Pfeiffer Vacuum Prisma 80 QMS 200 Скачать руководство пользователя страница 2

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BG 805 204 BE / B (0203) QMS200.oi

In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplates. For convenient reference copy the information for all items of
your system into the space provided below.

Typ:

No:

F-No:

Pfeiffer Vacuum, D-35614 Asslar

Typ:

No:

F-No:

Pfeiffer Vacuum

D-35614 Asslar

Pfeiffer Vacuum
D-35614 Asslar

TalkStar

Version:

x.xx

No:

450-490

VACUUM

This document applies to products with part numbers

PTM04100

comprising

PTM25250

(Analyzer)

PTM28515

(Electronics)

B 5181 408 KY

(Power supply)

The part numbers can be taken from the product nameplates.

This document is based on firmware number

BG 509 725 –H

(or higher)

450-465

(or higher)

If the product does not work as described in this document, please check that it is
equipped with the above firmware version (

→

[1]).

We reserve the right to make technical changes without prior notice.

The Prisma mass spectrometer is designed for partial pressure analysis at pres-
sures <10

-4

mbar. Typical applications are measurement, monitoring and process

control functions in vacuum systems.

Prisma™

INFICON AG

Windows™

Microsoft Corporation

Product Identification

QME 200

QMA 200

Software TalkStar

Validity

Intended Use

Trademarks

Содержание Prisma 80 QMS 200

Страница 1: ...Operating Instructions Incl Declaration of Conformity BG 805 204 BE B 0203 1 Prisma 80 Quadrupole Mass Spectrometer QMS 200 ...

Страница 2: ...8515 Electronics B 5181 408 KY Power supply The part numbers can be taken from the product nameplates This document is based on firmware number BG 509 725 H or higher 450 465 or higher If the product does not work as described in this document please check that it is equipped with the above firmware version 1 We reserve the right to make technical changes without prior notice The Prisma mass spect...

Страница 3: ...SP 200 Power Supply to the Prisma 14 3 3 3 Connecting the PC 15 3 4 Installing the Software 15 4 Operation 16 4 1 First Time Operation 16 4 2 Software Operation 17 4 3 Settings 21 4 3 1 Tuning the RF Generator 21 4 3 2 Optimizing the Ion Source Sensitivity 21 5 Maintenance 22 5 1 QMA 22 5 1 1 Changing the Filament 22 5 2 QME 24 5 2 1 Cleaning the Housing 24 5 2 2 Cleaning the Dust Filter 24 5 2 3 ...

Страница 4: ...can lead to malfunctions or minor equipment damage The result is O K The result is not as expected The lamp display is lit The lamp display flashes The lamp display is dark Labeling Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end user of the product 1 1 ...

Страница 5: ...cessary precau tions when handling contaminated parts Communicate the safety instructions to all other users Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use the product with...

Страница 6: ...tor type Faraday Detection limit 1 10 12 mbar Unit resolution valley full mass range at 10 peak height adjustable to 10 0 5 2 5 u Sensitivity to argon 1 10 3 A mbar Contribution to neighboring mass 40 41 10 ppm Operating pressure 1 10 4 mbar 1 10 3 mbar at an emission 200 µA Reproducibility of peak ratio constant conditions over 8 h N2 and Ar from air 0 5 QMA operating temperature 0 150 C Bakeout ...

Страница 7: ...A f s fix and autorange Signal filter FIR filter Power supply 24 VDC 2 0 A Interfaces RS 232 C LAN 300 19200 bit s Arcnet fiberoptic 1000 m 2 5 Mbit s Inputs TalkStar does not support the inputs Outputs 2 relays Normally open contact 24 VAC 30 VDC 1 A TalkStar does not support any additional outputs Weight 2 5 kg Voltage Frequency Power requirements 90 260 VAC 47 63 Hz 1 5 A 115 V 60 W 0 8 A 230 V...

Страница 8: ... end should remain open or be grounded so that no damaging compensating currents can occur TalkStar does not support the LAN interface Pin Assignment 1 2 3 4 5 6 7 8 9 Case n c Received Data RXD Transmitted Data TXD Data Terminal Ready DTR Signal Ground SGND n c Request To Send RTS Clear To Send CTS n c Shield optional signal tune control LAN ready 24V RS 232 C VACUUM D Sub 9 pin male 6 1 9 5 WARN...

