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6-3

6 Technical Specifications

Dimensions

Figure 6.1:

Dimensions of the interferometer (Dimensions not specified are given in mm).

TMS-350

TMS-A-301

100%

HELICOIL tangfree
free running M6 x 6

6.3 x 11.1

12.5

HELICOIL tangfree
free running M6 x 6

6.3 x 11.1

0.5

225

120

100

175

107

HELICOIL tangfree
free running M6 x 6

6.3 x 11.1

3 x M5-6H x 11/15.2

Beam

+0.02

2 x

4 F

+0.010

x 6 V

+0.02

5 F

+0.010 x

x 12 V

199

375.

Operating plane

Center of AOI

40 ± 1
stand-off distance

12,5

WARRANTY VOID IF SEAL
IS BROKEN OR REMOVED

Содержание TMS-350 TopMap In.Line

Страница 1: ...Title Hardware Manual 3D Topography Measurement System T M S 3 5 0 To p M a p I n L i n e Interferometer TMS I 350 Controller TMS E 350 PC TMS W 350...

Страница 2: ...validated in the case of unauthorized manipulation or modification of the equipment To return the equipment always use the original packaging Otherwise we reserve the right to check the equipment for...

Страница 3: ...andards and Directives 1 4 1 3 3 Equipment 1 5 1 4 Electrical Safety 1 6 1 4 1 Important Warning Notices 1 6 1 4 2 Applicable Standards and Directives 1 7 2 Introduction 2 1 2 1 System Overview 2 1 2...

Страница 4: ...erometer 5 2 6 Technical Specifications 6 1 6 1 Harmonized Standards Applied 6 1 6 2 TMS E 350 Controller 6 1 6 3 TMS I 350 Interferometer 6 2 6 3 1 General Data 6 2 6 3 2 Optics 6 4 6 4 TMS W 350 PC...

Страница 5: ...the instrument safely WARNING Type and source of danger Indicates a dangerous situation or action which could lead to death or serious injury if this warning is not noticed Describes how to avoid the...

Страница 6: ...ons Tampering with the instruments in any way is not necessary when using the equipment as intended and will invalidate the warranty Any use other than the one described here and in SECTION 2 1 is not...

Страница 7: ...ing and lifting heavy system components Only lift system components in pairs or using a suitable lifting device Wear safety shoes Wear protective gloves 1 2 6 Personal Protective Equipment 1 2 7 Clean...

Страница 8: ...devices are synchronized Always combine only synchronized devices 1 2 9 Disposal Instrument Unless otherwise specified defective or no longer required instruments and their components must be properl...

Страница 9: ...D is switched on using the mains switch on the device Beam exit aperture The position of the beam exit aperture on the instrument is shown in the following figure Figure 1 1 Position of beam exit aper...

Страница 10: ...ARNING Electric shock caused by applied voltage Always disconnect the instrument from the power before you are maintaining or cleaning it WARNING Fire risk caused by wrong fuses Replace defective fuse...

Страница 11: ...ect mains connection and intended use exposure to electric current is prevented by the closed grounded metal housing The device is subject to EU Directive 2004 108 EC EMC Directive and therefore compl...

Страница 12: ...1 8 1 Safety Information...

Страница 13: ...a 3D topography measurement system for optical non contact acquisition of the structure of rough and also reflective surfaces The TMS 350 measurement system is shown in the following figure Figure 2...

Страница 14: ...path length difference between the reference mirror and the corresponding points on the test sample is zero During this measurement run depending on the topography of the test sample the software fin...

Страница 15: ...TFT monitor with power supply and mains cable Supply cable Supply Special Ethernet cable for the connection of the camera Piezo cable from the controller to the interferometer Piezo 2 mains cables TMS...

Страница 16: ...loose screws damaged components etc 3 In the case of a wrong delivery damage or missing parts immediately inform your local Polytec representative stating the serial numbers of the instruments The se...

Страница 17: ...and Connections 3 2 1 Controller Front view The front view of the controller is shown in the following figure Figure 3 1 Front view of the controller 1 LED POWER indicator LED lit up ready to operate...

