manualshive.com logo in svg

Trebor QUANTUM NXT, Руководство по эксплуатации и техническому обслуживанию

Поделиться
Скачать
Trebor QUANTUM NXT Скачать руководство пользователя страница 4

 

 

 

 

PAGE 4 

QUANTUM NXT DI HEATER OPERATION / MAINTENANCE MANUAL 

 

1  INTRODUCTION

 

 

 

QUANTUM NXT DI WATER HEATER

 

TREBOR’s Quantum NXT deionized water heater will meet the most 
stringent application requirements for process cleanliness and 
temperature control.  Trebor’s unique heater design virtually eliminates 
the potential for metal contamination due to potentially exposed metal 
heating elements in immersion style heaters, while process control and 
reliability are designed to outperform and outlast other available quartz 
heating systems. 

 

Trebor’s DI water heater uses a revolutionary heating technology to 
provide exceptional process purity and control.  Heat is generated using 
resistive heating elements conducted to the fluid through quartz tubes 
using convective heat transfer.  This conductive/convective heating 
method allows the heating element to operate at a much cooler 
temperature than IR heating systems and provides the basis for a highly 
responsive heating control system. 

 

The Quantum NXT heater modules have smooth surfaces with minimal 
cracks and crevices, reducing particle traps.  Furthermore, no pipe 
threads or elastomeric O-rings are used in the construction of the fluid 
path including the modules.  With the exception of the exposed tip of the 
titanium temperature sensor (included in standard options), the DI water 
is exposed only to semiconductor grade quartz, PTFE, and PFA wetted 
surfaces. 

 

Trebor’s patented heating module technology is constructed to provide 
excellent process control by minimizing hold-up volume and thermal heat 
capacitance while maximizing the heat transfer.  While heating, the 
system can ramp to a process temperature in a “no flow” condition. 
This also reduces the consumption of DI water by minimizing temperature 
transition time and bypass to drain requirements. 

 

Many product safety features have been incorporated into the  Quantum 
NXT heater.  Each system has a liquid level sensor, leak sensor, 
grounded heater modules, ground fault protection, and redundant  control 
system interlocks.  An electro-mechanical contactor disengages  power to 
the heaters when a fault condition occurs. 

 

This equipment is built and complies with semiconductor manufacturing 
industry requirements of SEMI S2-0715.  Please contact Trebor 
regarding any questions. 

Содержание QUANTUM NXT

Страница 1: ... S 6479094B2 U S 6544583B2 5 19 MQNXT C U S 6580061B2 U S 6663914 U S 6674053B2 ADDITIONAL PATENTS PENDING Phone 800 669 1303 or 801 561 0303 Fax 801 255 2312 e mail treborservice idexcorp com QUANTUM NXT DI WATER HEATER Operation Maintenance Manual ...

Страница 2: ...PAGE 2 QUANTUM NXT DI HEATER OPERATION MAINTENANCE MANUAL ...

Страница 3: ...ties 16 3 3 b Ethernet Communication 19 3 4 GENERAL 19 3 5 TOUCH SCREEN 19 3 5 a Home Page 19 3 5 b Alarm Status Page 20 3 5 c Module Status Page 21 3 5 d Historical Plot Page 22 3 5 e Configuration Page 23 3 5 f Advanced Setup 24 3 6 TOUCH SCREEN 24 3 6 a Ethernet Interface 24 3 6 b Modbus Communication 25 4 START UP 27 4 1 PRE START INSPECTION 27 4 1 a Verify Shipping Condition 27 4 1 b Hazardou...

Страница 4: ... with minimal cracks and crevices reducing particle traps Furthermore no pipe threads or elastomeric O rings are used in the construction of the fluid path including the modules With the exception of the exposed tip of the titanium temperature sensor included in standard options the DI water is exposed only to semiconductor grade quartz PTFE and PFA wetted surfaces Trebor s patented heating module...

Страница 5: ...d by the CE mark This equipment also complies with the requirements of the Management Methods for Controlling Pollution of Electronics Information Products known as China RoHS Figure 1 2 China RoHS Electronic information product pollution control symbol Trebor will use an EFUP Environmental Friendly Use Period of 25 years which is consistent with the industry mean The EFUP label is located next to...

