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Ulvac G-Tran ISG1, Инструкция по эксплуатации

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58

 

 

 

Filament operation setting 

“

Fi

”

PROG

Degas operation setting 

“

dE

”

PROG

Filament 1/2 setting 

“

FL

”

“

0

”

 or 

“

1

”

 or 

“

2

”

 blinks

PROG

Select 

“

0

”

 or 

“

1

”

 or 

“

2

”

Filament off: Display

“

FiF

”

ST1 setting: ST1 LED blinks

RS485 setting: Display “L1” or “L2”

“

F

”

 or 

“

o

”

blinks

determine

Select 

“

F

”

 or 

“

o

”

Change the setting

“

1

”

 or 

“

2

”

 blinks

Calculation settinmg:

ST2 setting: ST2 LED blinks

ST3 setting: ST3 LED blinks

determine

determine

Select

“

1

”

 or 

“

2

”

Change the setting

Change the setting

Change the setting

determine

determine

determine

determine

Select 

“

F

”

 or 

“

o

”

determine

“

F

”

 or 

“

o

”

blinks

Interlock settinmg:

Change the setting

Setting sensor: Displayed

PROG

determine

PROG

PROG

PROG

PROG

PROG

PROG

PROG

Measurement units setting

PROG

Change the setting

Measurement display range setting

PROG

Change the setting

Содержание G-Tran ISG1

Страница 1: ...igher Read this manual before operation and keep it at hand for immediate reference Model Serial numbers ST2 1 Multi Ionization Gauge 00901 SH2 1 Multi Ionization Gauge 06001 SC1 Cold Cathode Ion Gauge 02300G SW1 1 Pirani Vacuum Gauge 00001 SWU Pirani Vacuum Gauge 00001 SP1 Pirani Vacuum Gauge 00001 CCMT D series Ceramic Capacitance Manometer 00001 Components Division ULVAC Inc ...

Страница 2: ......

Страница 3: ... symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency of danger when failure to comply with DANGER results in serious personal injury or death The work ignoring this warning will lead to serious damage to human life or factory facility including this equipment at a high p...

Страница 4: ...e requirements of a grounded protective extra low voltage SELV E according to EN 61010 The connection to the gauge has to be fused Power cable The power cable is not packed in the same case Use a cable having a sufficient current capacity Installing an external switch in the power line This unit has no power switch Install an external switch breaker and over current protector Check connection See ...

Страница 5: ...ic capacitors Generally speaking the life of the aluminum electrolytic capacitor becomes short as the ambient temperature rises To prevent components from damage it is recommended to conduct maintenance at ULVAC about once every 3 years Cautions in shipping the unit If the unit is to be shipped back to ULVAC pack it in the original condition If it is shipped bare it may be damaged ...

Страница 6: ...wer than the measuring lower limit HuF is displayed and the output voltage is 10V Jun 7 2014 10 S N 04050 Added connection check in combination mode of SH2 Notice SH2 before S N 01000 does not output a set point Chapter 5 displayed the sensor which is set in the program mode Chapter 6 added nc which means that the sensor is not set and the setting is factory default to the sensor unit selection Ju...

Страница 7: ...ub 15 pin connector male M2 6mm screw 14 3 7 Power Supply Connector Phoenix Model MSTB2 5 3 STF 08 15 4 INSTALLATION 16 4 1 Preparations 16 4 2 Installation 16 4 2 1 Installing the display unit 16 4 2 2 Circuit in the power supply 16 4 2 3 Installation 17 5 FRONT PANEL OPERATION 18 5 1 Description of Front Panel Keys 18 5 1 1 Program mode 18 5 1 2 Key operation in measurement 18 6 SELECTION OF SEN...

Страница 8: ... Sensor Unit SENSOR Connector 32 10 5 Connection with External Devices I O connector 32 10 6 Signals 32 10 6 1 Output voltage 32 10 6 2 HV ON signal Pin 5 33 10 6 3 Discharge check signal Pin 4 33 10 6 4 Setpoint Pins 3 7 11 33 10 6 5 RS485 communication Pins 10 12 33 11 Pirani Gauge BPR2 SP1 34 11 1 Sensor Unit Setting SP1 34 11 2 Front Panel 34 11 2 1 Pressure display 34 11 2 2 Description of fr...

Страница 9: ... FL 45 13 3 Operation setting method 45 13 4 Connection with the Sensor Unit 47 13 5 Connection with External Devices 47 13 6 Various Signals 47 13 6 1 Output voltage 47 13 6 2 Filament ON signal 48 13 6 3 Degas ON signal 48 13 6 4 Filament 1 2 changeover signal 48 13 6 5 Pressure protection signal 49 13 6 6 Emission valid signal 49 13 6 7 Setpoint 49 13 6 8 RS485 communication 49 14 Multi Ionizat...

Страница 10: ...ion Valid signal 61 15 6 7 Setpoint 61 15 6 8 RS485 communication 61 16 Multi Ionization Gauge SH2 ST2 SWU Combination mode 62 16 1 Sensor Unit Setting SAU 62 16 2 Front Panel 62 16 2 1 Pressure display 62 16 2 2 Description of front panel keys 62 16 3 Setting Operation 63 16 3 1 Setting Overview 63 16 3 2 RS485 communication operation setting L1 L2 63 16 3 3 Front panel external I O operation set...

