Pfeiffer Vacuum TMH 1600M Скачать руководство пользователя страница 1

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Operating Instructions

Turbomolecular Drag Pumps.
With Magnetic Bearings

TMH 1600M / TMU 1600M

M 800 344 BE/C (0011)

Содержание TMH 1600M

Страница 1: ...Operating Instructions Turbomolecular Drag Pumps With Magnetic Bearings TMH 1600M TMU 1600M PM 800 344 BE C 0011...

Страница 2: ...cting The Casing Heating Unit 8 3 8 Connecting The Magnetic Bearing Controller 8 3 9 Connecting The Temperature Management System TMS 9 4 Operations 9 4 1 Before Switching ON 9 4 2 Switching ON 9 4 3...

Страница 3: ...opump When returning the turbopump observe the shipping instructions Use at least 6 bracket screws to connect the high vacuum flange The turbopump must be anchored in accordance with the installation...

Страница 4: ...g and sensors are accessible cen trally via a separate connection box When the TMS is in operation the additional casing heating unit on the turbomolecular pump is not possible 2 Understanding The TMH...

Страница 5: ...e volume flow rate of the pump by approximately 15 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged directly to the vacuum chamber or via a...

Страница 6: ...g pump Please see the operating instructions for the Magnetic Bearing Controller TCM 1601 PM 800 478 BN 3 4 Connecting The Cooling Unit The Turbopumps TMH TMU 1600M are water cooled as stan dard The p...

Страница 7: ...M turbopump see the operating instructions for the TCM 1601 PM 800 478 BN Alternatively either the casing heating unit or the TMS can be connected to the control line Simultaneous operations of the fu...

Страница 8: ...ted during installation When baking out do not touch the heating sleeve pump casing and vacuum chamber Screw the heating sleeve tightly onto the casing with the securing screws and fit protection agai...

Страница 9: ...ing hazardous gases and observe the safety precautions of the gas manu facturer 4 3 Heating only for pumps with casing heating unit The heating duration is dependent on the degree of contami nation an...

Страница 10: ...somewhat lower frequency 4 4 Operations With The TMS If the pump is equipped with the temperature management system TMS TMH TMU 1600M C T see rating plate heating is possible in the area of the pressu...

Страница 11: ...01 Close the fore vacuum safety valve if available Where Pumping Station Control Unit TCS 180 is involved the valve closes automatically With water cooling Shut off the water supply Shut off the suppl...

Страница 12: ...e vacuum pressure too high Reduce fore vacuum pressure ambient temperature too high Reduce ambient temperature Pump doesn t attain final pressure Pump dirty Bake out pump If seriously contaminated Req...

Страница 13: ...and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated mi...

Страница 14: ...otation speed max N2 Cooling type water mbar l s 9 15 Ar Cooling type water mbarl s 4 5 6 Gas throughput with TMS operation at nominal rotation speed max1 N2 Cooling type water mbarl s 7 12 Ar Cooling...

Страница 15: ...mensions M8 8x 190 162 2 0 1 2 8 4 5 1 5 7 5 3 5 5 189 9 37 45 4 5 2 8 5 6 5 2 0 331 282 272 228 6 159 295 250 21 257 384 5 397 5 130 DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F DN 40 ISO KF DN...

Страница 16: ...on 2 1 16 USIT ring 2 P 3529 133 A 54 Venting Valve TVF 005 1 G 1 8 PM Z01 135 see Section 2 1 97 Temperature sensor complete 1 PM 073 593 X see Section 3 9 Spare parts for the air cooling unit 36 Fan...

Страница 17: ...bration compensator TMH DN 200 ISO K PM 006 668 X DN 250 ISO K PM 006 670 X TMU DN 200 CF F PM 006 669 X DN 250 CF F PM 006 671 X Fore Vacuum Safety Valve TVV 001 115 V PM Z01 206 PM 800 263 BN 230 V...

Страница 18: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 19: ...certify that the product specified below is intended for installation in a machine which is for bidden to be put into operation until such time as it has been determined that the end product is in ac...

Страница 20: ...elefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone...