SEMC TF20, Руководство пользователя, Страница: 13 / 30

Last updated 10/29/2020
12
3. Acquire (you should see black image)
iii. Bright reference
1. Open column valves and flu screen up
2.
In “correction” node → “bright” and “both channels”
3. Acquire (you should see image of the camera sensor)
iv. Confirm that correction is done
1.
Under “correction” and “both channels”
2. Acquire (you should see a flat fielded image)
v. When done with en preset gains, make sure to apply that same brightness/beam
diameter to the en preset in Preset_Manager
b. FA/FC/HL/SQ/GR preset gains (SS 5, beam diameter ~ 2X bigger than second circle on
flu screen; target dose = 20 - 30 electrons/Å
2
).
i. Repeat step 13a using settings from RIGHT image below .
14. Set up Ice Thickness
a. Go to vacuum area
b. Send scope to EN preset (make sure beam is centered)
c. Simulate target in exposure node
d. Record the mean value and input into Ice_Thickness node (under ALS box, NOT ZLP)
e. ALS coefficient with 100 um objective aperture = 392
f. ALS coefficient with 70 um objective aperture = 302
15. Get the dosage (e
-
/A
2
) of the EN preset (target = 30 - 60 e
-
/A
2
)
16. Insert and center objective aperture
a. Over a junk square, send scope to EN mag
b.
Lower flu screen and send scope to “DIFFRACTION” mode (right knobset)