Ulvac DA-20D Series, Инструкция по эксплуатации

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Contents
Pages with a shaded background are those, which contain items related to safety.
1. Before Using the Equipment
…………………..1
2. Checks When Opening Packaging
…………………..2
3. Using the Pump Safely
…………………..3
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Safety icons
…………………..3
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Cautions for Safety in Use
…………………..4
4. SPECIFICATIONS
…………………..8
5. DIMENTIONAL DRAWING
…………………..9
6. INSTALLATION AND OPERATION
…………………10
7. CAUTIONS IN OPERATION
………………....11
7.1 Cautions in Operation
…………….…...11
7.2 Startup in Cold Season
………………....11
7.3 Thermal Protector
……………...….11
7.4 Fluctuations in the power voltage and frequency
……………...….12
8. Maintenance, Inspection, and Repair
………………....13
8.1 Cautions for Maintenance, Consumable part
………………....13
8.2 Maintenance
………………....13
8.3 Scheduled Inspection
…..….…….……14
8.4 Replacement of Consumable parts
……...…….……15
8.5 TROUBLESHOOTING
……...…….……17
9. STORAGE
……...…….……17
10. CONCLUSION
……...…….……18
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Warranty
……...…….……18
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Usage Status Check Sheet
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Product information, service bases, and contact information