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2-1

2 Introduction

2.1

Area of Application

The MSA-600 Measurement System measures non-contact and non-

destructive movements in microsystems.

2.2

System Summary

The MSA-600 Measurement System essentially consists of the MSA-I-620

Sensor Head, the MSA-F-620 Front-End, the MSA-E-600 Controller, and the

MSA-W-620 Data Management System. The measurement system can be

supplemented by accessories that are available as an option, such as

different stands, adjusters, or tables. Interference objectives are available for

topography measurements and bright field objectives with various

magnifications for vibration measurements.

Figure 2.1:

Summary of system components of the MSA-600 Measurement System, together with accessories
available as an option

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Содержание MSA-600

Страница 1: ...Title Operating Instructions Micro System Analyzer MSA 600 Sensor Head MSA I 620 Front End MSA F 620 Controller MSA E 600 Data Management System MSA W 620 For MSA 600 X MSA 600 U Systems...

Страница 2: ...hout authorization as this will invalidate the warranty To return the equipment always use the original packaging Otherwise we reserve the right to check the equipment for transport damage Mark the pa...

Страница 3: ...s and Directives 1 6 1 4 3 Equipment 1 6 1 4 4 Information on Laser Class 3R 1 6 1 4 5 Warning Labels on the Instrument 1 7 1 5 Lamp Safety 1 9 1 5 1 Important Warning Notices 1 9 1 5 2 Applicable Sta...

Страница 4: ...rations 3 33 3 5 2 In Plane Vibrations 3 38 3 5 3 Topography Measurement 3 44 4 Operating 4 1 4 1 Software 4 1 4 2 Selecting and Exchanging Objectives 4 1 4 3 Overview of the Parfocal Lengths of the O...

Страница 5: ...5 2 Industrial PC Configuration 6 9 6 5 3 Data Acquisition 6 9 6 5 4 Function Generator only MSA 600 X 6 9 6 6 A ESG 002 Signal Generator 6 10 6 7 Metrological Properties 6 10 6 7 1 MSA 600 X U 6 10...

Страница 6: ...iv Contents...

Страница 7: ...ll give you important advice on how to use the instrument safely WARNING Type and source of danger Indicates a dangerous situation or action which could lead to death or serious injury if this warning...

Страница 8: ...uctions When assembling installing and operating the instruments make sure that you adhere to the safety and accident prevention regulations applicable to the respective application 1 3 2 Intended Use...

Страница 9: ...ations 1 3 5 Personal Protective Equipment PPE Task Qualification Assembly cabling adjustment operation The instrument may only be used by qualified personnel who are familiar with electrical measurin...

Страница 10: ...ponents could damage the system or impair the function of the software To install components which have not been distributed by Polytec contact Polytec first Using Windows Update do not install any op...

Страница 11: ...e on the target area of the laser beam for adjustment purposes wear laser safety eyewear suitable for the specified laser wavelength Do not use any operating or calibrating equipment other than specif...

Страница 12: ...r radiation 1 4 4 Information on Laser Class 3R The properties of laser radiation differ from those of conventional light sources and are classified accordingly The emitted optical output power of the...

Страница 13: ...ure 1 2 Laser warning labels DUQXQJ DVHUVWUDKOXQJ ODVVH ZHQQ JH IIQHW 1LFKW GHP 6WUDKO DXVVHW HQ XVWULWWV IIQXQJ I U DVHUVWUDKOXQJ DVHUVWUDKOXQJ LUHNWH HVWUDKOXQJ GHU XJHQ YHUPHLGHQ DVHU ODVVH 5 1DFK...

Страница 14: ...d back view is shown in the following figure Figure 1 3 Position of the laser warning labels 1 2 3 and 4 as well as the beam exit aperture with the beam direction 5 706 DIUVOH 3FTUTQBOOVOH UUFOUJPO 3F...

Страница 15: ...risk category 2 and poses a low photochemical risk of retinal damage in the event of direct exposure for 100 s With a duration of 100 s the exposure hazard value EHV1 2 at 200 mm distance from beam e...

Страница 16: ...ean Union EU the warning label is affixed in the language spoken in the customer s country Figure 1 4 Lamp warning label Position of lamp warning label The position of the lamp warning label on the se...

