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5kW/10kW

 

DC Pulse Power Supply 

 

ｍｏｄｅｌ：

DC-5-P/DC-10-P 

 

 
 
 
 
 
 
 

 
 
 

 

 

4th version, Mar, 2023 

 

ULVAC,  Inc

. 

Components  Division

 
 

Before  using  this  product,  be  sure  to  read  it. 

Also,  keep  this  manual  at  hand  with  care 

 
 

Содержание DC-5-P

Страница 1: ...r ra at ti io on n M Ma an nu ua al l 5kW 10kW DC Pulse Power Supply DC 5 P DC 10 P 4th version Mar 2023 ULVAC Inc Components Division Before using this product be sure to read it Also keep this manua...

Страница 2: ...reading and understanding it Keep this operation manual always at hand with care When changing the installation place of this product be sure to attach this operation manual to the product Due to the...

Страница 3: ...inappropriate inspection service work Well read the contents of the operation and the inspection service work and never operate this product until you understand it 1 3 The warning and the caution abo...

Страница 4: ...rous situations including slight personal injury or medium scale of damage to the facility Works ignoring this note can lead to slight personal injury and or can bring the system into the situation th...

Страница 5: ...on the unit main body List of safety symbol marks Safety symbol marks Description Heavy loads There is a danger of getting injury Use specified machine Dangerous voltage part There is a danger of ser...

Страница 6: ...marks Description High temperature heated part Do not touch or you may get burned Use copper conductors only The connector part shall not be lifted Otherwise it may be damaged Do not hold and lift th...

Страница 7: ...f delivery or during the transport However for direct export the range of guarantee defined in the latest INCOTERMS is observed 2 A product that does not meet the basic specification although the prod...

Страница 8: ...site repair the actual cost for the travel expense transportation cost and others will be charged 4 Suspecting abnormality If you notice a presence of abnormality refer to 7 Troubleshooting in this m...

Страница 9: ...ove t he threshold Revised RoHS Directive 2011 65 EU and EU 2015 863 Target regulated hazardous substances and their thresholds Regulated Hazardous Substances Threshold Lead Pb 1000ppm Mercury Hg 1000...

Страница 10: ...2 4 3 Oscillating Frequency and Inversion Pulse Width 6 2 5 CONNECTION OF INPUT OUTPUT SECTION 11 2 5 1 Connection of input output section 11 2 5 2 Connection of output section 12 3 PREPARATION 13 3...

Страница 11: ...ND LEVEL SIGNAL IN SYSTEM CONFIGURATION 30 4 5 ABOUT DC OUTPUT SEQUENCE 30 4 6 DESCRIPTION OF PULSE PARAM FUNCTION 31 4 7 DESCRIPTION OF OSCILLATION MODE FUNCTION 33 4 8 SELECTION OF OSCILLATION MODE...

Страница 12: ...64 6 2 ABOUT RECOMMENDED REPLACEMENT PARTS 65 7 TROUBLESHOOTING 66 7 1 TROUBLESHOOTING 66 8 APPENDIX 68 8 1 OVERVIEW OF SERIAL COMMUNICATIONS 72 8 1 1 Serial communication specifications 72 8 1 2 How...

Страница 13: ...this product is enough to pose a risk to a human life Therefore it shall be handled with the greatest care In the event that a person contacts this voltage it leads to a serious accident Take great ca...

Страница 14: ...us or our exclusive distributors In addition a nameplate is affixed on the back panel of the product Take special care so that it is legible at all times 1 3 When you contact When you need to order pa...

Страница 15: ...r is stopped On the continuous mode the oscillated frequency from 5 to 250 kHz can be used The steps of frequency possible to set are as follows From 5 to 150 kHz Unit of one kHz From 150 to 250 kHz U...

Страница 16: ...Pulse synchronization optical cable Cable length 1m 5m 10m 15m 20m 25m 30m 1 M S cable Cable length 1 2m 1 We recommend using an output cable of 10m or less A cable of 10m or more may cause distortion...