Страница 11: ...setting 78 22 2 Setting 78 22 2 1 RS485 communication setting L2 78 22 2 2 Baud rate setting 78 22 2 3 Address setting 78 22 2 4 Setting the checksum collating function 78 22 2 5 Setting the terminator 79 22 2 6 Setting method 79 22 3 Standard Data Format 82 22 3 1 Command list 82 22 3 2 When received normally 82 22 3 3 When receiving is faulty 82 22 4 Command 83 22 4 1 Reading the measurement val...

Страница 12: ... 22 6 1 When writing 86 22 6 2 When reading 87 22 6 3 in reading 88 22 7 ASCII Code Table 89 23 TROUBLESHOOTING 90 24 WARRANTY 92 25 China RoHS Declaration 93 26 EC DECLARATION OF CONFORMITY 94 27 Certificate of Decontamination 95 ...

Страница 13: ...H2 ST2 dedicated Pressure sensor SAU Analog Diaphragm CCMT D Display unit 1CH Digital 24 VDC Pirani ionization CCG diaphragm multi ISG1 4CH Digital 24 VDC Pirani ionization CCG multi IM1R1 100 VAC IM2R1 End of sale 1 2 Terminology The following terms have the same meanings throughout this manual Program PROGRAM PROG Filament FILAMENT FIL High voltage HIGH VOLTAGE HV Degas DEGAS DEG Zero ZERO ZERO ...

Страница 14: ...n ST2 Multi Ionization ST2 ST2 SPU Combination mode Multi Ionization ST2 ST2 SPU SAU Triple Combination mode Multi Ionization ST2 ST2 SWU Combination mode CCM series ceramic capacitance manometer By connecting the sensor unit measured pressure can be easily displayed setpoint and other operations can be performed easily and the operating state can be checked at a glance Measurement can be made by ...

Страница 15: ...o 1 0 10 4 Pa Multi Ionization ST2 SAU Triple Combination mode 1 0 10 5 to 1 0 10 5 Pa Multi Ionization ST2 SWU Combination mode 1 0 10 5 to 1 0 10 5 Pa Ceramic capacitance manometer CCMT 1000A 1000D 0 0 10 1 1 3 10 5 Pa 1 CCMH 1000A CCMT 100A 100D 0 0 10 0 1 3 10 4 Pa 1 CCMH 100A CCMT 10A 10D 0 0 10 1 1 3 10 3 Pa 1 CCMH 10A CCMH 1A 0 0 10 2 1 3 10 2 Pa 1 CCMT 1D Analog input Reading the analog si...

Страница 16: ...d Radiation electromagnetic field test EN61000 4 3 2006 Static electricity test EN61000 4 2 1995 A1 1998 A2 2001 Transient burst test EN61000 4 4 2004 Lightening surge test EN61000 4 5 2006 Conduction test EN61000 4 6 2007 Commercial magnetic field test EN61000 4 8 1993 A1 2001 Over voltage category Category I Connected to a circuit that holds down transient over voltage at a sufficiently low leve...

Страница 17: ...pcs Quick manual 1 pc Instruction manual CD 1 pc 2 3 Options JIS rack size type Display unit cable 2 5 10 15 20 25 30 35 40 m long between the basic unit and sensor unit Sensor unit sensor head Refer to the applicable sensor units below D sub15 pin connector female M2 6mm screw for sensor connector D sub15 pin connector male M2 6mm screw for I O connector JCSS alibration certificate Only combinati...

Страница 18: ...l Drawings DIN panel size 91 92 45 PANEL CUT 48 96 83 44 5 70 10 ST1 ST2 ST3 ERROR DEG ZERO ZERO DEG FIL PRO G SENSOR I O DC24V FG 10 11 12 14 15 13 9 1 2 3 4 7 6 8 5 1 2 3 4 7 6 8 5 10 11 12 14 15 13 9 60 100 R50 105 ...

Страница 19: ...7 2 5 Installation DIN panel Panel thickness 4mm ...

Страница 20: ... JIS panel size 2 M4 49 5 25 92 86 PANEL CUT 45 5 83 2 φ4 5 92 50 12 5 100 70 5 9 13 15 14 12 11 10 5 8 6 7 4 3 2 1 5 8 6 7 4 3 2 1 9 13 15 14 12 11 10 FG DC24V I O SENSOR PRO G FIL DEG ZERO ZERO DEG ERROR ST3 ST2 ST1 60 100 R50 ...

Страница 21: ...setpoint value is being set ST3 Lit when setpoint 3 is actuated Blinks when a setpoint value is being set ERROR Lit or blinks when the sensor head filament has burnt out or in other errors DEG Lit when DEGAS is ON only when BMR2 SH2 ST2 is selected ZERO Lit when the zero point is being adjusted only when the ceramic capacitance manometer is selected Lit when turns off the filament only when SPU SW...

Страница 22: ...ig 3 2 Front panel switches Name inscription Functions of menu Operating functions PROG Enters into the program mode Upward arrow key Changes a value Rightward arrow key Changes a numeric value Enter key Enter key Stores set values in memory ...

Страница 23: ...es Name notation Functions of menu Operating functions PROG Enters into the program mode Not used in measurement ZERO Zero key Zero point adjustment ON OFF switch DEG Degassing key Switch that turns ON OFF degassing FIL Filament key Switch that turned ON OFF the filament ...