Страница 9: ...control LAN ready 24V RS 232 C VACUUM 3 pin female 1 2 3 DANGER This connection carries hazardous voltages Pin Assignment 1 2 3 4 5 6 7 8 9 10 11 12 13 Reserve Extr Focus HV Filament 1 Filament 2 Anode RF GND GND RF Filament Common EP 10 11 12 1 2 3 13 4 5 6 7 8 9 13 pin male 24 VDC QMA ...

Страница 10: ...ternal hazardous voltages e g due to contact sparkover plasma ion or electron beams must not be allowed to be transferred to the electrodes of the QMA 200 If such danger sources exist in the vacuum chamber additional safety measures e g better placement shielding grounding etc must be taken that reliably prevent such influences Also lower external voltages acting on the QMA may damage the electron...

Страница 11: ...nges or tubes with an internal diameter 37 mm otherwise short circuits to the wall can occur Note the required installation depth Do not kink the cables 3000 56 80 165 4 mm hexagon socket screw key 10 mm open end wrench 2 pieces Screwdriver blade width 3 4 mm 3 2 1 Space Requirements mm QMA 200 QME 200 SP 200 3 2 2 Required Tools ...

Страница 12: ...ed horizontally with the guiding groove downward This results in optimum protection of the QME against falling objects and allows easy installation and excellent access to the front panel Caution Caution dirt sensitive area Touching the product or parts thereof with one s bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Trans...

Страница 13: ...correct watch the grounding tab of the QME and the guide groove of the QMA Do not apply excessive force Firmly tighten the two hexagon socket screws These screws secure the QME mechanically and ensure electrical safety by providing ground contact WARNING All electrical connections must have cable strain relief Route the cables sepa rately from EMI sources WARNING For reasons of electromagnetic com...

Страница 14: ...itching functions peak height monitoring or be used as software controlled outputs e g for valve actuation Signal designation REL_1A REL_1B DO 0 REL_2A REL_2B DO 1 Logic assignment DO true Contact closed WARNING Do not yet plug in the SP 200 power plug 16 Set up the power supply in such a way that it cannot get wet e g by spilled water on the floor air circulation is not impeded and the ambient co...

Страница 15: ...ce TalkStar is a 32 bit software and requires Windows 95 98 ME NT or 2000 Install the enclosed TalkStar software as follows Turn on the PC and start the operating system Follow the instructions of the installation program After the installation has been successfully completed the program can be started from the Start menu under Programs TalkStar or via the Desktop by clicking the icon 3 3 3 Connec...

Страница 16: ...plugged into a socket with a protective ground The protection must not be nullified by an extension cable without protective ground WARNING Check the pressure in the QMA before you insert the power plug of the SP 200 The pressure must be 10 4 mbar WARNING Do always make sure that the limits values specified in the Technical Data 6 are not exceeded and that the ambient conditions are met Insert the...

Страница 17: ...ftware in the Start menu under Programs TalkStar or via the Desktop by clicking the icon Talkstar allow access to many settings and functions via a context menus Context menus are activated by clicking the corresponding item with the right mouse button Once you have started Talkstar you can access all available recipes via the Recipes entry in the tree When the recipes are started with a double cl...

Страница 18: ...18 BG 805 204 BE B 0203 QMS200 oi The Y axis can be switched from Ion Current to Partial Pressure and vice versa ...

Страница 19: ...ccess a parameter by double clicking the corresponding curve Definition of mass dependent calibration factors Parameterizing in the measurement data display The properties of the Prisma are accessed via the Prisma 80 context menu You can access the mass dependent calibration factors on the Calibration Factors page ...

Страница 20: ...t recording choose the icon on the tool bar Use a file name in the syntax supported by Windows The extension tdf TalkStar Data File is automatically added To finish recording click the icon on the tool bar again To access the recorded data select the corresponding file under Saved Data To print individual diagrams proceed as follows Start a recipe or load data from the memory In the window that is...

Страница 21: ...hange of the analyzer or electronics when a corresponding error message is displayed An annual tuning check is also recommended When the Prisma is used for the first time the factory parameter settings of the ion source are applied 26 TalkStar reads these parameter values when it starts communication with the Prisma If the analyzer and electronics have not been delivered together as one unit the R...

Страница 22: ...free gloves and use clean tools when working in this area Mounting tool Detach all electrical connec tions to the QME Separate the QME from the analyzer by performing the steps in Chapter 3 2 4 in re verse order Detach the analyzer from the vacuum chamber Place the analyzer into the supplied mounting tool Grip the U section with flat nose pliers and loosen the screw by 2 turns Remove the nut Caref...

