧
Cable entrances
Holes for power cables.
⑨
Casters
Casters to move the equipment.
⑩
Nitrogen gas flow meter
Displays the flow rate of nitrogen gas
⑪
Pressure alarm light
Illuminates when the pressure of nitrogen tank is below the set value.
(Set value
：
0.2MPa)