Страница 17: ...s that cause an electric shock when the devices are touched Before operating the measurement system always connect the protective earth cables of the controller the objective positioner with MSA A TMS...

Страница 18: ...ffects 1 6 3 Applicable Standards and Directives Protection class The instrument complies with the electrical protection class 1 according to EN 61140 That means when the instrument is used as intende...

Страница 19: ...ticles must inform their customers if the delivered article contains a substance from the REACH candidate list SVHC list in a concentration above 0 1 percent per weight On June 27 2018 lead CAS 7439 9...

Страница 20: ...1 14 1 Safety Information...

Страница 21: ...e MSA E 600 Controller and the MSA W 620 Data Management System The measurement system can be supplemented by accessories that are available as an option such as different stands adjusters or tables I...

Страница 22: ...controller used in the measurement system controls the positions of the Piezo tilting mirror in the sensor head For topography measurements with MSA A TMS option it also controls the objective positi...

Страница 23: ...principle of white light interferometry in the appendix of the TMS software manual In plane measurements only MSA 600 X Using the MSA A PMA option the instrument can acquire movements in the measureme...

Страница 24: ...2 4 2 Introduction...

Страница 25: ...udes the following components 1 MSA I 620 Sensor Head 1 MSA F 620 Front End 1 MSA E 600 Controller 1 MSA W 620 Data Management System 1 A CAB BAS System Cabinet 1 A MOB 020X 20x Microscope Objective 1...

Страница 26: ...Available as an option A ESG 002 Signal Generator incl directional coupler with network cable red mains cable and various HF connecting cables N BNC adapter ZFDC 20 33 Directional Coupler A STD F50 M...

Страница 27: ...following steps when unpacking 1 Check the packaging for signs of unsuitable handling during transport 2 After unpacking check all components for external damage scratches loose screws damaged compone...

Страница 28: ...view of the sensor head 1 Warning label 2 Name plate 3 Warning label residual voltage 4 SCANNER connection 15 pin Sub D jack 5 REF SCANNER connection 15 pin Sub D jack 6 SYSTEM main connection 25 pin...

Страница 29: ...rriage plate 3 2 2 Front End Front view The front view of the front end is shown in the following figure Figure 3 2 Front view of the front end 1 AUX IN connection BNC jack 2 AUX OUT connection BNC ja...

Страница 30: ...main connection Sub D jack 6 Name plate 7 POWER mains connection socket for standard power cord with built in fuses 8 Warning label 9 Cooling fan 10 BC connection SMA jack 11 TRIG TMS connection BNC...

Страница 31: ...ontroller 1 POWER ERROR status display 2 DIGITAL I O connection 20 pin MDR plug in connector 3 SCANNER connection 37 pin Sub D jack 4 REF SCANNER connection 37 pin Sub D jack 5 OBJECTIVE POSITIONER co...

Страница 32: ...ng figure The front flap is shown as transparent Figure 3 5 Front view of the industrial PC 1 Cooling fan 2 Status display of the industrial PC 3 Status display of the hard disk drive 4 RESET key 5 PO...

Страница 33: ...only MSA 600 U marked in red 9 GENERATOR connections of the generator board only MSA 600 X 10 CONTROL network connection marked in yellow 11 USB connections Universal Serial Bus type A 12 ACQUISITION...

Страница 34: ...ing figure Figure 3 7 View of the data acquisition board 1 SYNC signal connection SMA jack 2 TRIG signal connection SMA jack 3 GPIO signal connection 44 pin High density Sub D jack 4 B signal input SM...

Страница 35: ...wing figure Figure 3 8 View of the generator board 1 Trg1 signal input MMCX jack 2 Clk clock output MMCX jack 3 Trg0 trigger input SMA jack 4 Clk In clock input SMA jack 5 Ch0 signal output SMA jack 6...

Страница 36: ...inted on the name plate and is mentioned in the test protocol if there is one Always combine only synchronized devices ATTENTION Damage to the system components caused by lack of diligence If the comp...

Страница 37: ...GURE 3 9 1 Either insert the objective adapter A or the objective turret B into the dovetail guide on the sensor head until its stop If you do not push the objective turret all the way to the stop int...

Страница 38: ...FORMATION To make it easier to assemble the objective positioner on the objective turret remove all objectives from the objective turret beforehand Assembly To assemble the objective positioner on the...

