Ulvac G-Tran ISG1, Инструкция по эксплуатации

Страница: 67 / 107

55
14.6.4. Filament 1/2 changeover signal
Filament 1/2 materials differ
Filament 1 is a yttria-coated iridium wire. Filament 2 is a tungsten wire.
For details, refer to the SH2 instruction manual.
Setting only filament1, if you used ST2
ST2 has only one filament. Setting only filament1.
Signal that changes over filament 1/2. To change it over to filament 2, connect it to GND. In
the case of front panel operation or RS485 communication setting, input of this signal will be
invalid.
14.6.5.
Sensor error signal
Sensor errors are signals that are output when an error occurs on sensor units.
When B-A gauge is error, this unit displays pressure of Pirani gauge. When Pirani gauge is
error, this unit displays “Err”
When a sensor error occurs, the signal becomes low output
Photocoupler rating: 30V
MAX
, 50mA
MAX
, 70 mW
For more information about sensor error and actions in case of sensor error signal being turned
ON, refer to the sensor unit manual.
14.6.6.
Emission Valid signal
When this signal switches off (high), this unit cannot accurately measure pressure. The pressure
is output as a reference value, but the setpoints do not operate.
Photocoupler rating: 30V
MAX
, 50mA
MAX
, 70 mW
14.6.7.
Setpoint
For how to adjust and use the setpoint, refer to Section 7.
Photocoupler rating: 30V
MAX
, 50mA
MAX
, 70 mW
14.6.8.
RS485 communication
For RS485 communication, refer to Section 22.