Страница 18: ...R connector 7 pin circular jack Connection for the supply cable to the interferometer for the interferometer mains supply 6 USB interface Universal Serial Bus type B Connector to connect the piezo con...

Страница 19: ...ront view The front view of the interferometer is shown in the following figure Figure 3 3 View of the interferometer 1 Reference filter Filter to adjust the intensity of the reference light to the in...

Страница 20: ...PIEZO SENSOR connector Sub D jack with two coaxial applications Connection for the piezo cable Piezo from the controller to control the piezo 4 VIDEO connection Connection for the video camera cable E...

Страница 21: ...rom the bottom of the interferometer is shown in the following figure Figure 3 5 Bottom view of the interferometer 1 Fitting hole 2 Mounting thread M6 Three mounting threads for the assembly of the in...

Страница 22: ...ready to operate 3 HDD LED LED yellow Hard disk drive HDD in PC active 4 RESET key Reset and restart PC 5 DVD burner For an exact description of the DVD burner see the manufacturer s manual 6 POWER k...

Страница 23: ...e to transmit the video from the video camera in the sensor head 7 MONITOR connection DVI jack Connection for the monitor cable to the TFT monitor 8 USB interfaces Universal Serial Bus type A Alternat...

Страница 24: ...he housing it leads to heat accumulation This will overheat the electronic parts inside the device and may result in a defect Always keep free all air inlets and outlets of the device Keep at least 50...

Страница 25: ...sealed with protective film The moisture indicator on the desiccant cartridge shows you when it needs to be changed The moisture indicator changes color once the desiccant cartridge is saturated and c...

Страница 26: ...All the cabling is also shown in FIGURE 3 8 Secure the connections appropriately Should any cabling problems occur contact your local Polytec representative WARNING Electric shock caused by applied h...

Страница 27: ...back page of the corresponding users manual PC 1 Connect up the keyboard to the KEYBOARD circular jack on the back of the PC 2 Connect up the mouse to one of the USB connections on the back of the PC...

Страница 28: ...oops Proceed as follows 8 Connect up a mains cable to the TFT monitor and to a multiple socket 9 Connect up a mains cable to the back of the controller and to a multiple socket 10 Connect up a mains c...

Страница 29: ...O SENSOR PIEZO SENSOR SUPPLY SENSOR POWER WARNING Disconnet Mains before opening ACHTUNG Vor dem ffnen Netzstecker ziehen I O KEYBOARD KEYBOARD MOUSE MOUSE VIDEO VIDEO MONITOR MONITOR SUPPLY SENSOR VI...

Страница 30: ...POWER key on the front INFORMATION Ensure that all instruments are switched on before you start the software 4 Start the TMS software as described in your TMS software manual The video camera is worki...

Страница 31: ...bringing the mains switch on the back to position I and press the POWER key on the front Object align 3 First of all position the object so that the AOI is approximately aligned towards the beam exit...

Страница 32: ...N 4 3 additional measurement inaccuracies in the range of less than 1 m can occur To compensate this error please proceed as follows 1 Position a high precision optical flat e g a 20 plate available a...

Страница 33: ...ement inaccuracies which have occurred due to the reference filter being exchanged have been compensated for 4 3 Reference Filter Exchange With the reference filter you can adjust the intensity of the...

Страница 34: ...fer to the following picture 2 Carefully lift the reference filter 2 out of the interferometer Take care that the O ring for the sealing at the reference filter slot does not shift Figure 4 1 Exchangi...

Страница 35: ...ometer INFORMATION Hand tighten means Tighten the screw firmly so that it can not undo itself Do not use any excess force and avoid damaging the thread INFORMATION If you have exchanged the reference...

Страница 36: ...4 6 4 Measuring...

Страница 37: ...r malfunctions can not be solved by the measures described here or if faults malfunctions occur which are not mentioned here please contact our service department Based on your fault description furth...

Страница 38: ...prox 40 mm by slowly changing the distance between the interferometer and the object until the interferences are visible in the software If you now move the piezo position in the software and the inte...

Страница 39: ...otobiological safety of lamps and lamp systems Risk category 1 Electrical safety IEC EN 61010 1 2011 07 Safety requirements for electrical equipment for measurement control and laboratory use EMC IEC...