Страница 23: ...et Mount the replacement filament on the ion source Slide the filament as sembly toward the setscrews so that the plate of the filament assembly is parallel to the plate of the ion source Caution Do not twist the filament assembly otherwise the ionization chamber will be deformed Mount the 3 nuts on the setscrews and tighten them with the special socket wrench Grip the U sections with flat nose pl...

Страница 24: ...e unit is installed in such a way that the contamination cannot be easily seen Replace the filter mat if it is decomposed or if it can no longer be cleaned as described above Disconnect the 24 V power supply from the AC power source and detach all electrical connections to the QME Separate the QME from the analyzer by performing the steps described in Chapter 3 2 4 in reverse order Set the QME on ...

Страница 25: ...uired Do neither fully tighten nor unscrew it completely tune slightly detuned Turn the tuning screw a clockwise until the lamp is on b counterclockwise until the lamp is off and continue turning until the lamp is on again c clockwise by one full turn The RF generator is now tuned tune tune severely detuned Turn the tuning screw a clockwise to the stop b counterclockwise until the lamp is off and ...

Страница 26: ...Start TalkStar In the tree select Recipes and start Tune Ionsource with a double click In the context menu of Devices click Properties with the right mouse button In the window that is subsequently displayed choose the Ionsource page 5 2 5 Optimizing the Ion Source Sensitivity A scan in the 26 30 amu mass range is displayed This mass scan can be used for optimizing the sensi tivity and mass separa...

Страница 27: ...f the following steps transmit the parameter modifications to the Prisma 80 by clicking Optimize the Cathode value to the maximum peak height Low Cathode values can lead to a deactivation of the emission In such a case increase the value and reactivate the emission Intermittently optimize Extraction and Focus to the maximum peak height Beginning at 8 V decrease the Field Axis value until the resol...

Страница 28: ...e QME or QMA needs to be replaced the procedure is the same as for the initial installation The individual steps are Installing the QME 13 Connecting the QME 13 Tuning the RF generator 25 Optimizing the ion source 26 5 2 6 Replacing the QME ...

Страница 29: ... pin A BG 442 639 T 7 Socket wrench size 3 3 2 A BK 370 096 8 Filament assembly complete iridium yttriated S BN 846 138 T 9 Misc ion source small parts A 10 Ion source HS Ir S BN 846 137 T 11 Hexagon screw M6 35 A N 3015 349 X 12 Hexagon nut M6 A N 3415 043 X4 13 Washer M6 A N 3502 418 X 14 Cu seal DN 40 CF A BP 414 606 T 15 QMA mounting tool A BG 444 456 SP 200 S B 5181 408 KY A Supplied accessor...

Страница 30: ...ed parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts N WARNING Caution substances detrimental to the environment Products or parts thereof mechanical and electric components oper ating fluids etc can be detri...

Страница 31: ...pendix 1 www pfeiffer vacuum de Communication Protocol Prisma 80 Quadrupole Mass Spectrometer BG 805 206 BE Pfeiffer Vacuum GmbH D 35614 Asslar Deutschland 2 Brochure Partial Pressure Measurement in Vacuum Technology vznb01e1 A Literature ...

Страница 32: ...ipment and components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay This declaration may only be completed in block letters and signed by authorized and qualified staff Copies Original for addressee 1 copy for accompanying documents 1 copy for file of sender Harmful substances gases and or by products Please list all substances...

Страница 33: ...magnetic compatibility 89 336 EEC Prisma 80 Quadrupole Mass Spectrometer QMS 200 PTM04100 Harmonized and international national standards and specifications EN 61010 Safety requirements for electrical equipment for measurement control and laboratory use EN 50081 1 Electromagnetic compatibility generic emission standard EN 50082 2 Electromagnetic compatibility generic immunity standard Pfeiffer Vac...

Страница 34: ...34 BG 805 204 BE B 0203 QMS200 oi Notes ...

Страница 35: ...BG 805 204 BE B 0203 QMS200 oi 35 Notes ...

Страница 36: ...Berliner Strasse 43 D 35614 Asslar Deutschland Tel 49 0 6441 802 0 Fax 49 0 6441 802 202 Original German BG 805 204 BD B 0203 info pfeiffer vacuum de bg805204be b www pfeiffer vacuum de ...

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