Страница 6: ... metallic coating See SJ T 11363 2006 for definition of homogeneous materials X This substance is present at a concentration above the limit in SJ T 11363 2006 in at least one of the homogenous materials for this part or it has been intentionally added to a metallic coating See SJ T 11363 2006 for definition of homogeneous materials Notes concentration limits of 1000 ppm 0 1 by weight for lead mer...

Страница 7: ...pment When using this equipment be sure to follow the safety procedures outlined by your facility These safety procedures should cover the two primary types of hazard training 1 equipment hazards and 2 facility related hazards If the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired User should supply secondary containment for ...

Страница 8: ... Mandatory Action A Mandatory Action symbol indicates that action should be taken to avoid a hazard Following is a typical example of a Mandatory Action symbol as it could appear 2 2 EQUIPMENT SAFETY The rest of this section describes equipment safety features Emergency Off Push button EMO Process Interlocks Main Power Disconnect Switch Lockout Tagout Information Equipment Safety Labels Caution Ho...

Страница 9: ...ntactors Use the Main Power Disconnect Switch to remove power from the panel Figure 2 1 On power up or after the EMO has been pushed the heater must be reset by pressing the blue RESET button to reactivate the controls This must be done at the machine Some options include a remote EMO option This option allows the user to wire an external EMO switch to the DI heaters internal EMO circuit Consult t...

Страница 10: ... during startup It is critical that these sensors operate properly Do not tamper with the sensors Damage to the system can result if the sensors are altered or overridden 2 4 c Element Over Temperature Protection The temperature limit controller monitors a thermocouple attached to each heater element as well as thermocouples attached to the back panel and the heatsink s In the event that the eleme...

Страница 11: ...ch See Section 3 5 e for more details 2 4 g Continuous High When the heater is operated continuously above the recommended 85 for longer than 30 minutes the heater will show a warning on the home screen as well as show a continuous alarm on the alarm page This alerts the user that either the system is overworked or element failures have caused the heater output to increase above the recommended li...

Страница 12: ...established company procedures ensures that the energy isolating device and the equipment being controlled cannot be operated until the lockout device is removed Tagout a prominent warning device such as a tag and a means of attachment which can be securely fastened to an energy isolating device in accordance with established company procedure ensures that the energy isolated device and the equipm...

Страница 13: ...rgy isolation device lock through the hole in the actuating handle and secure the lock 6 Verify that the tool has been isolated and de energized by attempting to turn the main power disconnect back to the ON position and or by pressing the machine start button The machine power must not be reapplied and or the machine must not start 2 5 c Machine Start Up with door closed Perform the following seq...

Страница 14: ...rs located on the top of the heater enclosure and on the bottom of the side panels Optional seismic brackets can be attached to the bottom of the side panels of the cabinet enclosure See Facility Layout in Appendix for anchor locations and additional information 2 7 CAUTION USING N2 If using N2 in place of CDA proper precautions must be taken according to company policy 2 8 Sound Pressure Max soun...

Страница 15: ...d be checked for rough handling during shipment Any damage to the system should be reported to the carrier immediately Be careful to not damage the drain fitting located under the heater cabinet when using a dolly or forklift 3 2 LOCATION Locate the heater near the point of use to reduce plumbing heat loss Access to the front and rear of the system will be necessary for maintenance and hook up Tab...

Страница 16: ... feet Conform to local codes while evaluating hot water line routing Drain Connect the Over Pressure Relief Drain to an open drain line with no more than 30 of tubing Do not connect restrictive fittings or valves in line with the drain If an over pressure condition occurs in the heater a valve will relieve pressure in the heater Attach drain line to bottom of the cabinet If a cabinet drain line is...

Страница 17: ...pen the three cam latches on the right side of the door This will allow access to the electrical connections 3 To secure an electrical conduit fitting remove top panel by removing the lifting eyebolts located on top of the system The conduit nut may then be secured Reassemble the top panel to the enclosure Route the wires from the electrical source 480 VAC 400 VAC or 208 VAC 3 phase into and throu...

