Pfeiffer Vacuum Prisma 80 QMS 200, Руководство по эксплуатации

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BG 805 204 BE / B (0203) QMS200.oi
27
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If "Emission Error" is displayed several times:
+
•
Set the "Cathode" value
to 100 V.
•
Set the "Emi Current"
value to 0.1 mA.
•
Start the emission.
•
Increase the "Emi
Current" value in small
increments to 2 mA.
$
Wait until the pressure in the vacuum system is <1 × 10
-7
mbar.
%
If possible, admit air as test gas until the pressure in the vacuum system is
1
× 10
-6
mbar.
After each of the following steps, transmit the parameter modifications to the
Prisma™ 80 by clicking
.
&
Optimize the "Cathode" value to the maximum peak height.
Low "Cathode" values can lead to a deactivation of the emission.
In such a case, increase the value and reactivate the emission.
'
Intermittently optimize "Extraction" and "Focus" to the maximum peak
height.
(
Beginning at 8 V, decrease the "Field Axis" value until the resolution and
peak shape are satisfactory.
)
Change the "RF polarity"
and select the setting which
yields the better peak shape
and resolution
The optimization of the
ion source is now con-
cluded.