Ulvac DA-20D Series, Инструкция по эксплуатации

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6. INSTALLATION AND OPERATION
(1) Before starting operation, remove the cap from the suction pipe of the pump.
(2) Install the pump in a place as free from dust and moisture, where the pump can be easily
checked and maintained.
(3) Install the pump tightly in a stable horizontal position.
(4) Install the pump in a place where ambient temperature is 7~40°C.
(5) In case of assembling the pump in a system
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Pay an attention particular to the ambient temperature is 7~40°C.
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Float the pump from the system using a rubber shock absorber, install the pump so that vibration
is not transmitted to the system.
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By removing the fixed rubber legs ,do not install the pump directly to the system.
There would be a case that the pump casing is deformed and a load occurs to the motor bearing.
(6) After verifying that the power switch of the pump is turned OFF, connect the power cord to the
power supply specified the motor rating.
(7) Turn ON the pump to check that pump is pumping.
(8) After that, turn OFF the power to stop the pump.
(9) Make piping arrangement ensuring that no leakage occurs in the suction pipe. Use as short a
hose as possible. If a long hose is used, it will take longer to pump.
(10) Make piping arrangement so that the exhaust port pressure is under backing pressure.
(11) In case of selecting the inlet pipe and exhaust pipe that are not from our products, please select
the exhaust pipe that has same or larger inner diameter length with the inlet pipe.
(12) Typical vacuum pumping diagram is as shown in Fig-3. Timing valve (Pump vent valve in Fig-3)
to start easily the pump is attached close by the pump. Also, isolation valve to keep the
chamber in vacuum is equipped between the pump and the chamber.
(When pump is operating : Isolation valve is open, timing valve is closed)
(When the pump is at stop : Isolation valve is closed, timing valve is open)
Fig. 3 Vacuum pumping diagram