Страница 18: ... Figure 3 1 Main Circuit Breaker 7 Close the door and secure 8 Check ground continuity on cabinet to any facility ground 9 Remove Facility power Lockout Tagout 10 Restore Facility power supply to the heater 11 Follow heater Pre Start Inspection see Section 5 1 ...

Страница 19: ...tor that the heater requires attention After the fault condition is corrected the heater can be reset using the RESET button located on the heater door the fault condition will also be cleared if the entire system power is cycled off and on Redundant hardware relay interlocks back up heater element temperature leak sensor and component temperature faults 3 5 TOUCH SCREEN A touch screen provides an...

Страница 20: ...n be used to turn the heater on or off The set point can be changed by touching the set point value shown in blue on Figure 3 1 and entering the new value Once enter is pressed the new set point takes immediate effect The mode of the heater can be toggled from local mode to remote mode by pressing the Local Mode or Remote Mode button on the Home Page See Figure 3 1 The button text changes dependin...

Страница 21: ...rm Insufficient inlet water supply pressure Liquid Level Alarm Insufficient fluid level Liquid Leak Alarm Fluid Leak Detected water in base area or fluid on back side of burst device for optionally installed burst device rupture sensor Over Temperature Alarm One or more elements in a heater module have exceeded the protective temperature limit or the process value has exceed 110 C 3 5 c Module Sta...

Страница 22: ...e The plot log is saved to internal memory and can be exported to an SD card or USB drive by pressing the Save to USB or Save to SD buttons Immediate data can be saved to a USB drive inserted into the front door below the screen by pressing the Record to USB button Once data is plotted the save button saves the plot data to the USB and starts a new plot Once plotting and saving is completed touch ...

Страница 23: ...dited Values that are grey cannot If grey values must be changed contact Trebor Alarm Delay Setting Press the delay value to set the pressure and liquid level alarm delay Enter the desired alarm delay in seconds and press enter The default value is 10 seconds Ambient Temperature Inlet Fluid Temperature Setting Setting the ambient fluid inlet temperature allows the heater to more accurately apply t...

Страница 24: ...d Time 3 5 f Advanced Setup The Quantum NXT heater has advanced setup settings that are password protected Changing these settings can significantly affect the performance of the heater Changing these settings without training is not recommended Contact Trebor Technical Support for assistance on advanced setup 3 6 TOUCH SCREEN 3 6 a Ethernet Interface The heater can be operated over an Ethernet ne...

Страница 25: ...ll not be active until the screen power has been cycled by pressing and holding the reset button for 7 10 seconds 3 6 b Modbus Communication Quantum NXT heaters can communicate on both Modbus TCP and Modbus RTU networks Modbus TCP communication is included in all Quantum NXT heaters Modbus RTU communication is an option on all Quantum NXT heaters Using Modbus communication Quantum NXT heaters can ...

Страница 26: ...nformation regarding Modbus communication please visit www modbus org Name HMI PLC ADDRESS MODBUS ADDRESS ADDRESS x06 Type Data Bytes Perm Set Point M100 D590 W42101 402100 Reg Short 2 R W Remote On Off M101 D611 W42102 402101 Reg Bool 2 R W Process Temperature M102 D602 W42103 402102 Reg Short 2 R Duty Cycle M103 D8001 W42104 402103 Reg Short 2 R Mode M104 D610 W42105 402104 Reg Bool 2 R Alarm St...

Страница 27: ...oosen terminals before tightening as this may affect the contact area 4 1 c Electrical Inspection Refer to system schematic Visually inspect all electrical components for anything that seems unusual such as damaged wire insulation disconnected wires etc 4 1 d Plumbing Leak Check Refer to PM Schedule Section 7 2 Inspect heater for leaks during start up Remove the rear panel and visually watch the l...

Страница 28: ...d there are no active faults the heater will be in standby and ready to turn on 4 5 NON FATAL ALARMS The Quantum NXT has several non fatal alarms that do not cause an audio alarm or turn off the heater but does effect the operation of the heater Pressure and Liquid level alarms delay for 10 seconds editable on configuration page before the alarm is activated While delaying the contactors will be d...

