Pfeiffer Vacuum Prisma 80 QMS 200, Руководство по эксплуатации

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BG 805 204 BE / B (0203) QMS200.oi
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Contents
Product Identification 2
Validity 2
Intended Use 2
Trademarks 2
1 Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 5
1.4 Liability and Warranty 5
2 Technical Data 6
2.1 Standards Complied With 6
2.2 Ambient Conditions 6
2.3 Prisma™ 80 6
2.4 QME 200 7
2.5 SP 200 7
2.6 Pin Assignment 8
3 Installation 10
3.1 Unpacking 10
3.2 Installation 10
3.2.1 Space Requirements [mm] 11
3.2.2 Required Tools 11
3.2.3 Installing the QMA 12
3.2.4 Installing the QME 13
3.3 Electrical Connections 13
3.3.1 Connecting the QME 13
3.3.2 Connecting the SP 200 Power Supply to the Prisma 14
3.3.3 Connecting the PC 15
3.4 Installing the Software 15
4 Operation 16
4.1 First Time Operation 16
4.2 Software Operation 17
4.3 Settings 21
4.3.1 Tuning the RF Generator 21
4.3.2 Optimizing the Ion Source Sensitivity 21
5 Maintenance 22
5.1 QMA 22
5.1.1 Changing the Filament 22
5.2 QME 24
5.2.1 Cleaning the Housing 24
5.2.2 Cleaning the Dust Filter 24
5.2.3 Replacing the Filter Mat 24
5.2.4 Tuning the RF Generator 25
5.2.5 Optimizing the Ion Source Sensitivity 26
5.2.6 Replacing the QME 28
6 Accessories and Spare Parts 29
7 Returning the Product 30
8 Disposal 30
Appendix 31
A: Literature 31
Declaration of Contamination 32
Declaration of Conformity 33
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