Страница 24: ... sensor unit D sub 15 pin connector female M2 6mm screw I O I O connector for data and signals D sub 15 pin connector male M2 6mm screw DC24V Connector for supplying 24 VDC power Phoenix Model MSTB2 5 3 GF 5 08 SENSOR I O 10 11 12 14 15 13 9 1 2 3 4 7 6 8 5 1 2 3 4 7 6 8 5 10 11 12 14 15 13 9 1 2 3 DC24V ...

Страница 25: ...nsor unit 2 Sensor error input IN 3 Not used 4 FIL HV input Unit connection check signal IN 5 FIL HV ON ADJ adjustment output OUT 6 FIL 1 2 output OUT 7 Not used 8 Pressure signal input IN 9 Power supply GND OUT 10 Not used 11 Not used 12 Not used 13 DEGAS ON output OUT 14 Not used 15 Pressure signal input IN Case FG Do not wire the Not used part which is used for the internal circuit SENSOR 1 2 3...

Страница 26: ...UT 5 FIL HV ON ADJ adjustment input signal IN 6 FIL1 2 input signal IN 7 Setpoint 3 actuating signal OUT 8 Recorder output OUT Remote host recorder 9 Signal GND OUT Remote host recorder 10 RS485 IN OUT Remote host PC 11 Setpoint 2 actuating signal OUT Remote host 12 RS485 IN OUT Remote host PC 13 DEGAS ON input signal IN Remote host 14 Not used 15 Signal GND OUT Remote host recorder Case FG Do not...

Страница 27: ...del MSTB2 5 3 GF 5 08 Fig 3 7 Power supply connector pin assignment Phoenix Model MSTB2 5 3 GF 5 08 Description notation Function DC 24V P Pin that supplies 24 VDC power DC24V N GND in supplying 24VDC power DC24V Frame ground 3 2 1 P N DC24V ...

Страница 28: ...d this instrument and devices connected to this instrument may fail or fire may result The over voltage comes under Category 1 Laying cables When laying transmission lines for communication see to it that they are not in the proximity of or parallel to power lines high voltage lines high frequency lines etc Otherwise malfunction can result Protective grounding Ground the sensor with class D class ...

Страница 29: ...5S 8 15 7 14 6 13 5 12 4 11 3 10 2 9 1 I O D sub_15P 8 15 7 14 6 13 5 12 4 11 3 10 2 9 1 MEASURING CONTROLL CIRCUIT DISPLAY UNIT FILTER CIRCUIT 24V Power GND 24V DC24V 1 2 3 SENSOR I O 10 11 12 14 15 13 9 1 2 3 4 7 6 8 5 1 2 3 4 7 6 8 5 10 11 12 14 15 13 9 DC24V DC24V POWER SUPPLY PLC Sensor Unit ...

Страница 30: ...tion in measurement Notation Name Sensor unit name SC1 BPR2 SP1 SW1 BMR2 SH2 ST2 SPU SAU SWU CCM series PROG Program key ZERO Zero point adjustment key Zero point adjustment DEG Degas key Degas Degas FIL Filament key HV ON Zero point adjustment FIL ON FIL OFF Setpoint1 setting ST1 LED blinks PROG RS485 setting see section on RS485 Selected sensor unit Pressure display PROG PROG PROG PROG PROG CALC...

Страница 31: ...e as shown below Sensor unit setting Sensor unit Non selection Pirani vacuum gauge BPR2 SP1 Pirani vacuum gauge SW1 Hot cathode gauge BMR2 Cold cathode gauge SC1 Multi Ionization SH2 ST2 Multi Ionization SH2 ST2 SPU Combination mode Multi Ionization SH2 ST2 SAU Triple Combination mode SWU Combination mode Ceramic capacitance manometer CCMT 1000A 1000D CCMH 1000A Ceramic capacitance manometer CCMT ...

Страница 32: ...t least 3 s after Power ON So display is nc Select a sensor unit check the setpoint value and calculation value 6 3 Factory set values Setting Set values Sensor unit nc ST1 4 9E 2 ST2 4 9E 2 ST3 4 9E 2 CAL 1 0E 0 L1 L2 L1 Operation of front panel and external I O In F interlock OFF rA uP 1 4E 8 Lo 4 9E b Filament on etc F Front panel operation mode ...

Страница 33: ...The set pressure value is called setpoint If a pressure being measured has lowered to below the setpoint Front panel LEDs ST1 ST2 ST3 light External I O Each setpoint output becomes Lo RS485 1 is set at each setpoint value of the status 7 2 Setpoint Setting Range The setpoint setting range of all sensors is the same The setpoint range assumes the CALCULATION function Setpoint setting range 4 9 10 ...

Страница 34: ...rlock setting PROG Setting of each sensor see section on setting of each sensor PROG Measurement units setting PROG PROG Measurement display range setting ST setting ST LED blinks Blinks The one places of decimals of mantissa PROG Change The value of one places of decimals determine Blinks Exponential part Change The value of exponential part Blinks Integer value Of mantissa Change The value of in...

Страница 35: ...23 7 3 2 How to set setpoint from RS485 Refer to Section 22 for how to set through RS485 In the RS485 mode the setpoint value can be checked with the PROG key but it cannot be changed ...

Страница 36: ...1 2 etc Actuated when shorted to GND 7 Setpoint 3 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 8 Pressure signal output 0 to 10 VDC 9 Signal GND GND of pressure signal burnout signal setpoint etc 10 RS485 Serial communication RS485 output 11 Setpoint 2 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 12 RS485 Serial communication RS485 output 13 Input signal Degas ON Actuated whe...

