Polytec MSA-600, Руководство по эксплуатации

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6-5
6 Technical Specifications
6.2.2 Optics
Laser
Illumination Module (L
ED
)
Camera
Bright Field Objectives (for Out-of-Plane Measurements)
Wavelength: 532 nm ±1 nm
Laser class: 3R
Max. power output: < 5 mW
Wavelength: 470 nm
Max. power output: < 20 mW
Risk category: 2 (according to EN 62471)
Type: CMOS digital camera
Interface: Ethernet
Pixel size (H x V): 5.86 µm x 5.86 µm
Used resolution: 1 720 Pixel x 1 200 pixels
Article name
Objective
manufacturer
Magnification
Nominal
objective
working
distance
Field of
view
Nominal
spot
diameter
Depth of
field
object
beam
1
x [mm] [mm x mm] (1/e 2
) [µm]
[µm]
A-MOB-001X Mitutoyo 1
13
2 10 x 7.0 46 5 000
A-MOB-002X Mitutoyo 2 34 5.1 x 3.5 23 1 200
A-MOB-005X Mitutoyo 5 34 2.0 x 1.4 9.3 180
A-MOB-0010X Mitutoyo 10 34 1.0 x 0.70 4.6 45
A-MOB-0020X Mitutoyo 20 20 0.51 x 0.35 2.3 12
A-MOB-0050X Mitutoyo 50 13 0.20 x 0.14 1.4 2.5
A-MOB-00100X Mitutoyo 100 6 0.10 x 0.070 0.8 1
A-MOB-10X-LD-B Polytec 10
48.9
3 1.0 x 0.70 4.6 45
1
Specifies the size of the range (typical) within which the signal power drops less than 3 dB below the maximum value
2
The specified value is only valid without
λ
/4 retardation plate. By default, the
λ
/4 retardation plate is attached to the 1x
microscope objective and needs to be removed before making the measurement.
3
The parfocal length of this objective is 135 mm. To measure through 6 mm thick quartz glass plates of vacuum chambers, you
can remove the first glass element in the clamping ring. Thus the working distance (WD) will be increased up to 56 mm.