Ulvac G-Tran ISG1, Инструкция по эксплуатации

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11. Pirani Gauge BPR2, SP1
Power supply to the BPR2
If 24 VDC is supplied to the BPR2, the display when the sensor unit is
unconnected is shown.
This section describes how to use the Pirani gauge BPR2 or SP1 sensor unit.
Before reading this section, refer to the standard operating procedure in the foregoing sections.
11.1.
Sensor Unit Setting: “SP1”
Turn on the power to this unit and make sure that “SP1” is lit for several seconds.
To display others, press the key several times within 3 seconds after turning on power to
change over the display to “SP1” and then make it definite with the key. Refer to Section 6
for more information about the settings of the sensor unit.
11.2.
Front Panel
11.2.1. Pressure display
With a gas lighter than nitrogen, such as gas of which major component is
hydrogen or helium, the burnout signal may be given even when the filament
is intact.
Condition Pressure indication LED
In normal measurement
4.0
×
10
-1
Pa to 3.0
×
10
+3
Pa
Below measurement pressure range
0.0
×
10
-1
Pa
Above measurement pressure range FFF
When filament has burnt out
When filament burnout signal is input
Err Err LED lights
When filament has burnt out
When filament burntout signal is not input
Err
When the sensor unit is not connected - - - Err LED lights.
11.2.2.
Description of front panel keys
Description (notation) Function Remarks
PROG
Enters into the program mode Refer to Section 5.
ZERO
Not used
DEG
Not used
FIL
Not used
11.3.
Setting Operation
11.3.1. RS485 communication operation setting “L1”, “L2”
Select whether HV ON/OFF is to be operated by RS485 communication or not.
Refer to Section 22 for detailed setting of RS485, commands and others.
Display Detail Remarks
“L1” Operation of front panel and external I/O RS485: Pressure reading only
“L2” Only RS485 communication operation
✔ Note