Страница 37: ...are of contact leak current If a current of 0 08mA or higher flows between the input signal pin to the GND terminal that may be treated as signal input Actuated when shorted to GND Fig 8 2 Input signal 8 2 1 RS485 communication Refer to Section 22 for RS485 communication 5 FIL ON OFF 6 FIL 2 1 13 DEGAS ON OFF 9 15 GND Display Internal 5V power supply Internal 24V power supply ...

Страница 38: ...ED In normal measurement 5 0 10 2 Pa to 1 2 10 5 Pa Below measurement pressure range 0 0 10 2 Pa Above measurement pressure range F F 10 FPa When filament has burnt out When filament burnout signal is input Err Err LED lights When filament has burnt out When filament burnout signal is not input Err When sensor unit is not connected Err LED lights 9 2 2 Description of front panel keys Name notation...

Страница 39: ...setting ST1 LED blinks PROG PROG PROG RS485setting Display L1 or L2 PROG Adjustment operation setting display F or o blinks PROG determine Select F or o Pressure display PROG Change the setting 1 or 2 blinks Calculation settinmg PROG ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine determine Select 1 or 2 Change the setting Change the setting Change the setting Interlock s...

Страница 40: ... signal output Lo when error 30VDCMAX 50mAMAX 70mW 3 Setpoint 1 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 5 ADJ adjustment Actuated when shorted to GND 7 Setpoint 3 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 8 Pressure signal output DC0 to 10V 9 Signal GND GND of pressure signal burnout signal setpoint etc 10 RS485 Serial communication RS485 output 11 Setpoint 3 actuatin...

Страница 41: ...0 VMAX 50 mAMAX 70 mW 9 6 5 RS485 communication Refer to Section 22 for RS485 communication 9 7 Zero Point Adjustment and Atmospheric Pressure Adjustment Refer to The instructions manual of a sensor Please read the instructions manual of sensor unit when zero point adjusted and atmospheric pressure adjusted 9 7 1 Adjusting Method Zero point adjustment and atmospheric pressure adjustment can be mad...

Страница 42: ... Cf instruction manual of SC1 2 The discharge check signal indicates that discharge current is flowing normally The setpoint of this unit is not actuated unless this signal is input 10 2 2 Front panel key description Name notation Function Remarks PROG Enters into the program mode Refer to Section 5 and this section ZERO Not used DEG Not used FIL HV ON OFF operation Cannot be operated when RS485 a...

Страница 43: ...rationsettingDisplay F or o blinks PROG determine Select F or o Pressure display PROG Change the setting 1 or 2 blinks Calculation settinmg PROG ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine determine Select 1 or 2 Change the setting Change the setting Change the setting Interlock settinmg PROG Change the setting Settingsensor Displayed PROG determine Measurement units ...

Страница 44: ...ignal output Lo when actuated 30VDCMAX 50mAMAX 70mW 4 Discharge check signal output Lo when actuated 30VDCMAX 50mAMAX 70mW 5 HV ON OFF signal input Actuated when shorted to GND 7 Setpoint 3 actuating signal output Lo when actuated 30VDCMAX 50mAMAX 70mW 8 Pressure signal output 0 to 10 VDC Signal GND Signal GND 10 RS485 Serial communication RS485 output 11 Setpoint 2 actuating signal output Lo when...

Страница 45: ...rge occurs the open collector will be Lo output Photocoupler rating 30 VMAX 50 mAMAX 70 mW For more information about the discharge check signal and corrective actions against the discharge signal not being turned on refer to the manual for the sensor unit 10 6 4 Setpoint Pins 3 7 11 Refer to Section 7 for how to adjust and use the setpoint Photocoupler rating 30V MAX 50 mAMAX 70 mW 10 6 5 RS485 c...

Страница 46: ...gen or helium the burnout signal may be given even when the filament is intact Condition Pressure indication LED In normal measurement 4 0 10 1 Pa to 3 0 10 3 Pa Below measurement pressure range 0 0 10 1 Pa Above measurement pressure range FFF When filament has burnt out When filament burnout signal is input Err Err LED lights When filament has burnt out When filament burntout signal is not input ...

Страница 47: ... or 2 blinks Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine Select 1 or 2 Change the setting Change the setting Change the setting Interlock settinmg Change the setting Settingsensor Displayed PROG determine PROG PROG PROG PROG Pressure display PROG PROG PROG Measurement units setting PROG Change the setting Measurement display range setting PROG Cha...

Страница 48: ...t 1 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 7 Setpoint 3 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 8 Pressure signal output 0 to 10V DC 9 Signal GND GND of pressure signal burnout signal setpoint etc 10 RS485 Serial communication RS485 output 11 Setpoint 2 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 12 RS485 Serial communication RS485 output 15 Signal GND ...

Страница 49: ...er rating 30 VMAX 50 mAMAX 70 mW In case of filament burnout Err is displayed on the front panel and the ERR LED lights but also it can be confirmed by reading status through RS485 communication For how to check the filament for burnout refer to the manual for the sensor unit 11 7 1 Setpoint For how to adjust and use the setpoint refer to Section 7 Photocoupler rating 30 VMAX 50 mAMAX 70 mW 11 7 2...