Страница 17: ...5A V4 200V 7 69A V3 400V 5kW I3 I2 I1 V1 1500V V2 800V 2 5A 25A V4 200V 12 5A V3 400V 10kW I3 I2 I1 V1 1500V V2 650V 2 5A 25A V4 200V 15 38A V3 400V 10kW I3 I2 I1 V1 1500V V1 1500V 1500V V1 1500V 150...

Страница 18: ...ply with the EMC standards However the customer s machines and equipment are various and the EMC performance cha nges depending on the configuration wiring condition arrangement condition etc of the e...

Страница 19: ...0 7 5 0 9 0 800 19 0 4 0 8 5 0 9 5 800 20 0 4 0 8 5 0 10 0 800 21 0 4 0 8 5 0 10 5 800 22 0 4 0 9 5 0 11 0 800 23 0 4 0 9 5 0 11 5 800 24 0 4 1 0 5 0 12 0 800 25 0 4 1 0 5 0 12 5 800 26 0 4 1 0 5 0 13...

Страница 20: ...5 0 32 0 800 65 0 4 2 6 5 0 32 5 800 66 0 4 2 6 5 0 33 0 800 67 0 4 2 7 5 0 33 5 800 68 0 4 2 7 5 0 34 0 800 69 0 4 2 8 5 0 34 5 800 70 0 4 2 8 5 0 35 0 800 71 0 4 2 8 5 0 35 5 800 72 0 4 2 9 5 0 36...

Страница 21: ...3 3 7 39 6 800 108 0 4 4 3 3 7 40 0 800 109 0 4 4 4 3 6 39 2 800 110 0 4 4 4 3 6 39 6 800 111 0 4 4 4 3 6 40 0 800 112 0 4 4 5 3 5 39 2 800 113 0 4 4 5 3 5 39 6 800 114 0 4 4 6 3 5 39 9 800 115 0 4 4...

Страница 22: ...0 2 6 39 0 800 Table 2 4 Inversion pulse width by oscillating frequency 150kHz to 250 kHz In the unit of 5 kHz Oscillating frequency kHz Minimum inversion pulse width s Minimum Duty ratio Maximum inve...

Страница 23: ...rial used for the cable refer to Table 2 1 Electrical specification and select the one that would satisfy the rating specification In addition select a suitable cable ground based on the line shape of...

Страница 24: ...tact the manufacturer for the details of installation conditions etc When selecting a wiring material used for the cable refer to Table 2 2 Electrical specification and select the one that would satis...

Страница 25: ...owing AC input equipment For details see Table 2 1 Model Number of phases Voltage Frequency Capacity Remarks DC 5 P 3 phase 187 229V 50 60Hz 8 0kVA The power receiving equipment shall be designed with...

Страница 26: ...le of ground wiring 20kW DC Pulse system 3 2 3 How to install The power supply unit is supposed to be mounted on a rack Before using mount this product on a rack Refer to Fig 3 2 for the position of t...

Страница 27: ...d environment so that the inner rack temperature and the humidity do not go beyond the specified value Operation at a temperature outside the specification raises an alarm which stops devices and caus...

Страница 28: ...optional output cable terminal Table 3 1 Processing for optional input cable terminal DC 5 P Connection destination Our cable color and load terminal processing Size of solderless terminal L1 R phase...

Страница 29: ...models Make a daisy chain connection of the M S connectors on the back of power supply units from Master to Slave 1 and Slave 2 using an M S cable for connection Master female Slave1 male female Slave...

Страница 30: ...ting DC are not applied If the setting switch is changed set the DC inputs again Master 0 1 2 3 4 5 67 8 9 Slave1 Slave5 0 Master 1 Slave1 2 Slave2 4 Slave4 5 Slave5 A B C D E F 0 1 2 3 4 5 67 8 9A B...

Страница 31: ...ble connection configuration see below Using optical synchronization cables for connection the EXTPLS connectors on the back of power suplly can be daisy chained from the first system Up to 12 systems...

