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Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions accord-
ing to the following

EC directives

●

Machinery 2006/42/EC (Annex II, no. 1 A)

●

Electromagnetic Compatibility 2014/30/EU

The agent responsible for compiling the technical documentation is Mr. Helmut Bern-
hardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

HiCube

HiCube Pro

Harmonised standards and national standards and specifications which have been ap-
plied:

DIN EN ISO 12100 : 2011-03

DIN EN 61326-1 : 2013

DIN EN 1012-2 : 1996

DIN EN 62061 : 2013

DIN EN 61010-1 : 2010

Semi F47-0200

DIN EN 61000-3-2 : 2010
DIN EN 61000-3-3 : 2009

Signature:

Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany

(Dr. Ulrich von Hülsen)
Managing Director

2016-02-26

Содержание HICUBE PRO

Страница 1: ...PT 0265 BEN E 1602 OPERATING INSTRUCTIONS EN Translation of the original instructions HICUBE PRO Turbo pumping station ...

Страница 2: ...2 2 Cooling 12 4 3 Range of application 12 5 Installation 13 5 1 Preparatory work 13 5 2 Set up 13 5 2 1 Earthing 13 5 2 2 Anchoring the pumping station 14 5 3 Connecting the high vacuum side 14 5 4 Connecting the exhaust side 15 5 5 Connecting an external turbopump 15 5 5 1 Connecting the high vacuum side 15 5 5 2 Connecting the fore vacuum side 15 5 6 Transportation lock 16 5 7 Filling up the op...

Страница 3: ...utting down for longer periods 27 8 2 Re starting 27 8 3 Disposal 27 9 Malfunctions 28 9 1 Rectifying malfunctions 28 10 Service 29 11 Spare parts HiCube Pro 30 12 Accessories 30 13 Technical data 31 13 1 General 31 13 2 HiCube 80 Pro 32 13 2 1 DN 40 ISO KF 32 13 2 2 DN 63 ISO K 32 13 2 3 DN 63 CF F 32 13 3 HiCube 300 Pro 33 13 3 1 DN 100 ISO K 33 13 3 2 DN 100 CF F 33 13 4 HiCube 400 Pro 34 13 4 ...

Страница 4: ...er Vacuum operating instructions are the result of risk evaluations and hazard analyses and are oriented on international certification stan dards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered HiCube Pro Operating instructions Declaration of Conformity Part of this document Operating instructions for comp...

Страница 5: ...m flange Fore vacuum connection Electric connection Air cooling unit Venting connection Sealing gas connection Exhaust connection Prohibition of an action or activity in connection with a source of danger the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associ...

Страница 6: ... The operator is obligated to make operating personnel aware of dangers originating from the vacuum pump the pumped medium or the entire system NOTICE Checking the safety system against excess rotation speed To provide the functioning of the integrated safety system for avoiding excess rotation speed the pump must run up from the standstill at least once a year Switch off the pump and await the co...

Страница 7: ...When transporting vacuum pumps by hand there is a danger through loads slipping and falling down Carry small and mid size vacuum pumps two handed Carry vacuum pumps 20 kg by a suitable lifting device Wear safety shoes with steel toe cap according to directive EN 347 CAUTION Risk of injury through hot surfaces Vacuum pumps can become hot during operation Allow the pump to cool before maintenance an...

Страница 8: ...s operation with improper gas mode venting with improper high venting rates use of the vacuum pump to generate pressure operation of the devices in areas with ionizing radiation operation in potentially explosive areas use of the devices in systems in which impact like stress and vibrations or periodic forces affect the devices use of accessories or spare parts which are not named in this manual w...

Страница 9: ...tmospheres the pumping station must be airproof shrink wrapped in a plastic bag together with a bag of dessicant WARNING Danger from falling and swinging loads When lifting the pumping station there is a danger of falling parts Only fix a lifting device for transport on all provided points of the frame of the pumping station first remove the rubber caps Make sure that there are no persons under th...

