Pfeiffer Vacuum HILOBE 1002, Руководство по эксплуатации

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Procedure with clean processes
You can switch off the vacuum pump in every pressure range, between atmospheric pressure and ulti-
mate pressure directly after the process end.
1. Close the shut-off valve in the vacuum line and disconnect the vacuum pump from the process.
2. Switch the running vacuum pump off by pressing the
button once.
3. Vent the vacuum pump via the intake side to avoid the gas backstreaming.
4. Switch off the process- and pump-specific media supply (e.g. the sealing gas supply).
Alternative: Switch off via the Pfeiffer Vacuum parameter
► Set the parameter [P:010] to the value "0".
Procedure with contaminated medium
1. Close the shut-off valve in the vacuum line and disconnect the vacuum pump from the process.
2. At the end of the process, continue to operate the vacuum pump with flushing gas supply at the
vacuum flange for another approx. 20 to 40 minutes.
– Use dry air or nitrogen.
3. Then stop the flushing gas supply.
4. Switch off the vacuum pump.
5. Vent the vacuum pump via the intake side to avoid the gas backstreaming.
6. Switch off the process- and pump-specific media supply (e.g. the sealing gas supply).
Operation
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