Страница 32: ...nd CSLV for the system 2 and after It becomes monitoring state for the number of system units by changing the OSC setting into CMST or CSLV At this time if the number of system units is not specified...

Страница 33: ...ly S e e F ig 3 5 N G In tro d u c e a ll b re a k e rs o f th is p ro d u c t a t th e s a m e tim e o r C irc u it b re a k e r in p u t fro m s la v e E R R O R o c c u rre d N O Y E S P le a s e d...

Страница 34: ...gain If the E R R O R persists even perform ing above steps the product m ay possibly be in failure C om pletion of pulse synchronization setting From the front panel the synchronization system is spe...

Страница 35: ...ence M S From the downstream slave System optical synchronization From System 1 3 5 protection sheets On the top plate a protection sheet is covered for the contamination prevention For this part remo...

Страница 36: ...C ARC button Push button Back to the previous one along the parameter tree Pressing together with the FUNC button shows the effective number of times of the hard arc process ENT RESET button Push butt...

Страница 37: ...T This lights up when the output reaches the set value LED Green READY This lights up when there is no FAIL with the interlock released LED Green INTERLOCK OK This lights up when the interlock is rele...

Страница 38: ...efore Master Slave operation make connections SERIAL communication port D sub 9 pin connector Use in the RS232C RS485 communication mode P configuration switch 3 Slide switch This is not used The fact...

Страница 39: ...nication port Change of power control mode Front panel USER I O PORT SERIAL communication port SERIAL communication port Oscillation frequency Front panel Front panel SERIAL communication port SERIAL...

Страница 40: ...voltage for DO of the power supply but should not be used for other purposes 19 COMD Digital signal common 20 COML LEVEL signal common 21 LEVEL AI 0 10V COMA Power output set voltage 0 to 10V 3 22 COM...

Страница 41: ...ain screen to make a change For details the corresponding point in the operating instruction PSET the output is produced by the power control 1 VSET the output is produced by the voltage control ISET...

Страница 42: ...ondence table at power setting LEVEL Number of 10 P units in use Number of 5 P units in use Output voltage setting level LEVEL 0 to 10V In V control 0 1500V In I control 0 25 A Ex 10kW 2 units 0 2 25...

Страница 43: ...n 2nd interruption time MENU CNFG ARC PULS PARC ENBL Time from the 1st interruption until the 2nd interruption time is enabled MENU CNFG ARC PULS HARC SHDN Interruption time at HARD ARC MENU CNFG ARC...

Страница 44: ...ms 0 2ms MENU CNFG ARC PULS HARC JGDE TIME 300us 300us MENU CNFG ARC PULS HARC JGDE CONT 3 3 MENU CNFG ARC DCMD SHDN 1000us 1000us MENU CNFG ARC LEVL VOLT 150V 150V MENU CNFG ARC LEVL CRNT 35A 55A 35A...

Страница 45: ...of the target is controlled by producing the reverse pulse output continuously 0V 0A t Oscillation frequency Figure 4 4 Image of waveform in continuous mode One pulse mode 1PLS Produces a DC output n...

Страница 46: ...3 Transition of parameter changes PARAMETER Continuous mode One pulse mode Pulse parameter Pulse parameter A B A B MENU CNFG ARC PULS PARC 1st 5us 5us 5us 5us MENU CNFG ARC PULS PARC 2nd 8us 8us 8us 8...

Страница 47: ...ARC PULS PARC 1st 8us 5us 5us 5us MENU CNFG ARC PULS PARC 2nd 8us 8us 8us 10us MENU CNFG ARC PULS PARC ENBL 100us 100us 100us 100us DC mode DCMD Produces a DC output Even an ARC is generated on the lo...

Страница 48: ...Operation in continuous mode 1PLS Operation in one pulse mode DCMD Operation in DC mode 4 8 2 Setup in USER The oscillation mode can be selected from combinations of signals of 30 pin and 31 pin ports...