Страница 50: ...Above measurement pressure range and when pressure protection signal is not input FiO When power is turned on FiF Immediately after filament is turned on FiO When degassing is ON Pressure indication DEG is lit When emission valid is OFF Pressure indication Err blinks When sensor unit is not connected Err lights 1 When a CALCULATION function is used it displays to 10 11 at the minimum 10 10 is A A ...

Страница 51: ... 2 Degas operation setting dE Selects whether degassing ON OFF is to be operated on the front panel or with external I O This function will be invalidated if RS485 communication is set Display Detail F Operation on front panel only o Operation of external I O only 12 3 3 3 Filament changeover setting FL Selects whether selection of filament 1 2 is to be operated on the front panel or with external...

Страница 52: ...1 or 2 blinks Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine Select 1 or 2 Change the setting Change the setting Change the setting determine determine determine determine Select F or o determine F or o blinks Interlock settinmg Change the setting Settingsensor Displayed PROG determine PROG PROG PROG PROG PROG PROG PROG Measurement units setting PROG...

Страница 53: ... for connection I O D sub 15 pin connector female M2 6mm screw I O Description Remarks 2 Pressure protection signal Lo when actuated 30VDCMAX 50mAMAX 70mW 3 Setpoint 1 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 4 Emission valid Lo when actuated 30VDCMAX 50mAMAX 70mW 5 Filament ON Actuated when shorted to GND 7 Setpoint 3 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 8 Pressu...

Страница 54: ... to GND In the case of front panel operation or RS485 communication setting input of this signal will be invalid 12 6 5 Pressure protection signal If the sensor unit exceeds the higher limit of measurement pressure pressure protection will be actuated If it is actuated the open collector will be Lo output Photocoupler rating 30VMAX 50mAMAX 70 mW For more information about pressure protection and a...

Страница 55: ...43 12 6 7 Setpoint For how to adjust and use the setpoint refer to Section 7 Photocoupler rating 30VMAX 50mAMAX 70 mW 12 6 8 RS485 communication For RS485 communication refer to Section 22 ...

Страница 56: ...o 1 0 10 1 Pa Below measurement pressure range 0 0 10 8 Pa Above measurement pressure range and when pressure protection signal is input Prt Above measurement pressure range and when pressure protection signal is not input FiO When power is turned on FiF Immediately after filament is turned on FiO When degassing is ON Pressure indication DEG is lit When emission valid is OFF Pressure indication Er...

Страница 57: ...her degassing ON OFF is to be operated on the front panel or with external I O This function will be invalidated if RS485 communication is set Display Detail F Operation on front panel only o Operation of external I O only 13 2 4 3 Filament changeover setting FL Setting only filament1 if you used ST2 ST2 has only one filament Setting only filament1 Selects whether selection of filament 1 2 is to b...

Страница 58: ...1 or 2 blinks Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine Select 1 or 2 Change the setting Change the setting Change the setting determine determine determine determine Select F or o determine F or o blinks Interlock settinmg Change the setting Settingsensor Displayed PROG determine PROG PROG PROG PROG PROG PROG PROG Measurement units setting PROG...

Страница 59: ...pecified value range 13 5 Connection with External Devices The table below gives the pin assignment in the connection to external devices Connector for connection I O D sub 15 pin connector female M2 6mm screw I O Description Remarks 2 Pressure protection signal Lo when actuated 30VDCMAX 50mAMAX 70mW 3 Setpoint 1 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 4 Emission valid Lo when actu...

Страница 60: ...ND with the external switch In the case of front panel operation or RS485 communication setting input of this signal will be invalid 13 6 4 Filament 1 2 changeover signal Filament 1 2 materials differ Filament 1 is a yttria coated iridium wire Filament 2 is a tungsten wire For details refer to the SH2 instruction manual Setting only filament1 if you used ST2 ST2 has only one filament Setting only ...

Страница 61: ... manual 13 6 6 Emission valid signal When the emission current is flowing normally or not is output as a signal If emission current is flowing normally the open collector will be Lo output Photocoupler rating 30VMAX 50mAMAX 70 mW For more information about the emission valid signal and corrective actions in case when the emission valid signal is turned off refer to the sensor unit manual 13 6 7 Se...

Страница 62: ... the key For more information about the sensor unit setting refer to Section 6 14 2 Front Panel 14 2 1 Pressure display Status Pressure indicator LED In normal measurement 5 0 10 8 Pa to 1 0 10 4 Pa Below measurement pressure range 0 0 10 8 Pa Above measurement pressure range F F 10 F Pa When error of B A gauge When error signal is input Pressure indication more than 1 0 10 1 Pa Err LED lights Whe...

Страница 63: ...l be invalidated if it is set at RS485 communication Display Detail F Operation on the front panel only o Operation of external I O only 14 3 3 2 Degas operation setting dE Selects whether degassing ON OFF is to be operated on the front panel or with external I O This function will be invalidated if RS485 communication is set Display Detail F Operation on front panel only o Operation of external I...

Страница 64: ...1 or 2 blinks Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine Select 1 or 2 Change the setting Change the setting Change the setting determine determine determine determine Select F or o determine F or o blinks Interlock settinmg Change the setting Settingsensor Displayed PROG determine PROG PROG PROG PROG PROG PROG PROG Measurement units setting PROG...

Страница 65: ...ceed the specified value range 14 5 Connection with External Devices The table below gives the pin assignment in the connection to external devices Connector for connection I O D sub 15 pin connector female M2 6mm screw I O Description Remarks 2 Error signal Lo when actuated 30VDCMAX 50mAMAX 70mW 3 Setpoint 1 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 4 Emission Valid Lo when actuated...

