Polytec TMS-350 TopMap In.Line, Руководство по оборудованию

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A-3
A TMS-A-305 Calibration Set
INFORMATION
Some values have already been defined by default in the Standards.xml file.
2. Enter the name of the standard and from the calibration certificate, enter
the depth, uncertainty and width for every groove and if applicable, delete
any values which are not relevant (refer to F
IGURE
A.2).
3. To define more standards, repeat step 2.
4. Once you have defined all standards, save the XML file to apply the data
to the software.
A.3 Make Measurements at the Depth Setting Standard
Position To position the depth setting standard for measurements, proceed as follows:
1. Position the interferometer and the depth setting standard on a vibration-
isolated table.
INFORMATION
Do not place moving parts, e.g. the PC, on a vibration-isolated table because
the measurement results could be affected or falsified!
2. Position the depth setting standard so that the AOI is aligned towards the
aperture of the light and is as parallel as possible to the object support.
The depth setting standard needs to be positioned precisely so that the tip
points to the left and the grooves run vertically (refer to F
IGURE
A.3). The
distance between the beam exit window and depth setting standard
should be approx. 40 mm (refer also to F
IGURE
6.1 in S
ECTION
6.3).
3. Start the TMS software and open the measurement window. To do so,
select File > New Document . With the View > Measurement command you
can switch over from an analysis window to the measurement window.
The live video image is displayed in the measurement window.
Figure A.3: Video image with depth setting standard and area of interest (AOI)
4. If the image is too dark or too bright, adjust the exposure time as
described in your software manual.