Plasma Gas Analyzer
28
02001001A_9
5 GENERAL OPERATION
5.1
Power on and start up
CAUTION
Sample and calibration gases must be as specified in Sections 2.4 and 2.5 .
If the pressure/flow rates are outside the ranges specified in Section 2.1, you
must regulate the gases externally, before they enter the analyzer.
Before putting the power on
, be sure that your gas lines are properly purged with good quality
argon. In this way, the analyzer will be ready to use much faster. Also, and more importantly,
you will not send higher level of impurities in the plasma.
To power on the analyzer press the switch situated on the rear of the analyzer reference figure
2 item 3
At power on, the analyzer displays the
MAIN MENU.
Figure 16 - MAIN MENU
The
MAIN MENU
is shown in Figure 16 - MAIN MENU. The following sections give a complete
description of each menu and sub-menu.
KONTROL ANALYTIK K2001
TRACE N2 ANALYZER
MAIN MENU
F1:Configuration F3:Diagnostic
F2:Calibration F4:Run VX.X
Содержание SERVOPRO Plasma
Страница 1: ...Part Number 02001001A Revision 9 Language UK English SERVOPRO Plasma OPERATOR MANUAL...
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Страница 10: ...Plasma Gas Analyzer 8 02001001A_9 Figure 3 INTERNAL SCHEMATIC...
Страница 16: ...Plasma Gas Analyzer 14 02001001A_9 Figure 4 DIMENSIONAL OUTLINE DRAWING...
Страница 58: ...Plasma Gas Analyzer 56 02001001A_9 APPENDIX 1 AUTOMATIC CALIBRATION OPTION...
Страница 66: ...Plasma Gas Analyzer 64 02001001A_9 Figure 49 SERVOPRO PLASMA WITH AUTOMATIC CALIBRATION...
Страница 67: ...Plasma Gas Analyzer 65 02001001A_9 APPENDIX 2 TRACE NITROGEN IN HELIUM VERSION...
Страница 70: ...Plasma Gas Analyzer 68 02001001A_9 APPENDIX 3 DUAL BACKGROUND ANALYZERS...
Страница 76: ...Plasma Gas Analyzer 74 02001001A_9 APPENDIX 4 INTERFACE FOR EXTERNAL VALVE BOX...