Страница 39: ...the recess in the objective positioner Insert the clamping tool G through this recess into one of the holes in the clamping ring of the turret insert and tighten the clamping ring Open or Close letter...

Страница 40: ...The scope of supply with option MSA A TMS includes a holder for the objective positioner Use this holder when the objective positioner is not in use Assembly Use the enclosed knurled screws and mount...

Страница 41: ...3 17 3 First Steps Use Insert either the objective positioner or the objective adapter into the holder Refer to the following figures when using the holder Figure 3 14 Holder with objective positioner...

Страница 42: ...3 18 3 First Steps Figure 3 15 Holder with objective adapter...

Страница 43: ...d and in the objective positioner with MSA A TMS option Temperature changes and compressive stresses can induce charges in piezo actuators If the equipment is under voltage or residual voltage touchin...

Страница 44: ...d by wrong installation of the SMA cables Mounting the SMA cables without the respective torque wrench may damage the device or cause signal interferences Always use the supplied torque wrench for the...

Страница 45: ...y includes a protective earth cable which connects the controller and the sensor head With the MSA A TMS option another protective earth cable is added that leads from the objective positioner to the...

Страница 46: ...he contact resistance is 0 1 at 25 A at all connection points relevant for mounting the protective earth cables Figure 3 16 Connection for the protective earth cable on the back of the controller 2 32...

Страница 47: ...screw D with a torque of 1 1 Nm 6 Make sure that the contact resistance is 0 1 at 25 A at all connection points relevant for mounting the protective earth cables Figure 3 17 Connection for the protec...

Страница 48: ...es as shown in FIGURE 3 18 In doing so guide the protective earth cable of the controller upwards and the protective earth cable of the objective positioner downwards as this protects the cables 10 Ti...

Страница 49: ...jack on the back of the sensor head and into the SYSTEM Sub D jack on the back of the front end 9 Plug the BC Cable into the BC SMA jack on the back of the sensor head and into the BC SMA jack on the...

Страница 50: ...CQ GEN Cable U into the ACQ GEN Sub D jack on the back of the front end and into the Ref In BNC jack on the back of the signal generator Industrial PC to signal generator 17 Product variant MSA 600 U...

Страница 51: ...11 5 9 2 6 67 0 5 287 781 9RU GHP gIIQHQ 1HW VWHFNHU LHKHQ 51 1 LVFRQQHFW 0DLQV EHIRUH RSHQLQJ 3RO WHF PE 3RO WHF 3ODW DOGEURQQ HUPDQ 21752 32 5 75 75 706 6 67 0 4 1 5 6 1 2 K ON Q 7UJ 3 3 3 48 6 7 2...

Страница 52: ...5 5 6 11 5 9 2 6 67 0 3RO WHF PE 3RO WHF 3ODW DOGEURQQ HUPDQ 781 9RU GHP gIIQHQ 1HW VWHFNHU LHKHQ 51 1 LVFRQQHFW 0DLQV EHIRUH RSHQLQJ 3RO WHF PE 3RO WHF 3ODW DOGEURQQ HUPDQ 21752 32 5 75 75 706 6 67...

Страница 53: ...HFNHU LHKHQ 51 1 LVFRQQHFW 0DLQV EHIRUH RSHQLQJ 6 67 0 5 6 1 21752 32 5 75 75 706 781 9RU GHP gIIQHQ 1HW VWHFNHU LHKHQ 51 1 LVFRQQHFW 0DLQV EHIRUH RSHQLQJ 6 67 0 4 1 5 6 1 3RO WHF PE 3RO WHF 3ODW DOGE...

Страница 54: ...MSA 600 U 21752 32 5 75 75 706 781 9RU GHP gIIQHQ 1HW VWHFNHU LHKHQ 51 1 LVFRQQHFW 0DLQV EHIRUH RSHQLQJ 6 67 0 5 6 1 4 1 3RO WHF PE 3RO WHF 3ODW DOGEURQQ HUPDQ 2 3 3 3 48 6 7 21 1 5 725 9 2 0RQLWRU 75...

Страница 55: ...f the attenuated signal must be within the specifications of the signal input You will find the technical specifications of the REF signal input in SECTION 6 3 2 Trigger signals 2 If required connect...