Страница 66: ...r less 14 6 2 Filament OFF signal Signal that turns off the filament To turn off the filament connect it to GND with the external switch In the case of front panel operation or RS485 communication setting input of this signal will be invalid 14 6 3 Degas ON signal Signal that turns on degassing To turn it on connect it to GND with the external switch In the case of front panel operation or RS485 c...

Страница 67: ...nsor units When B A gauge is error this unit displays pressure of Pirani gauge When Pirani gauge is error this unit displays Err When a sensor error occurs the signal becomes low output Photocoupler rating 30VMAX 50mAMAX 70 mW For more information about sensor error and actions in case of sensor error signal being turned ON refer to the sensor unit manual 14 6 6 Emission Valid signal When this sig...

Страница 68: ...setting refer to Section 6 15 2 Front Panel 15 2 1 Pressure display Status Pressure indicator LED In normal measurement 5 0 10 8 Pa to 1 0 10 5 Pa Below measurement pressure range 0 0 10 8 Pa Above measurement pressure range F F 10 F Pa When error of B A gauge When error signal is input Pressure indication more than 1 0 10 1 Pa Err LED lights When error of Pirani gauge When error signal is input P...

Страница 69: ...l be invalidated if it is set at RS485 communication Display Detail F Operation on the front panel only o Operation of external I O only 15 3 3 2 Degas operation setting dE Selects whether degassing ON OFF is to be operated on the front panel or with external I O This function will be invalidated if RS485 communication is set Display Detail F Operation on front panel only o Operation of external I...

Страница 70: ...1 or 2 blinks Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine Select 1 or 2 Change the setting Change the setting Change the setting determine determine determine determine Select F or o determine F or o blinks Interlock settinmg Change the setting Settingsensor Displayed PROG determine PROG PROG PROG PROG PROG PROG PROG Measurement units setting PROG...

Страница 71: ...ceed the specified value range 15 5 Connection with External Devices The table below gives the pin assignment in the connection to external devices Connector for connection I O D sub 15 pin connector female M2 6mm screw I O Description Remarks 2 Error signal Lo when actuated 30VDCMAX 50mAMAX 70mW 3 Setpoint 1 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 4 Emission Valid Lo when actuated...

Страница 72: ... voltage abnormality sensor unit fault etc 0 1 V or less 15 6 2 Filament OFF signal Signal that turns off the filament To turn off the filament connect it to GND with the external switch In the case of front panel operation or RS485 communication setting input of this signal will be invalid 15 6 3 Degas ON signal Signal that turns on degassing To turn it on connect it to GND with the external swit...

Страница 73: ...nsor units When B A gauge is error this unit displays pressure of Pirani gauge When Pirani gauge is error this unit displays Err When a sensor error occurs the signal becomes low output Photocoupler rating 30VMAX 50mAMAX 70 mW For more information about sensor error and actions in case of sensor error signal being turned ON refer to the sensor unit manual 15 6 6 Emission Valid signal When this sig...

Страница 74: ... the key For more information about the sensor unit setting refer to Section 6 16 2 Front Panel 16 2 1 Pressure display Status Pressure indicator LED In normal measurement 5 0 10 8 Pa to 1 0 10 5 Pa Below measurement pressure range 0 0 10 8 Pa Above measurement pressure range F F 10 F Pa When error of B A gauge When error signal is input Pressure indication more than 1 0 10 1 Pa Err LED lights Whe...

Страница 75: ...l be invalidated if it is set at RS485 communication Display Detail F Operation on the front panel only o Operation of external I O only 16 3 3 2 Degas operation setting dE Selects whether degassing ON OFF is to be operated on the front panel or with external I O This function will be invalidated if RS485 communication is set Display Detail F Operation on front panel only o Operation of external I...

Страница 76: ...1 or 2 blinks Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine Select 1 or 2 Change the setting Change the setting Change the setting determine determine determine determine Select F or o determine F or o blinks Interlock settinmg Change the setting Settingsensor Displayed PROG determine PROG PROG PROG PROG PROG PROG PROG Measurement units setting PROG...

Страница 77: ...ceed the specified value range 16 5 Connection with External Devices The table below gives the pin assignment in the connection to external devices Connector for connection I O D sub 15 pin connector female M2 6mm screw I O Description Remarks 2 Error signal Lo when actuated 30VDCMAX 50mAMAX 70mW 3 Setpoint 1 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 4 Emission Valid Lo when actuated...

Страница 78: ...V or less 16 6 2 Filament OFF signal Signal that turns off the filament To turn off the filament connect it to GND with the external switch In the case of front panel operation or RS485 communication setting input of this signal will be invalid 16 6 3 Degas ON signal Signal that turns on degassing To turn it on connect it to GND with the external switch In the case of front panel operation or RS48...

Страница 79: ...nsor units When B A gauge is error this unit displays pressure of Pirani gauge When Pirani gauge is error this unit displays Err When a sensor error occurs the signal becomes low output Photocoupler rating 30VMAX 50mAMAX 70 mW For more information about sensor error and actions in case of sensor error signal being turned ON refer to the sensor unit manual 16 6 6 Emission Valid signal When this sig...