Страница 10: ... 0500 BN Backing pump Multi stage Roots pump ACP 15 28 ACP 15 28 ACP 15 28 ACP 15 28 112369 O Backing pump Rotary vane pump Duo 11 M Duo 20 M Duo 11 M Duo 20 M Duo 11 M Duo 20 M Duo 11 M Duo 20 M PD 0070 BN PK 0203 BN Backing pump Rotary vane pump Pascal 2010 Pascal 2021 Pascal 2010 Pascal 2021 Pascal 2010 Pascal 2021 Pascal 2010 Pascal 2021 103275 O Power supply with display and control unit DCU ...

Страница 11: ...for connection A turbo pumping station consists of a portable or mobile vacuum pumping unit with a tur bopump and a specially matched backing pump The display and control unit DCU serves to control and monitor the pumping station 4 2 1 Control Electronic drive unit of the turbopump Mod Mod No Ser No 115 230 V 50 60 Hz Wiring diagram PM 061 Made in Germany 2008 09 HiCube Classic PM S28 250 00 Mass ...

Страница 12: ...oltage category II Connection voltage TC 24 or 48 V DC 5 Limit values for HiPace 80 HiPace 300 HiPace 400 HiPace 700 Permissible magnetic field max 3 3 mT 5 5 mT 6 mT 6 mT Permissible irradiated heat input 3 W 8 W 14 W 14 W Remarks to ambient conditions The specified permissible ambient temperatures apply to operation of the turbopump at maximum permissible fore vacuum pressure or at maximum gas t...

Страница 13: ...t cooling for the pumping station When magnetic fields exceed the approved values a suitable shielding must be used Check installation location and consult Pfeiffer Vacuum if needed The maximum permissible rotor temperature for the turbopump is 90 C If high tem peratures arise for process reasons the radiated heat input must not exceed the per missible values Install suitable screening sheets if n...

Страница 14: ...n to the fit and the stress of the straps the strap loop has to be in the recess of the securing hook Fasten securely the lashing straps provided by the the customer in order to be able to hold loads up to 2000 N per anchorage point 5 3 Connecting the high vacuum side The assembly of superstructures on the pumping station HiCube Pro is in the operator s responsibility The load capacity of the high...

Страница 15: ...tall the turbopump according to its operating instructions Open the casing of the pumping station if necessary Extend necessary control leads for the electronic drive unit of the turbopump using Pfeiffer Vacuum accessories Connect the control leads to the electronic drive unit 5 5 1 Connecting the high vacuum side Install the high vacuum flange in accordance with the instructions in the operating ...

Страница 16: ...ed screw of the transportation lock Similarly loosen the transportation lock on the opposite side 5 7 Filling up the operating fluid Only applies to HiCube with rotary vane pump as backing pump The operating fluid reservoir is already filled and installed for the turbopump The dry compressing backing pump ACP is already filled with lubricant The operating fluid for the rotary vane pump is enclosed...

Страница 17: ...a vacuum gauge e g Pfeiffer Vacuum ActiveLine is possible to the display and control unit DCU Fig 6 Fill the backing pump with operating fluid 36 Backing pump Rotary vane pump 36 1 Filler opening filler screw 36 4 Operating fluid bottle similar to illustration 66 Filler tube 36 66 36 1 36 4 Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted acc...

Страница 18: ...ting plae Plug the mains cable into the the mains connection on the rear side of the pumping station and fix it with the clip Connect the mains cable to the mains Fig 7 HiCube Pro running a measuring cable 2 Display and control unit 2 1 Measuring gauge 2 4 Measuring cable 89 Control casing 2 89 2 1 2 4 WARNING Danger of unsafe electrical installation Safe operation after installation is the respon...

