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Declaration of conformity

pursuant to the following EU directives:

•

Electromagnetic Compatibility 2004/108/EC

•

Low Voltage 2006/95/EEC

We hereby certify, that the product specified below is in accordance with the pro-
vision of EU Electromagnetic Compatibility Directive

2004/108/EEC

and EU Low

Voltage Directive

2006/95/EEC

TC 400

Guidelines, harmonised standards and national standards in languages and
specifications which have been applied:

EN 61000-3-2 : 2006

EN 61000-3-3 : 1995

EN 61010-1 : 2001

EN 61326-1 : 2006

EN 62061 : 2005

Semi F47-0200

Signatures:

Pfeiffer Vacuum GmbH

Berliner Straße 43

35614 Asslar

Germany

(M.Bender)

Managing Director

(Dr. M. Wiemer)

Managing Director

CE/2009

Содержание TC400

Страница 1: ...Betriebsanleitung Operating Instructions PT 0203 BE E 0910 TC 400 PM C01 800 D 35614Asslar B A RS485 remote accessory PV can DC in Electronic Drive Unit TC 400 ...

Страница 2: ...emote connection 8 6 Connection RS485 11 6 1 Connections 11 6 2 Connecting Pfeiffer Vacuum display and control units or PC 11 6 3 Cross linking via the connection RS485 12 7 The Pfeiffer Vacuum parameter set 12 7 1 General 12 7 2 Parameter overview 13 7 3 Configuring the connections 17 7 4 Operation with the Pfeiffer Vacuum parameter set 19 8 Pfeiffer Vacuum Protocol for RS485 25 8 1 Telegram fram...

Страница 3: ...andards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered Pictograph defini tions Instructions in the text Work instruction here you have to do something Abbreviations used DCU Display and operating unit HPU Handheld programming unit TC Electronic drive unit for turbopump TPS Mains pack DI DO Digital input di...

Страница 4: ...he pump and the electronic drive unit from each other after dis connecting the supply voltage and the complete standstill of the pump 2 2 Proper use NOTE Duty to inform Each person involved in the installation or operation of the unit must read and observe the safety related parts of these operating instuctions The operator is obligated to make operating personnel aware of dangers originating from...

Страница 5: ...m the rating plate available 3 2 Range of application Pfeiffer Vacuum electronic drive units TC 400 must be installed and operated in the following ambient conditions Warranty void if seal is broken NOTE Warranty seal The product is sealed at the factory Damaging or removal of the seal leads to the loss of liability and warranty entitlements Do not open the product within its warranty period For p...

Страница 6: ...s of the turbopump accessory M12 socket with screw coupling for the connection of Pfeiffer Vacuum acces sories The use of a Y connector enables double assignment of one connec tion PV can M12 casing socket with screw coupling and LED The connection PV can serves to service purposes exclusively remote High Density D sub 26 pole female socket for the connection of a remote con trol RS485 M12 socket ...

Страница 7: ... can RS485 TC 400 Potential free contacts n c 24VDC Accessory B1 FE Accessory B2 UB 24 48VDC 5 FE GND n c 24VDC Accessory A1 FE Accessory A2 24 VDC out DI Motor pump DI Pumping station DI Standby DI1 DI2 DO1 DO2 DI3 AI 0 10VDC AI GND DI Error acknowledgement DI Remote priority Relay 1 Relay 1 Relay 1 Relay 2 Relay 2 Relay 2 Relay 3 Relay 3 AO1 0 10V DO Remote priority active RS485 D RS485 D GND 24...

Страница 8: ...ent 5 DI Standby Standby rotation speed open off V on 6 DI2 Heating open off V on 7 AI Rotation speed setting mode Set value in rotation speed setting mode 2 10 VDC 20 100 of the nominal rotation speed 8 DO1 Rotation speed switch point attained GND no V yes Imax 50 mA 24 V 9 DO2 GND error V no error Imax 50 mA 24 V 10 DI3 Sealing gas open off V on 11 AI Rotation speed setting mode GND Set value in...

Страница 9: ...ping station off DI Standby Pin 5 In standby mode the turbopump operates at a specified rotor speed nominal ro tation speed Factory setting and recommended operation are 66 7 of the nomi nal rotation speed V Standby activated open Standby off operation at nominal rotation speed DI2 Heating Pin 6 V Heating on open Heating off DI3 Sealing gas Pin 10 V Sealing gas valve open open Sealing gas valve cl...

