Pfeiffer Vacuum Prisma 80 QMS 200, Руководство по эксплуатации

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BG 805 204 BE / B (0203) QMS200.oi
2 Technical Data
Safety
QME/QMA EN 61010-1:1993
IEC1010-1:1990 +A1:1992
Protection class I
SP 200 DIN EN 60950
IEC 950, UL 1950
CSA 22.2 No. 234
EMC
Immunity
Emission EN 50082-2
EN 50081-1
Operation Indoors only
Altitude max. 2000 m NN
Degree of protection IP 30
Pollution degree 2
Temperatures
Storage/transport –25 … +70 °C
Operation QME
SP 0 … +40 °C
0 … +40 °C
Relative humidity Max. 80% up to 31 °C,
Linearly decreasing to 50% at 40 °C
Mass range 1 … 80 u
Detector type Faraday
Detection limit <1 × 10
-12
mbar
Unit resolution
(valley, full mass range)
at 10% peak height
adjustable to
<10%
0.5 … 2.5 u
Sensitivity to argon >1 × 10
-3
A/mbar
Contribution to
neighboring mass 40/41
<10 ppm
Operating pressure
≤
1 × 10
-4
mbar
≤
1 × 10
-3
mbar at an emission <200 µ A
Reproducibility of peak ratio
(constant conditions over 8 h,
N
2
and Ar from air)
±0.5%
QMA operating temperature 0 … +150 °C
Bakeout temperature
(QME removed)
≤
200 °C
HS ion source Open design, radial symmetry,
2 filaments (yttrium oxide), degassing by
electron bombardment (10 mA, 300 V)
Mounting orientation
Any (
→
" 12)
Weight 3 kg
Connection flange DN 40 CF
2.1 Standards Complied
With
2.2 Ambient Conditions
2.3 Prisma™ 80