Страница 49: ...r the second and the following times is over PARC ENBL the reverse pulse output is produced with the shutdown time of the first time PARC 1st again 0V 0A Time t Voltage Current ARC occurred Voltage De...

Страница 50: ...s equipped that performs a shutdown operation longer than the inter pulse ARC shutdown operation in a case unable to eliminate an ARC even performing an inter pulse ACR processing In the HARD ARC func...

Страница 51: ...om the output start 0V 0A t 0V 0A t No ramp time With ramp time Figure 4 11 Image of waveform at the ramp Ramp start The ramp start value can be set in of the set value As usual the lamp rises up to t...

Страница 52: ...value Command value Ramp time function Ramp time function Ramp time Ramp start Ramp time only Ramp time 0V 0A t Command value Command value LEVEL 0V 10V Do not accept changes to command values Ramp t...

Страница 53: ...is abnormal TEMP ERROR E34 This occurs if an internal temperature error occurs FAN ERROR E35 This occurs in the event of a cooling FAN error INVERTER ERROR E36 Generates when the inverter is abnormal...

Страница 54: ...T WARNING 2 W35 Generates when the IREG PREG are both LOW Generates when 1PLS DCMD are both LOW MODE CHANGE WARNING W37 This occurs when the arc parameter is switched in the DC ON mode MS SETTING WARN...

Страница 55: ...of the set value in its initial state the front SETPOINT LED lights up and the SETPOINT signal becomes active The SETPOINT judgment criterion value is 2 in the initial state but can be changed between...

Страница 56: ...anged and press the ENT button to accept the changes PSET The display shows the output control mode PSET Select when using in the power control VSET Select when using in the voltage control ISET Selec...

Страница 57: ...displayed In the DC mode 0 s is displayed If the synchronous setting is CSLV LINK MODE is indicated on the lower column of the main screen If a WARNING occurs the code is displayed at the upper right...

Страница 58: ...DC 10 P 5 HOW TO OPERATE 46 5 1 2 Parameter tree in MENU screen After that carry out the operation using various buttons on the front panel For the menu hierarchy see the parameter tree below Figure 5...

Страница 59: ...hy of the menu screen return to the previous hierarchy MENU ERROR button The menu screen appears ENT RESET button Main screen Shifts into each parameter setup mode Press the button to display where yo...

Страница 60: ...he breaker is shut off the counts are reset ERROR log check FNC MENU Pressing the FNC and MENU ERROR buttons together enables one to check the log of ERROR occurrence Pressing the ESC button returns t...

Страница 61: ...mode LIMT this is used to decide the limits of each output value ARC this enables one to change the process parameters used when an ARC occurs At this level the currently selected ARC parameter is dis...

Страница 62: ...ed only on the front panel In the SERIAL communication control mode the SERIAL communication is followed regardless of what is selected In the LOCK mode the SET display in the main screen shows and UN...

Страница 63: ...be damaged CRNT this enables one to change the limit value of the output current 10 P Selectable from 0 to x25 A depending on the number of power supply units connected The number of units using the 1...

Страница 64: ...ENBL the operation is carried out based on this shutdown time ENBL The time that validates the inter pulse ARC of the second and the following times can be changed The value can be selected in the uni...

Страница 65: ...changed ILEV The electric current level for detecting the ARC can be changed VLEV The electric voltage level for detecting the ARC can be changed 0V and from 40 to 500V can be specified The value can...

Страница 66: ...set the network address The selectable range is 1 to 127 in steps of 1 MONI this allows you to confirm the number of times that HARD ARC is detected and the occurrence log of warnings and errors WARN...

Страница 67: ...ws you to view and set the current time SERV this enables one to check the hardware configuration RMP1 this changes the rise time at the start of the output With this ramp function the rise time until...

Страница 68: ...the command value can be set The settable range is 0 05 to 600 sec in steps of 0 01 sec Ramp time functions 1 and 2 cannot be used together If one ramp function is enabled the other ramp function wil...

Страница 69: ...and the following systems While the CMST is specified the oscillation mode compulsory turns into the continuous mode For changing the CMST into CINT specify the oscillation mode once again since the...

Страница 70: ...rol mode can be selected only on the front panel CNFG SYTM MODE LOCK NO YES NO 4 Setting for number of units of DC 5 P 10 P connected CNFG SYTM UNIT 0 6 1 1 5 Select whether or not to use the terminat...

Страница 71: ...tion voltage CNFG OTHR IG V 800 1500 1 V 1500 5 Setup of set point light up range CNFG OTHR SETP 2 8 1 2 6 Setup of using non using of the ramp FUNC RAMP MODE DISBL ENABL DISBL 7 Setup of the rise tim...

Страница 72: ...of an inter pulse ARC CNFG ARC PULS PARC ENBL 10 50000 10 usec 100 4 Setup of the output interruption time at the time of HARD ARC processing CNFG ARC PULS HARC SHDN 0 1 50 0 0 1 msec 0 2 5 Setup of j...

Страница 73: ...are recommended to follow the procedure below since noise may be caused 1 Use of a twisted shield pair wire 2 Insulation of signals by photocouplers etc on the side of external connection devices 3 Si...

Страница 74: ...ETPOINT 13 FAIL 14 HARC 16 REMOTE 35 AI Analog input LEVEL 2 21 LEVEL COM L 2 2k COMA PLCetc DC 5 P 10 P ADINTERFACE side COM L ISOAMP COM L AO Analog output VOUT 2 AO ISO AMP COM A COM A COM A DC 5 P...

Страница 75: ...5 P 10 P AD INTERFACE PLC COMD 15V DO COM D DO 100O 1 3kO 2 4kO AUX AUX 15V 4 3kO DI DI 1 0kO COMD 1 0kO COMD 15V 24V DO COM D DO 100O 1 3kO 4 7kO AUX Figure 5 2 Recommended digital I O connection ci...

Страница 76: ...connections and clearance at the intake exhaust port of the power supply approximately once every three months In maintenance be sure to shut off the breaker for the power supply and also shut off yo...

Страница 77: ...The recommended replacement years do not guarantee parts life The deterioration rate of these parts greatly depends on the frequency in use and environment of the unit at your site 2 Especially the li...

Страница 78: ...ins of USER IO PORT 1 Check whether or not a signal is produced between the 37 and 34 pins of the external control device 4 READY does not turn on 1 FAIL occurs 2 INTERLOCK is not released 1 Determine...

Страница 79: ...nd voltage to within the specified value Check whether the unit is recovered by the RESET signal If the command value electric voltage is within the stipulated value and if the symptom repeats again e...

Страница 80: ...y DC 5 P DC 10 P 8 APPENDIX 68 8 APPENDIX The following documents about DC are attached 1 External view of DC 2 China RoHS compliant 3 Operating instructions for serial communications Figure 8 1 Exter...

Страница 81: ...DC Puse Power Supply DC 5 P DC 10 P 8 APPENDIX 69 Figure 8 2 External view of DC 10 P...

Страница 82: ...ns cable Pb Lead Hg Mercury Cd Cadmium Cr6 Hexavalent chromium PBB Polybrominated biphenyl PBDE Polybrominated diphenyl ether SJ T11364 This table is prepared according to the provisions of SJ T 11364...

Страница 83: ...y DC 5 P DC 10 P 8 APPENDIX 71 O Op pe er ra at ti in ng g I In ns st tr ru uc ct ti io on ns s f fo or r S Se er ri ia al l C Co om mm mu un ni ic ca at ti io on ns s 5kW 10kW DC Pulse Power Supply m...

Страница 84: ...10 P communication specifications are as follows Communications protocol RS 232C RS 485 Communication rate Selectable from 115200bps 57600bps 38400bps 19200bps 9600bps Data length 8 bit Stop bit 1 Pa...

Страница 85: ...For establishment of RS485 communications an address needs to be allocated to each DC to connect See the section about the NET Address setting The DC of the final end to connect needs the TERMINATION...