Страница 56: ...tional coupler and the A ESG 0002 Signal Generator for the MSA 600 U product variant 287 1 3 06 9 520 7 5 5217 1 32 5 2 7 2 1 2 2 6 1 75 1 8 287 8 1 6 1 PD 9 5 5 7 21 283 5 2 7 06 5217 1 URQW YLHZ 287...

Страница 57: ...on laser safety before working with laser radiation The implementation of a first functional test is described in the following If the instrument does not perform as described read through the inform...

Страница 58: ...ng Kits proceed in the same way Use the mounting plate which is included in the scope of supply of the SAW filter Refer to the separate operating instructions for the assembly of the tip tilt unit on...

Страница 59: ...ective select the 20x magnification factor from the Objective list in the scanning head control Otherwise adapt your selection as appropriate CAUTION Damage to the SAW filter caused by excessive volta...

Страница 60: ...Vibrometer Active Direction Z Reference 1 Active Direction Z Range 0 5 V Coupling DC Impedance 50 Ohm Quantity Voltage Factor 1 Filter Vibrometer Channel Filter Type No Filter Int Diff Quantity Displ...

Страница 61: ...te to the saving location and enter the file name 20 Click Save The scan starts The software immediately saves every scan point measured 21 Once the scan is complete switch to the presentation mode In...

Страница 62: ...esonator 4 Connect the BNC cable of the MEMS resonator to the SIGNAL BNC jack on the front of the front end Switch on 5 Switch on the data management system and the front end 6 To switch on the front...

Страница 63: ...ual 12 To activate the automatic image optimization click in the toolbar of the application window While focusing illumination and contrast are automatically adapted in the software 13 Focus the video...

Страница 64: ...igate to the saving location and enter the file name 20 Click Save The software immediately saves every image captured Depending on the settings selected the measurement may take a several minutes As...

Страница 65: ...it in the video image 26 Click Process All After the evaluation the diagram is automatically displayed in the analyzer in the lower area of the document window 27 In the menu bar select Analyzer Doma...

Страница 66: ...readout If the readout is not visible in the analyzer select Analyzer Readout in the menu bar 39 To start the animation of the data select Image Start Stop Animation in the menu bar toolbar 40 To disp...

Страница 67: ...3 43 3 First Steps Figure 3 31 Display of sine fit in the analyzer green graph...

Страница 68: ...measurement structure under the sensor head and align it so that you can read the Polytec lettering on it Figure 3 32 Depth measurement structure Switch on 4 Switch on the data management system and t...

Страница 69: ...live video image is displayed in the measurement window 8 Set up a measurement as described in your TMS software manual 9 Display the Properties In the menu bar select View Properties toolbar Figure...

Страница 70: ...u can move the profile line by shifting it in the required direction with the mouse 14 To read the differences between the z data along the profile line set a differential cursor as described in your...

Страница 71: ...rence objectives or the bright field objectives If you are using the Michelson Interference Objectives together with the objective positioner on the objective turret the objective positioner can be da...

Страница 72: ...Mirau interference objective Unless otherwise specified all dimensions are in mm A A IOB 005X B Interference Objective B A IOB 02X5 B Interference Objective A A MOB 010X Bright Field Objectives also v...

Страница 73: ...3 Parfocal lengths of the Polytec bright field objective and Polytec interference objective Unless otherwise specified all dimensions are in mm A A MOB 010X LD B Bright Field Objective B A IOB 004X LD...

Страница 74: ...4 4 4 Operating...

Страница 75: ...ument is limited to tasks during which the housings does not have to be opened If malfunctions cannot be solved by the measures described here or if distortions occur which are not mentioned here cont...

Страница 76: ...Windows firewall and the network adapters for the front end and optionally for the camera and the accessory The progress of the configuration is shown in the message window You can recognize the meani...

Страница 77: ...ed the signal generator set up a network bridge for the corresponding network adapters Refer to the operating instructions of the operating system If necessary change the values according to the above...

Страница 78: ...ight up If the illumination module in the sensor head does not light up check the following 1 Have you correctly connected up the instrument as described in SECTION 3 4 2 Have you turned the key switc...

Страница 79: ...e sensor head can also cause resonance vibrations To extensively attenuate mechanical vibrations position the sensor head on a solid vibration isolated base Electrical interference Under some circumst...

Страница 80: ...5 6 5 Troubleshooting...