Страница 80: ...ustment is reset Pressure indication ZERO LED lights When sensor unit is not connected Err LED lights 17 2 2 Front Panel Operation Inscription Function Remarks PROG Enters into the program mode Refer to Section 5 ZERO Makes zero point adjustment DEG Not used FIL Not used 17 3 Operation setting For adjustment of the zero point the following settings are available Setting Overview Front panel operat...

Страница 81: ...ect F or o Pressure display Change the setting 1 or 2 blinks Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine determine determine Select 1 or 2 Change the setting Change the setting Change the setting Interlock settinmg Change the setting Settingsensor Displayed PROG determine Cn0 1 2 3 PROG PROG PROG PROG PROG PROG PROG Measurement units setting PROG Change the...

Страница 82: ...Lo when actuated 30VDCMAX 50mAMAX 70mW 8 Pressure signal output 0 to 10 VDC 9 Signal GND GND of pressure signal burnout signal setpoint etc 10 RS485 Serial communication RS485 output 11 Setpoint 2 actuating signal Lo when actuated 30VDCMAX 50mAMAX 70mW 12 RS485 Serial communication RS485 output 15 Signal GND GND of pressure signal burnout signal setpoint etc Case FG Frame ground 17 6 Signals 17 6 ...

Страница 83: ...Voltage from sensor unit within 20mV Pressure value within 2 6 10 N 3 Pa 17 7 1 Operation Front panel ZERO point adjustment Hold down the ZERO switch for 1 second or more ZERO point reset Hold down the ZERO switch for 3 seconds or more 17 7 2 Operation external I O ZERO point adjustment Turn on short ZERO from I O for 1 second or more ZERO point reset Turn on short ZERO from I O for 3 seconds or m...

Страница 84: ... letter 10 11 is b B of small letter Please note b B of small letter to make a mistake as 6 of the figure 18 2 Output Voltage in CAL Function mode Please refer to each chapter 18 3 Change Pressure unit Please refer to each manual 18 4 CAL value of measurement unit measurement unit CAL value Pa 1 0 10 0 Torr 7 5 10 3 Mbar 1 0 10 2 18 5 Setting CAL value Setpoint1 setting ST1 LED blinks PROG RS485 s...

Страница 85: ...OG Change The value of one places of decimals determine Blinks Exponential part Change The value of exponential part Blinks Integer value Of mantissa Change The value of integer Pressure display etc PROG Setting sensor etc determine Blinks The one places of decimals of mantissa ...

Страница 86: ...t the interlock Display Detail F OFF Interlock state o Interlock is ON ST1 setting ST1 LED blinks RS485setting Display L1 or L2 Interlock setting o or F blinks determine Select o or F Pressure display etc Change the setting Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks determine Change the setting Change the setting Change the setting Change the setting Settingofsensor...

Страница 87: ...g of sensor PROG Pressure display etc Change the setting Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks Change the setting Change the setting Change the setting Change the setting Interlock settinmg Change the setting Setting sensor Displayed setting the sensor PROG determine Change the setting P t or b blinks determine Select P t or b PROG PROG PROG PROG PROG PROG PROG...

Страница 88: ...setting Display L1 or L2 Setting of sensor PROG Pressure display etc Change the setting Calculation settinmg ST2 setting ST2 LED blinks ST3 setting ST3 LED blinks Change the setting Change the setting Change the setting Change the setting Interlock settinmg Change the setting Setting sensor Displayed setting the sensor PROG determine Change the setting PROG PROG PROG PROG PROG PROG PROG Measuremen...

Страница 89: ...t Blinks Integer value Of mantissa Change The value of integer Blinks The one places of decimals of mantissa determine determine Blinks The one places of decimals of mantissa Change The value of one places of decimals Blinks Exponential part Change The value of exponential part Blinks Integer value Of mantissa Change The value of integer Blinks The one places of decimals of mantissa determine dete...

Страница 90: ...u use the cable of 30m or more 22 1 2 Communication setting DATA 8 bits Parity None Stopbit 1 bit Change over the mode to the receiving state within 20 ms after sending data Set the time out before receiving data at 150 ms or more After receiving data send the next data with an interval of 50 ms or more 22 2 Setting 22 2 1 RS485 communication setting L2 To use RS485 it is necessary to set communic...

Страница 91: ...ing receiving data as a result of collation it is returned as n and no action is taken against the command If the result of collation agrees with the command data it is returned accordingly 22 2 5 Setting the terminator If the total length of the connected cable is 15 m or more or if the frequency of communication errors is high it is recommended to install a terminator in the terminating device T...

Страница 92: ...inks ST3 setting ST3 LED blinks determine determine Select 1 or 2 Change the setting Change the setting Change the setting Change the setting Interlock settinmg PROG Change the setting Setting sensor Displayed setting the sensor PROG determine PROG PROG PROG PROG PROG PROG Measurement units setting PROG Change the setting Measurement display range setting PROG Change the setting ...

Страница 93: ... Address setting Ad Setting terminator Tr Each baud rate blinks determine Select baud rate determine Change address Display current address determine determine determine determine F or o blinks determine Select F or o F or o blinks determine Select F or o ...

Страница 94: ...n Command Description D Reads measurement value and status 1W Writes setpoint 1 SR Reads status 2W Writes setpoint 2 SW Writes status 3W Writes setpoint 3 T Reads software ZER Adjusts SW1 zero point 1R Reads setpoint 1 ATM Adjusts SW1 atmospheric pressure 2R Reads setpoint 2 CLR Resets adjustment of SW1 zero point atmospheric pressure adjustment 3R Reads setpoint 3 CZR CCM zero point adjustment CC...