Страница 10: ...x fNominal can be picked up via the analog output load R 10 kΩ Additional functions optionally current power can be assigned to the analog output via DCU HPU or PC Relay contacts Relay 1 Pin 15 Pin 16 and Pin 17 The contact between Pin 16 and Pin 15 is closed when the rotation speed switch point is underrun relay 1 is inactive The contact between Pin 16 and Pin 17 is closed when the rotation speed...

Страница 11: ...units or PC Use the connection cable supplied with the control panel or from the range of accessories The connection of respectively one external operating unit is possible on the in terface RS 485 A USB interface PC can be connected via the USB RS485 converter Fig 3 Optional connection possibilities for interface RS485 Designation Value Serial interface RS485 Baud rate 9600 Baud Data file word le...

Страница 12: ...neral All function relevant variables of a turbopump are anchored in the corresponding electronic drive unit in the form of parameters Each parameter has a three digit number and a designation Parameters can be used via Pfeiffer Vacuum display and control panels or via RS485 with the Pfeiffer Vacuum protocol USB RS485 converter TC 400 TC 600 750 M12 RJ45 TC TC D D USB RS485 converter RS 485 USB PC...

Страница 13: ...e of formatting of the parameter for the use within the Pfeiffer Vacuum protocoll Access method R read access W write access Unit Physical unit of the described characteristic min max permissible limits for value input default factory settings partially specific of the pump type Parameter can be stored non volatile in the electronic drive unit and may be reused after resetting of the mains supply ...

Страница 14: ...0 15 0 x 025 OpMode BKP Operation mode backing pump 0 Continous operating 1 Intermittend mode 2 Delayed switch on 7 RW 0 2 0 x 026 SpdSetMode Rotation speed setting mode 0 off 1 on 7 RW 0 1 0 x 027 GasMode Gas mode 0 Heavy Gase 1 Light Gase 2 Helium 7 RW 0 1 0 x 030 VentMode Venting mode 0 Delayed venting 1 No venting 2 Direct venting 7 RW 0 2 0 x 035 Cfg Acc A1 Configuration accessory connection ...

Страница 15: ...Pumpe decelerates 9 always 0 10 always 1 11 Remote priority active 12 Heating 13 Backing pump 14 Sealing gas 15 Pumping station 7 RW 0 15 0 x 046 Cfg Rel R2 Configuration Relay 2 0 Rot speed switch point attained 1 No error 2 Error 3 Warning 4 Error and or warning 5 Set speed attained 6 Pump on 7 Pump accelerates 8 Pumpe decelerates 9 always 0 10 always 1 11 Remote priority active 12 Heating 13 Ba...

Страница 16: ...etting P 062 063 7 RW 0 5 3 x Display Designation Functions Data type Access method Unit min max default Display Designation Functions Data type Access method Unit min max default 300 RemotePrio Remote priority 0 no 1 yes 0 R 0 1 302 SpdSwPtAtt Rotation speed switch point attained 0 no 1 yes 0 R 0 1 303 Error code Error code 4 R 304 OvTempElec Excess temperature electronic drive unit 0 no 1 yes 0 ...

Страница 17: ...ualSpd Actual rotation speed rpm 1 R rpm 0 999999 399 NominalSpd Nominal rotation speed rpm 1 R rpm 0 999999 Display Designation Functions Data type Access method Unit min max default Display Designation Functions Data type Access method Unit min max default 700 RUTimeSVal Set value run up time 1 RW min 1 120 8 x 701 SpdSwPt1 Rotation speed switch point 1 1 RW 50 97 80 x 707 SpdSVal Set value in r...

Страница 18: ...f error message is active 3 Warning Signal if warning message is active 4 Error and or warning Signal if error and or warning is active 5 Set rotation speed attained Signal if set rotation speed is attained 6 Pump on Signal if Pumping station and Motor is on No Error 7 Pump accelerates Pumping station is on Actual rotation speed Set rota tion speed 8 Pumpe decelerates Pumping station is on Actual ...

