22
The Pfeiffer Vacuum parameter set
Rotation speed set-
ting mode
The rotation speed setting mode reduces the rotation speed and hence the
throughput of the turbopump. The pumping speed of the turbopump changes pro-
portional to rotation speed. Standby mode is ineffective during rotation speed set-
ting mode. The set rotation speed is adjusted by the set value in rotation speed set-
ting mode
[P:707]
. The rotation speed switch point varies with the set rotation
speed. Underrunning or overrunning the set value in rotation speed setting mode
activates and deactivates the status signal
[P:306] SetSpdAtt
respectively.
Adjust the parameter
[P:707]
to the desired value in %.
Parameter
[P:026]
= 1
Read the parameters
[P:308]/[P:397]
.
Standby
Pfeiffer Vacuum recommends standby mode for the turbopump during process
and production stops. When standby mode is active, the electronic drive unit re-
duces the rotation speed of the turbopump. The factory setting for the set value in
standby mode is 66.7 % of the nominal rotation speed. Underrunning or overrun-
ning the set speed in standby mode activates or deactivates the status signal
[P:306] SetSpdAtt
.
Adjust the parameter
[P:717]
to the desired value in %.
Parameter
[P:002]
= 1
Read the parameters
[P:308]/[P:397]
.
Rotation speed set
value
The typical nominal rotation speed of a turbopump is factory-set in the electronic
drive unit. If the electronic drive unit is replaced or a different pump type is used,
the reference set value of the nominal rotation speed must be confirmed. This pro-
cedure is part of a redundant safety system for avoiding excess rotation speeds.
Adjust the parameter
[P:777]
according to the pump type.
Once the nominal rotation speed is attained, the pump will run idle unless addition-
al gas loads are entered. Depending on process or application requirements, the
nominal rotation speed can be reduced in rotation speed setting mode or standby
mode.
Operation mode
backing pump
Operation of a connected backing pump via the electronic drive unit depends on
the backing pump type.
Adjust the parameter
[P:025]
to the desired value.
Continous operation
With "pumping station on", the electronic drive unit sends a signal to the config-
ured accessory connection to switch on the backing pump. This signal can also be
used for controlling a fore-vacuum safety valve.
Intermittend operation (diaphragm pumps only)
Intermittend operation can extend the life expectancy of the membrane of a con-
nected diaphragm pump. Either a diaphragm pump with built-in semiconductor re-
lay or an interconnected relay box with semiconductor relay is required for inter-
mittend operation. The backing pump is switched on and off in dependence of the
turbopump's power consumption. A relation to the supplied fore-vacuum pressure
is derived from the power consumption. The switching off and switching on thresh-
HiPace
Nominal rotation speed confirmation [P:777]
300
1000 Hz
400 / 700
820 Hz
Operation mode [P:025]
recommended backing pump
"0" continous operation
all kinds of backing pumps
"1" Intermittend operation
diaphragm pumps only
"2" Delayed switching on
all kinds of backing pumps
