Pfeiffer Vacuum Prisma 80 QMS 200, Руководство по эксплуатации

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BG 805 204 BE / B (0203) QMS200.oi
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6 Accessories and Spare Parts
Item Designation E/Z Ordering number
1 Hexagon socket screw key M5 (size 4) A N 5701 009 BC
2 Hexagon socket screw M3 × 8 A B 3079 191 X
3 Lock washer M3 A B 3547 137 X
4 Filter mat S,A B 5099 154 FE
5 D-Sub connector, complete 15 pin A BG 442 639 -T
7 Socket wrench size 3 / 3.2 A BK 370 096
8 Filament assembly, complete
iridium, yttriated S BN 846 138 -T
9 Misc. ion source small parts A
10 Ion source HS-Ir S BN 846 137 -T
11 Hexagon screw M6 × 35 A N 3015 349 X
12 Hexagon nut M6 A N 3415 043 X4
13 Washer M6 A N 3502 418 X
14 Cu seal DN 40 CF A BP 414 606 -T
15 QMA mounting tool A BG 444 456
SP 200 S B 5181 408 KY
A = Supplied accessory
S = Spare part
15
7
9, 10
11, 12, 13
14
tune
control
LAN
ready
24V
RS-232-C
VAC UUM
5
2, 3
4
1
8