Ulvac GN-30i, Инструкция по эксплуатации

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12 ULVAC CRYOGENICS INCORPORATED
4. System Diagram
Symbol Item Symbol Item
AF1-3 Intake air filter PS1 Pressure sensor
DT1 Drain trap RV1 Relief valve
AT1,2 Adsorption tank MC1 Miniature valve
BT1 Buffer tank NV1 Flow rate control valve
CC1 Cooling tube SV1,2 Solenoid valve
CV1,2 Check valve SV3,4 Solenoid valve
FM1 Nitrogen gas flow meter SV5,5’ Solenoid valve
MC1 Miniature valve SV6 Solenoid valve
OR1 Orifice SV7 Solenoid valve
P1-3 Compressor V1 Solenoid valve
PG1,2 Pressure gauge VA1 Sound absorbing evaporator
PR1 Pressure regulator
Nitrogen gas exit
φ
6 easy coupling
Spare port
Rc 1/4