Ulvac GN-30i, Инструкция по эксплуатации

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ULVAC CRYOGENICS INCORPORATED 15
7. Troubleshooting
Corrective actions when troubles occur are described below.
1) Circuit breaker works
If the circuit breaker works and the equipment stops although you turn ON the breaker
once again, the possible cause may be the failure of electrical system or abnormal
current. Disconnect the power supply and contact us.
2) Nitrogen gas is not discharged
The possible causes are as described below.
・
Not sufficient time has passed since the start-up of the equipment.
・
The pressure regulator inside the equipment is closed.
・
The flow rate control valve on the front of the equipment is closed.
・
The piping outside the equipment is clogged.
・
The pressure outside the equipment is larger than the discharge pressure.
If the produced gas is not discharged even after clearing the above problems, the
possible causes may be the piping inside is disconnected, clogs of the couplings, or
leaks. Please contact us.
3) Alarm light illuminates
When an alarm light illuminates and the equipment stops during operation, press
Run/Stop button to clear the operating status, and then press attention light. The
light is turned off and reset. Restart the equipment later. If the attention light
illuminates and the equipment stops in a few seconds, the electric capacitance of the
power source may not be sufficient.
Use the power outlet with sufficient capacitance and restart the equipment. If the
equipment stops along with the attention light again, the cause might be the
equipment failure. Turn OFF the circuit breaker, unplug the power supply and contact
us.