Страница 81: ...ctrical safety IEC EN 61010 1 Safety requirements for electrical equipment for measurement control and laboratory use EMC IEC EN 61326 1 EMV requirements on the emission and immunity for electrical eq...

Страница 82: ...hnical Specifications Housing Dimensions Figure 6 1 Dimensions of the sensor head front view Unless otherwise specified all dimensions are in mm Dimensions refer to the following figures Weight approx...

Страница 83: ...6 3 6 Technical Specifications Figure 6 2 Dimensions of the sensor head side view Unless otherwise specified all dimensions are in mm...

Страница 84: ...6 4 6 Technical Specifications Figure 6 3 Dimensions of the sensor head back view Unless otherwise specified all dimensions are in mm...

Страница 85: ...5 23 1200 A MOB 005X Mitutoyo 5 34 2 0 x 1 4 9 3 180 A MOB 0010X Mitutoyo 10 34 1 0 x 0 70 4 6 45 A MOB 0020X Mitutoyo 20 20 0 51 x 0 35 2 3 12 A MOB 0050X Mitutoyo 50 13 0 20 x 0 14 1 4 2 5 A MOB 001...

Страница 86: ...B Nikon Mirau 20 4 7 0 51 x 0 35 A IOB 050X B Nikon Mirau 50 3 4 0 20 x 0 14 A IOB 100X B Nikon Mirau 100 2 0 10 x 0 070 A IOB 004X LD B Polytec Michelson 4 26 6 2 5 x 1 8 Mains voltage 100 240 VAC 1...

Страница 87: ...50 Input coupling DC Overvoltage protection 2 V DC max 3 V Pulse 10 ns Compatibility TTL Overvoltage protection max 5 5 V Input current max 1 mA Output voltage swing max 4 V at high impedance load ma...

Страница 88: ...50 VA Protection class 1 according to EN 61140 Operating temperature 5 40 C 41 104 F Storage temperature 10 70 C 14 158 F Air humidity max 80 for temperatures up to 31 C non condensing Protection rati...

Страница 89: ...61140 Operating temperature 5 40 C 41 104 F Storage temperature 10 65 C 14 149 F Air humidity max 80 non condensing Protection rating IP20 according to EN 60529 Dimensions w x h x d Without angle brac...

Страница 90: ...up to 24 dBm with limited accuracy corresponds to 250 mW at 50 MSA 600 X MSA 600 U BWX1 BWX2 Smallest measurement frequency fmin fRBW fRBW 200 1300 MHz Maximum bandwidth fmax 300 600 1300 2500 MHz Mi...

Страница 91: ...specified values are average values across the given bandwidth The resolution has been determined under laboratory conditions on a mirror with the aid of the Hanning window fmin 1 MHz 100 100 1 MHz fm...

Страница 92: ...lity conditions The data was post processed as follows Alignment 5 x 5 median filter with threshold 3 nm phase evaluation 40 nm envelope evaluation high pass filter c 0 25 mm 5 Measurement noise N 1 6...

Страница 93: ...A 1 A Declarations of Conformity Appendix A Declarations of Conformity Figure A 1 EU declaration of conformity...

Страница 94: ...A 2 A Declarations of Conformity Figure A 2 UKCA declaration of conformity...

Страница 95: ...s disposal 1 4 defects 3 3 delivery damage 3 3 DIGITAL I O cabling 3 26 figure controller 3 7 dimensions controller 6 8 front end 6 6 industrial PC 6 9 sensor head 6 2 E electrical interference 5 5 F...

Страница 96: ...turret disassembly 3 15 operating personnel 1 3 operating system industrial PC 6 9 operating temperature controller 6 8 front end 6 6 industrial PC 6 9 sensor head 6 1 optional accessories 3 1 output...

Страница 97: ...3 25 figure front end 3 6 figure sensor head 3 4 T temperature ranges sensor head 6 1 TRIG AF figure front end 3 6 TRIG IN cabling 3 31 figure front end 3 5 specifications 6 7 TRIG TMS cabling 3 26 f...

Страница 98: ...iv Index...

Страница 99: ...9 Rue Pierre Semard 92320 Ch tillon Tel 33 1 49 65 69 00 Fax 33 1 57 19 59 60 E mail info polytec fr Internet https www polytec com fr Japan JP Polytec Japan 13th floor Arena Tower 3 1 9 Shinyokohama...

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