Страница 95: ...nd is correct normal receipt o will be returned even when a status that cannot be functionally possible is written 22 4 3 Reading a status Filament state and setpoint operational state can be confirmed Command AD0 AD1 SR CHKH CHKL CR Format of return from this instrument to PC AD0 AD1 S SH SL CHKH CHKL CR Refer to the relevant section for the status SH a nd SL 22 4 4 Reading the software version C...

Страница 96: ...t value Command AD0 AD1 3W X X X E X X CHKH CHKL CR A numeric value that can be set varies with each sensor If a value lower than the lower limit set value of each sensor is set it will be set at the lower limit value of setting or if a value higher than the higher limit set value it will be set at the higher limit value of setting Internal mantissa part comparison processing is done at 2 digits b...

Страница 97: ...re conveniently by using calculator in the windows Select the alpha calculator from the types of calculators and calculate by hexadecimal notation 22 5 1 Example when reading the measurement value of address 11 and status The following tables give the commands and ASCII coder when reading the measurement value and status of address 11 Command ASII 1 1 D CHKH CHKL CR Hex 31 31 44 CHKH CHKL CR 31 Xo...

Страница 98: ... 0 ON DEGAS ON OFF 1 ON 0 OFF SL low order 4 Status 0 30H B3 N C 0 X B2 N C 0 X B1 N C 0 X B0 N C 0 X Example FIL 1 1 FIL ON 1 DEGAS OFF 0 To write the signal above SH C 43H SL 0 30H The N C portion can also be actuated with 1 or 0 The data configuration of the reading status and that of the writing status are similar but they differs from the those of reading writing values to the same register T...

Страница 99: ... ON 0 OFF Sh2 SPU SAU FIL OFF ON 1 OFF 0 ON Em Valid 1 OK 0 NG DEGAS ON OFF 1 ON 0 OFF SL low order Status 0 30H 1 31H 2 32H 3 33H 4 34H B3 PROTECT 0 0 0 0 0 B2 SETPOINT3 0 0 0 0 1 B1 SETPOINT2 0 0 1 1 0 B0 SETPOINT1 0 1 0 1 0 5 35H 6 36H 7 37H 8 38H B3 PROTECT 0 0 0 1 B2 SETPOINT3 1 1 1 0 B1 SETPOINT2 0 1 1 0 B0 SETPOINT1 1 0 1 0 PROTECT 1 ON 0 OFF SETPOINT3 1 ON 0 OFF SETPOINT2 1 ON 0 OFF SETPOI...

Страница 100: ... N C N C N C N C 1 All 0 30H SL low order Status C 43H 4 34H 6 36H 5 35H 7 37H B3 ERR 1 0 0 0 0 B2 SETPOINT3 1 1 1 1 1 B1 SETPOINT2 0 0 1 0 1 B0 SETPOINT1 0 0 0 1 1 ERR 1 ON 0 OFF SETPOINT2 1 ON 0 OFF SETPOINT1 1 ON 0 OFF Example The N C value of B2 is currently 1 N C 1 ERROR OF 0 N C 1 N C 1 N C 1 SETPOINT2 ON 1 N C 1 SETPOINT1 OFF 0 When the above signal is read SH F 46H SL 6 36H Example 2 The t...

Страница 101: ...29 I 49 i 69 lf 0A 2A J 4A j 6A vt 0B 2B K 4B k 6B ff 0C 2C L 4C l 6C cr 0D 2D M 4D m 6D so 0E 2E N 4E n 6E si 0F 2F O 4F o 6F dle 10 0 30 P 50 p 70 dc1 11 1 31 Q 51 q 71 dc2 12 2 32 R 52 r 72 dc3 13 3 33 S 53 s 73 dc4 14 4 34 T 54 t 74 nak 15 5 35 U 55 u 75 syn 16 6 36 V 56 v 76 etb 17 7 37 W 57 w 77 can 18 8 38 X 58 x 78 em 19 9 39 Y 59 y 79 sub 1A 3A Z 5A z 7A esc 1B 3B 5B 7B fs 1C 3C 5C 7C gs ...

Страница 102: ...at ULVAC are necessary Failure of display unit indicating circuit Check and or repair at ULVAC are necessary Failure in the display unit circuit Check and or repair at ULVAC are necessary Pressure has changed but the segment indication remains constant Possible cause Corrective action Pressure is below the measurement range Normal Erroneous wiring between sensor unit and display unit pressure sign...

Страница 103: ...rod due to corrosion Check cable connection The cable is subject to electromagnetic induction by external noise Change the cable laying position Or turn off a component that can be a source of noise Recheck the method of laying cables Examine measures against noise otherwise The indicated pressure value differs largely from expected value Possible cause Corrective action The sensor head is contami...

Страница 104: ...al ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm and flood damage earthquake lightning strike war etc 3 Failure occurred due to carelessness handling or faulty usage 4 Products remodeled disassembled or repaired without ULVAC s acceptance 5 Failure occurred...

Страница 105: ...le1 Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board Chassis Connector AC DC Converter Label indicating that content of the hazardous substance or element in all homogeneous materials of the part does not exceed the requirements for concentration limits specified by SJ T11363 2006 ind...

Страница 106: ...94 26 EC DECLARATION OF CONFORMITY ...

Страница 107: ...95 27 Certificate of Decontamination ...

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