Страница 86: ...creen shown below appears 4 On the Option screen press the or button to select HOST item and press the ENT button The Serial Communication Menu screen shown below appears 5 From the HOST communication...

Страница 87: ...t the communication rate using the or button After editing press the ENT button to accept the change Setting of TERMINATION For establishment of the RS485 communication TERMINATION of the final unit o...

Страница 88: ...ol of administration can be set The current control mode appears on the screen Pressing the ENT button once enables the editing mode and allows you to select the control mode using the or button The c...

Страница 89: ...tion the Address set in DC needs to be transmitted Data field length The total number of bytes of the command the data is transmitted The commands themselves are all 1 byte but the following data are...

Страница 90: ...on the header field command field and data field before the checksum This value is determined by accumulating exclusive ORs XORs of all the information included in a packet before the checksum byte th...

Страница 91: ...state from HOST after an acknowledgment message transmitted from DC 1 Message transmission on HOST First HOST transmits a message packet to DC 2 DC receives the message After receiving the message pac...

Страница 92: ...value of the data is wrong 0x05 Data Length NG Indicating that the data length of the data received is wrong 5 Receipt of acknowledgment message on HOST Depending on the responding message the HOST s...

Страница 93: ...tput mode by the setting command 0x14 first and then set the LEVEL The settings for each mode are as follows For the Power the value in which the value intended to set multiplied by 100 is transmitted...

Страница 94: ...e output power can be set The limit value depends on the composition of the connected power supplies 0 60 0kW 600 600 0x0258 1byte STATUS 0x21 VOLTAGE LIMIT 2byte The limit of the output voltage can b...

Страница 95: ...s the command for selecting a pulse oscillation mode Continuous mode 0x00 One pulse mode 0x01 DC mode 0x02 1byte STATUS 0x41 PULS_OSC 1byte This is set for synchronized operation using optical synchro...

Страница 96: ...by 2 bytes each Data is transmitted in the order of 1ST_TIME 2ND_TIME and ENABLE_TIME Be sure to send the values at once It is not possible to change specific parameters For any points without changes...

Страница 97: ...RC for shifting into the HARC ARC can be selected It can be set in the range between 2 and 5 2 5 5 0x05 1byte STATUS 0x49 PULSE HARC SHUTDOWN TIME 2byte The shutdown processing time of HARD ARC can be...

Страница 98: ...byte eyes will respond the number of 10 P 5 P is three 0x0003 10 P is five 0x0500 0x84 All Units Power 2byte The maximum output value is replied electric power The maximum value varies according to th...

Страница 99: ...tted is responded The value depends on the number of units to connect 0 to 1500 150A with the maximum 6 units connected 25A 6 0x95 CONTROL MODE 1byte The operation mode set is responded 0x00 Local LCL...

Страница 100: ...The output voltage limit of the power supply set is responded 0 800V 800 0x0320 0xA2 CURRENT LIMIT 2byte The output current limit of the power supply set is responded 0 150 0A 1500 1500 0x05DC 0xA4 PU...

Страница 101: ...NT 4byte The accumulated ARC generation frequency between pulses is responded The maximum count number is 99 999 999 99 999 999 05F5E0FF 0xB0 PULS MODE 1byte The specified oscillating frequency is rep...

Страница 102: ...om DC in that order 0xB6 PULSE HARC JUDGE TIME 2byte The judgment time for shifting into HAR ARC processing is responded The value from 10 100us to 6 500 65 000us is transmitted 65 000us 6 500 0x1964...

Страница 103: ...ply message When the Write command is transmitted the DC transmits only the command status as a reply message The reply message is as follows 81 00 00 81 81 SOF Address 01 10000001 is transmitted 00 C...

Страница 104: ...message When the Read command is transmitted the DC transmits the details of the inquiry as a reply message 81 02 92 5D 00 4C 81 SOF Address 01 a 10000001 is transmitted 02 Command data length 0x02 is...

Страница 105: ......

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