Страница 29: ...hut down by the following methods Select the OFF button on the control screen to put the heater in standby heater element power will be disengaged Rotate Main Breaker to off position Turn off the facility supply Lockout and tag out heater for maintenance repair or decommissioning Refer to Section 2 5 ...

Страница 30: ...system see section 7 1 c Shut down the heater see section 5 Reverse section 3 3 hook up to disconnect all lines running to the heater Dispose of the heater by following applicable local regional and national laws and regulations including those for segregation and recycling of materials ...

Страница 31: ... screw terminals on the load side of the module breaker for each of the three phases of the suspect heater 5 If the measured resistance is greater than 35ohms on one or more phases replace the suspect heater modules see Section 7 1 a Heater Replacement 6 If the measured resistance is less than 35ohms on all three phases then the heater elements in that module are OK Refer to the Troubleshooting Se...

Страница 32: ...old by gently pulling the fitting from the module Disengage the U fluid connector by gently removing the U shaped connector Use an absorbent cloth to remove any liquid from the leak sensor probe and leak containment well Install replacement heater module into cabinet in reverse order from above Note Carefully align the fittings because they can easily be cross threaded Follow section 4 1 d to chec...

Страница 33: ...y isolation valve Connect fluid inlet to an open drain line Alternate If a drain line is connected to the cabinet drain on the bottom of the heater enclosure the heater may be drained into the leak tray Process Fluid T C Top Manifold Heater Retaining Nuts Fluid U Connector Bottom Manifold NOTE Do not disassemble the heater module There are no user serviceable parts inside the module If disassemble...

Страница 34: ...ll the system Draining the system without power requires manual activation of the inlet isolation valve by pressing the blue button on the control solenoid located under the fans on the left side of the cabinet see Figure 7 2 Isolation Valve control Solenoid Figure 7 2 Isolation Valve Control Solenoid 7 1 d Leaks When a leak has been detected it is recommended that the supply water be shut off alo...

Страница 35: ...r Description Torque Value MCB1 See Factory Circuit Breaker 3P 480VAC 60A 225A XT1 XT3 7 9 Nm 62 80 in lb Connection Terminal Block 6Wire 14 6AWG XT1 XT3 7 8 Nm 53 71 in lb CB1 4 98004363 Circuit Breaker 3P 480VAC 60A 7 Nm 62 in lb CONT1 4 98004377 Contactor 60A 480V 3P 24VDC 4 Nm 35 in lb SSR 8 98004381 SSR 70A 4 32VDC 48 660V Control Terminal 0 5 Nm 4 4 in lb Power Terminal 2 4 Nm 21 2 in lb CBM...

Страница 36: ...on Solid State Relays The SSR s should be free of corrosion at the terminals and should not have signs of overheating or deformation The wires attached to the SSR s should be clean and in good condition Check and tighten mounting screws for optimum heat transfer to heatsink Main Circuit Breaker The main circuit breaker should be checked for signs of loose connections at the termination lugs Damage...

Страница 37: ... Verify supply is at least 15 psig Liquid level Check water supply at source Check over pressure relief diaphragm Verify flow is on Check plumbing for trapped air bubbles see Section 4 1 e Leak sensor Check manifold and heater modules for leak Visually inspect leak tray Thermocouple damaged If fault repeats check thermocouple leads to OTC for continuity Check T C plugs in top heater modules Plugge...

Страница 38: ...Fluid temperature won t reach set point Cause Solution Element not heating Check if heater element has failed and replace module see Section 7 1 Check and reset the main auxiliary and element isolation circuit breakers Ambient temperature setting variance Set ambient temperature to correct value on Configuration Page Too much flow Lower flow rate to achieve desired set point Poor Temperature Contr...

Страница 39: ... Number 801 561 0303 Toll Free Number 800 669 1303 Fax Number 801 565 1510 Email treborinfo idexcorp com treborsales idexcorp com Address Trebor International 8100 South 1300 West West Jordan Utah 84088 U S A 9 2 TECHNICAL SUPPORT Email treborservice idexcorp com Phone Number 1 385 900 3393 9 3 REGIONAL REPRESENTATIVES Web www treborintl com ...

Отзывы:

Нет отзывов

Бренды по названию

Популярные бренды

Загрузить еще бренды