Pfeiffer Vacuum HICUBE PRO, Руководство по эксплуатации

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Operation
6.5 Operation with fore-vacuum valve
The fore-vacuum safety valve (optional accessory) is located in the fore-vacuum line be-
tween the turbopump and the backing pump. It protects the process vacuum and the tur-
bopump from inadvertent venting after switching-off the backing pump or in case of pow-
er failure. In order to prevent gas backflow while switching on the fore-vacuum safety
valve opens time delayed to the other pumping station components. The valve is current-
less closed.
●
[P:010]
Pumping station "On" = Fore-vacuum safety valve opens after 8 seonds.
●
[P:010]
Pumping station "Off" = Fore-vacuum safety valve is closed.
6.6 Switching off and venting
6.6.1 Switching off
After the turbopump is switched off, it must be vented to avoid contamination due to par-
ticles streaming back from the fore-vacuum area.
 Switch off the pumping station via the "ON/OFF" button on the DCU.
 Venting.
 Switch off the pumping station at the master switch.
 For water cooling: Shut off the water supply.
6.6.2 Venting
Venting with Pfeiffer Vacuum Venting Valve
 Enable venting via the functions of the electronic drive unit.

Settings are possible via interface RS-485 by using DCU, HPU or PC.
1)
When mains power is restored the venting procedure is aborted.
Basic information for the rapid venting
Venting of the vacuum chamber in two steps. Ask for details on individual solutions from
Pfeiffer Vacuum.

Vent for 20 seconds at a rate of pressure rise of max. 15 hPa/s.
– The valve cross section for the venting rate of 15 hPa/s must be adapted to the size
of the vacuum chamber.
– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.
 Then vent with an additional venting valve of any desired size.
WARNING
Danger of electric shock
The pumping station is only free of voltages when the mains plug has been disconnect-
ed.

Switch off the master switch and disconnect the mains plug before all work.
 Secure against unintentional restarting.
Venting rotation speed Switch off the pumping station Mains power failure
1)
50 % of the nominal rotation
speed Venting valve opens for 3600 s (1 h,
works setting) Venting valve opens for
3600 s (1 h, works setting)