Страница 19: ... tion 1 intermittent opera tion 1 intermittent opera tion P 035 Configuration of accessory connection A1 With air cooling 0 0 0 With water cooling 2 2 2 P 036 Configuration of accessory connection B1 1 Venting valve nor mally closed 1 Venting valve nor mally closed 1 Venting valve nor mally closed P 046 Configuration of relay 2 15 pumping station 15 pumping station P 047 Configuration of relay 3 1...

Страница 20: ... of the backing pump can reduce the overall power consumption of the pumping system and the operating temperature of the backing pump as well Standby mode with the ACP preset Standby mode with rotary vane pumps configurable Standby mode with the ACP Switching thresholds for the standby mode of the ACP are preset WARNING Danger due to open high vacuum flange The rotor of the turbopump turns at high...

Страница 21: ...rating manual for the backing pump Switch off the pumping station via the ON OFF button on the DCU Place backing pump and venting valve in continuous operation Parameter P 023 0 turbopump motor off Parameter P 025 0 continuous operation mode for backing pump Parameter P 036 7 venting valve continuous 1 Switch on the pumping station using key ON OFF on the DCU With the turbopump idle open the venti...

Страница 22: ...ut off the water supply 6 6 2 Venting Venting with Pfeiffer Vacuum Venting Valve Enable venting via the functions of the electronic drive unit Settings are possible via interface RS 485 by using DCU HPU or PC 1 When mains power is restored the venting procedure is aborted Basic information for the rapid venting Venting of the vacuum chamber in two steps Ask for details on individual solutions from...

Страница 23: ...out necessary maintenance work on them they should then be re assembled in reverse order WARNING Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials that damage health In the case of contamination carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances Decontaminate affected parts...

Страница 24: ... 1 Main switch 125 1 67 Fig 10 HiCube Pro turbopump connections example 8 Power supply cable 10 DCU TC interface cable 11 Control cable for fore vacuum connec tion 14 Control cable for air cooling 60 Fore vacuum connection locking ring 62 Fore vacuum connection centering ring 8 60 62 10 11 14 NOTICE Note the factory settings The accessory connections on the turbopump have been preconfigured at the...

Страница 25: ...ete attach the turbopump to the mounting plate in the re verse order The tightening torque for the socket cap screw is dependent on its size and the type of turbopump Remember to use washers Table 3 Tightening torque for mounting turbopump for HiCube Pro Fig 11 HiCube Pro turbopump assembly disassembly 4 Hexagon socket screw 6 Washer 14 Air cooling 15 Turbopump 86 Pumping station frame 87 Mounting...

Страница 26: ...xic substances from the pumped media Danger of poisoning from the emission of harmful substances from the operating fluid Wear suitable protective clothing and respirators Dispose of operating fluid according to the local regulations WARNING Hot operating fluid Danger of burns when draining due to contact with skin Wear suitable protective clothing Use a suitable collecting vessel Fig 12 Change of...

Страница 27: ...nd commissioning in accordance with the operating instructions 8 3 Disposal Products or parts thereof mechanical and electrical components operating fluids etc may cause environmental burden Safely dispose of the materials according to the locally applicable regulations WARNING Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials th...

Страница 28: ...c drive unit of the turbopump light up Electrical supply interrupted Check the plug contacts at the relay box and the power supply unit Check the supply lines of the pumping station Check the output voltage 24 V DC at the DC out terminal of the power supply unit Check the plug contacts on the power supply unit Incorrect operating voltage Apply correct operating voltage Observe the ratings on the t...

Страница 29: ...00 l s Leave electronic drive on the pump Close the flange openings by using the original protective covers If possible send pump or unit in the original packaging Sending of contaminated pumps or devices No units will be accepted if they are contaminated with micro biological explosive or ra dioactive substances Hazardous substances are substances and compounds in ac cordance with the hazardous g...

Страница 30: ... the rating plate when ordering accessories or spare parts Refer to the operating manuals for the individual components 12 Accessories Please also specify model number of the the rating plate when ordering accessories or spare parts Refer to the operating manuals for the individual components ...