Страница 19: ...he maximum allowable gas load without danger of damage The max imum power consumption depends on the gas type Three characteristics are available in order to completely exhaust the pump s capacity for each gas type Gas mode 0 for gases with the molecular mass 39 e g Ar Gas mode 1 for gases with the molecular mass 39 Gas mode 2 for helium Power characteristics according to the technical data of the...

Страница 20: ...ed value in If adjusting the set value power consumption below 100 the run up time pro longs To avoid error messages the parameter P 700 RUTimeSVal should be ad justed accordingly Run up time The run up of the turbopump is time monitored ex factory There are various caus es of prolonged run up times e g Too high gas loads Leakage in the system The set value run up time is too low Eliminate any ext...

Страница 21: ...signal generator When the pumping station is switched off signal output and status query are based on the rotation speed switch point 2 The signal output is governed by the hysteresis between the two switch points Fig 6 Example for the configuration rotation speed switch point 1 2 active P 701 P 719 Fig 7 Example for the configuration rotation speed switch points 1 2 active P 701 P 719 Process f t...

Страница 22: ... value of the nominal rotation speed must be confirmed This pro cedure is part of a redundant safety system for avoiding excess rotation speeds Adjust the parameter P 777 according to the pump type Once the nominal rotation speed is attained the pump will run idle unless addition al gas loads are entered Depending on process or application requirements the nominal rotation speed can be reduced in ...

Страница 23: ...tion speed of the turbopump and is fixed in the electronic drive unit at 6 Hz The switch on delay signal can also be used for switching a fore vacuum safety valve Switching on the pumping station The function pumping station comprises turbopump operation with control of all connected accessories e g backing pump Switch on the supply voltage with switch S1 on the power supply Parameter P 023 1 Para...

Страница 24: ... speed is underrun In this case the venting period depends on the residual energy delivered by the moving rotor When power is restored the venting process is interrupted No venting No venting is performed during this operation mode Parameter P 030 1 Direct venting Start and venting time are not configurable Venting starts with a delay of 6 s after pumping station off When the function pumping stat...

Страница 25: ... c1 c0 C R a2 a0 Unit address for slave Individual address of the unit 001 255 Group address 9xx for all identical units no response global address 000 for all units on the bus no response Action see p 25 chap 8 2 n2 n0 Pfeiffer Vacuum parameter numbers l1 l0 Data length dn d0 dn d0 Data in data type concerned see p 26 chap 8 3 c2 c0 Checksum sum of ASCII values of cells a2 to d0 modulo 256 CR car...

Страница 26: ...3 0 4 2 1 0 0 1 0 0 6 1 1 1 1 1 1 0 2 0 C R ASCII 48 52 50 49 48 48 49 48 48 54 49 49 49 49 49 49 48 50 48 13 Data type Description Size l1 l0 Example 0 False true 06 000000 111111 1 Positive integer number 06 000000 to 999999 2 Positive fixed comma number 06 001571 equal to 15 71 4 Symbol chain 06 TC_400 7 Positive integer number 03 000 to 999 11 Symbol chain 16 BrezelBier Wurst WARNING Automatic...

Страница 27: ...tion speed f 0 only Err021 Electronic drive unit does not recog nizes pump Contact Pfeiffer Vacuum Service Reset at rotation speed f 0 only Err043 Internal configuration fault Contact Pfeiffer Vacuum Service Err044 Excess temperature electronic Cooling deficient Optimize cooling Check the ambient conditions Err045 Excess temperature motor Cooling deficient Optimize cooling Check the ambient condit...

Страница 28: ...on the pumping station via E74 Switch off P 010 Wrn045 High temperature motor Cooling deficient Optimize cooling Check the ambient conditions Wrn076 High temperature electronic Cooling deficient Optimize cooling Check the ambient conditions Wrn097 Pump information invalid Pump data faulty Reset for default values Wrn098 Pump information incomplete Connection to the pump is faulty Contact Pfeiffer ...

Страница 29: ...agnetic Compatibility Directive 2004 108 EEC and EU Low Voltage Directive 2006 95 EEC TC 400 Guidelines harmonised standards and national standards in languages and specifications which have been applied EN 61000 3 2 2006 EN 61000 3 3 1995 EN 61010 1 2001 EN 61326 1 2006 EN 62061 2005 Semi F47 0200 Signatures Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany M Bender Managing Director D...

Страница 30: ...9 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service ...

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