Страница 40: ...Voltage range for piezo control 20VDC 120VDC from the controller Operating temperature 5 C 40 C 41 F 104 F Storage temperature 10 C 65 C 14 F 149 F Relative humidity max 80 non condensing Dimensions...

Страница 41: ...running M6 x 6 6 3 x 11 1 112 5 HELICOIL tangfree free running M6 x 6 6 3 x 11 1 63 0 5 86 89 225 92 89 120 100 25 175 107 HELICOIL tangfree free running M6 x 6 6 3 x 11 1 3 x M5 6H x 11 15 2 Beam 0 0...

Страница 42: ...nm Typical flatness measurement6 Average flatness deviation 14 nm 125 nm 15 nm 210 nm Measurement error flatness measurement 25 nm 210 nm 25 nm 350 nm Repeatability 1 nm 35 nm 2 nm 50 nm Reproducibil...

Страница 43: ...pth setting standard type A1 ISO 5436 118 sampling increment Nominal measurement speed 18 m s Nominal groove depth m 5 50 450 Expanded uncertainty of measurement 2 2 Interval limit of a confidence ran...

Страница 44: ...F 104 F Storage temperature 10 C 65 C 14 F 149 F Air humidity max 80 non condensing Dimensions w x h x d Without angle brackets 450 mm x 190 mm x 550 mm 19 84TE 4HE With angle brackets 485 mm x 190 m...

Страница 45: ...et consists of Depth setting standard calibration standard Calibration certificate The depth setting standard is shown in FIGURE A 1 Figure A 1 View of the depth setting standard The depth setting sta...

Страница 46: ...ION If you define just one standard you will not have to select a standard later during calibration INFORMATION To define depth setting standards you need write permissions in the directory C Program...

Страница 47: ...n isolated table because the measurement results could be affected or falsified 2 Position the depth setting standard so that the AOI is aligned towards the aperture of the light and is as parallel as...

Страница 48: ...rd proceed as follows 8 Determine the ambient temperature INFORMATION To have no negative effect on the calibration results determine the temperature as precisely as possible 9 Use the measurement seq...

Страница 49: ...file name is arbitrary The names of the device and the standard have to be given in the same way they have been entered in the dialog When entering the temperature you have to pay attention that the...

Страница 50: ...and click OK INFORMATION To apply the correct value for the ambient temperature use a comma as the decimal separator The Select Device dialog appears Figure A 7 Select Device dialog 4 Select TMS I 35...

Страница 51: ...e measurement The expanded measurement uncertainty is determined according to the Guide of the Expression of Uncertainty in Measurement ISO 1995 German version DIN V ENV 13005 1999 To calculate the ex...

Страница 52: ...alue is specified for the measurement value deviation To attain a high level of confidence on compliance with the tolerance values a worst case consideration is carried out by adding the value of the...

Страница 53: ...B 1 B Declaration of Conformity Appendix B Declaration of Conformity Figure B 1 Declaration of conformity for TMS 350...

Страница 54: ...B 2 B Declaration of Conformity...

Страница 55: ...ntroller back panel 3 4 curves compensate for 4 2 D declaration of conformity B 1 depth setting standard define A 2 evaluate measurements A 5 evaluation method A 7 make measurements A 3 desiccant cart...

Страница 56: ...ating principle 2 2 operating state indicator on the controller 3 3 operating temperature 6 2 controller specifications 6 1 PC specifications 6 6 P PC cabling 3 13 control elements front view 3 8 equi...

Страница 57: ...5 1 U unpack components 3 1 unpacking 3 2 V video connection at interferometer 3 6 W warm up long term drift of interferometer 6 4 warning label at controller 3 4 weight controller specifications 6 1...

Страница 58: ...iv...

Страница 59: ...ierre Semard 92320 Ch tillon Tel 33 1 49 65 69 00 Fax 33 1 57 19 59 60 E mail info polytec fr Internet http www polytec fr Japan JP Polytec Japan 13th floor Arena Tower 3 1 9 Shinyokohama Kohoku ku Yo...

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