Страница 31: ...tion relating to technical data on HiCube Pro Versions available for Netzanschluss 230 V AC 50 60 Hz Netzanschluss 110 V AC 50 60 Hz Environmental conditions see p 12 chap 4 3 Weight specification including fore vacuum valve optional for version with rotary vane pump Maximum values refer exclusively to the input as a single load mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 ...

Страница 32: ...m3 h 27 m3 h 9 m3 h 20 m3 h 9 m3 h 18 m3 h Pump down time for vacuum chamber size 10 l 21 s 12 s 24 13 s 10 72 s 21 22 s 10 18 s Pump down time for vacuum chamber size 100 l 208 s 116 s 241 3 s 107 2 s 212 2 s 101 8 s Pump down time for vacuum chamber size 1000 l 2079 s 1161 s 2413 s 1072 s 2122 s 1018 s Ultimate pressure 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa Weight 64 ...

Страница 33: ...pump HiPace 300 HiPace 300 HiPace 300 HiPace 300 HiPace 300 HiPace 300 Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021 Parameter HiCube 300 Pro HiCube 300 Pro HiCube 300 Pro HiCube 300 Pro HiCube 300 Pro HiCube 300 Pro Flange in DN 100 CF F DN 100 CF F DN 100 CF F DN 100 CF F DN 100 CF F DN 100 CF F Flange out G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 Pumping speed for N2 260 l s 26...

Страница 34: ...ump HiPace 400 HiPace 400 HiPace 400 HiPace 400 HiPace 400 HiPace 400 Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021 Parameter HiCube 400 Pro HiCube 400 Pro HiCube 400 Pro HiCube 400 Pro HiCube 400 Pro HiCube 400 Pro Flange in DN 100 CF F DN 100 CF F DN 100 CF F DN 100 CF F DN 100 CF F DN 100 CF F Flange out G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 Pumping speed for N2 355 l s 355...

Страница 35: ...ump HiPace 700 HiPace 700 HiPace 700 HiPace 700 HiPace 700 HiPace 700 Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021 Parameter HiCube 700 Pro HiCube 700 Pro HiCube 700 Pro HiCube 700 Pro HiCube 700 Pro HiCube 700 Pro Flange in DN 160 CF F DN 160 CF F DN 160 CF F DN 160 CF F DN 160 CF F DN 160 CF F Flange out G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 Pumping speed for N2 685 l s 685...

Страница 36: ...F F A 680 mm 671 mm 676 mm B 158 mm 149 mm 155 mm Dimensions HiCube 300 Pro HiCube 300 Pro Flange DN 100 ISO K DN 100 CF F A 716 mm 728 mm B 195 mm 207 mm Dimensions HiCube 400 Pro HiCube 400 Pro Flange DN 100 ISO K DN 100 CF F A 760 mm 760 mm B 239 mm 239 mm Dimensions HiCube 700 Pro HiCube 700 Pro Flange DN 160 ISO K DN 160 CF F A 733 mm 745 mm B 212 mm 224 mm ...

Страница 37: ... documentation is Mr Helmut Bern hardt Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Aßlar HiCube HiCube Pro Harmonised standards and national standards and specifications which have been ap plied DIN EN ISO 12100 2011 03 DIN EN 61326 1 2013 DIN EN 1012 2 1996 DIN EN 62061 2013 DIN EN 61010 1 2010 Semi F47 0200 DIN EN 61000 3 2 2010 DIN EN 61000 3 3 2009 Signature Pfeiffer Vacuum GmbH Berliner Str...

Страница 38: ...e are the only supplier of vacuum technology that provides a complete product portfolio COMPETENCE IN THEORY AND PRACTICE Benefit from our know how and our portfolio of training opportunities We support you with your plant layout and provide first class on site service worldwide Are you looking for a perfect vacuum solution Please contact us Pfeiffer Vacuum GmbH Headquarters Germany T 49 6441 802 ...

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