Ulvac GN-30i, Инструкция по эксплуатации

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14 ULVAC CRYOGENICS INCORPORATED
6. Operating Precautions
6.1 Operating Precautions
1) Power capacity
At the time of start-up, large volume of electric current flows for a short while. If the
capacity of power source is small, the operation might not proceed normally, such as
the alarm light illuminates and the system stops while starting-up, or the circuit
breaker inside is turned off. In such cases, use the power source with sufficient
capacity as the dedicated source for the equipment.
2) When opening the side panels
When you remove the side panels to conduct the inspection of the equipment, make
sure that the equipment is turned off before working.
If it is necessary to take the side panels off while in operation, use cautions never to
place hands or bodies close to the compressor or cooling fans.
3) Devices inside
Never attempt to make alternations or remove the pipings, couplings or electric
circuit as it may result in failure.
4) Power outage during operation
In case the power outage takes place while the equipment is in operation, the
equipment may stop and the supply of produced gas stops as well. After the power
recovers, the equipment will restart the operation automatically. However, if
pressure remain inside the adsorption chamber, the compressor does not rotate due
to the pressure under load, the safety circuit work and the operation stops along with
the attention light turned on.
In such a case, press the illuminating attention light to clear. The safety circuit is
canceled and the equipment will start operation again.