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DC Pulse Power Supply
【
DC-5-P/DC-10-P
】
4
DESCRIPTION OF FUNCTIONS
33
4-7. Description of oscillation mode function
The oscillation mode includes: Continuous mode; One-pulse mode; and DC mode.
・
Continuous mode
Outputs specified frequency and inversion pulse width.
The charge-up of the target is controlled by producing the reverse-pulse output continuously.
0V
0A
t 時間
電圧
電流
Oscillation frequency
逆パルス幅
Figure 4-4: Image of waveform in continuous mode
・
One-pulse mode
(
1PLS
)
Produces a DC output normally, but produces a reverse-pulse output with respect to the pulse
width specified when an ARC is detected.
0V
0A
t 時間
電圧
電流
ARC occurred
逆パルス幅
Figure 4-5: Image of waveform in one-pulse mode
Voltage
Current
Inversion pulse width
Time: t
Inversion pulse width
Voltage
Current
Time: t
Содержание DC-5-P
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