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Declaration of conformity

according to the EC directive:

•

Machinery 2006/42/EC (Annex II, no. 1 A)

We hereby declare that the product cited below satisfies all relevant provisions
of EC directive "Machinery"

2006/42/EC

In addition, the product cited below satisfies all relevant provisions of EC direc-
tive "Electromagnetic Compatibility"

2004/108/EC

The agent responsible for compiling the technical documentation is Mr. Jörg
Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

HiCube

#LASSIC

Guidelines, harmonised standards and national standards and specifications
which have been applied:

DIN EN ISO 12100-1 : 2004

DIN EN 61000-3-2 : 2008

DIN EN ISO 12100-2 : 2004

DIN EN 61000-3-3 : 2006

DIN EN ISO 14121-1 : 2007

DIN EN 61326-1 : 2006

DIN EN 1012-2 : 1996

DIN EN 62061 : 2005

DIN EN 61010-1 : 2002

Signatures:

Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany

(M.Bender)
Managing Director

(Dr. M. Wiemer)
Managing Director

CE/2010

Содержание HiCube 300 Classic

Страница 1: ...Betriebsanleitung Operating Instructions PT 0264 BE A 0901 Turbo Pumping Station HiCube Classic Translation of the Original Operating Instructions ...

Страница 2: ...p 14 6 Operation 15 6 1 Commissioning 15 6 2 Operation modes 16 6 3 Function description 17 6 4 Saving energy 17 6 5 Operation with gas ballast valve 18 6 6 Operation with fore vacuum valve 18 6 7 Switching off and venting 18 7 Maintenance replacement 19 7 1 Maintenance intervals and responsibilities 19 7 2 Removal of components for their maintenance 20 7 3 Changing the operating fluid 22 8 Decomm...

Страница 3: ...UVdotCOM ID 0000021320 1 2 Conventions Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk evaluations and hazard analyses and are oriented on international certification standards as specified by UL CSA ANSI Z 535 Semi S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered HiCube Classic Operating in...

Страница 4: ...igh vacuum flange Prohibition of an action or activity in connection with a source of danger the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of danger the disregarding of which may result in serious accidents H VV F SG NOTE Duty to in...

Страница 5: ...vacuum pressures Operation with improper gas mode Operation with improper high levels of insulated heat input Venting with improper high venting rates The operation of the devices in potentially radioactive areas The operation of the devices in systems where the turbopumps are subjected to impact like stress and vibrations or the effect of periodically occurring forces The connection to a power su...

Страница 6: ...ive atmospheres the pumping station must be airproof shrink wrapped in a plastic bag together with a bag of dessicant WARNING Danger from falling and swinging loads When lifting the pumping station there is a danger of falling parts ÎOnly fix a lifting device for transport on the provided eye bolts of the high vacuum flange of the turbopump ÎMake sure that there are no persons under the suspended ...

Страница 7: ...TC 400 TC 400 PT 0204 BN PT 0203 BN Venting Valve yes yes yes yes PT 0228 BN Backing Pump Diaphragm Pump MVP 015 2 MVP 040 MVP 070 MVP 015 2 MVP 040 MVP 070 MVP 040 MVP 070 MVP 040 MVP 070 PU 0012 BN PU 0050 BN PU 0050 BN Backing Pump Rotary Vane Pump DUO 2 5 DUO 5 M DUO 2 5 DUO 5 M DUO 2 5 DUO 5 M DUO 2 5 DUO 5 M PK 0152 BN PK 0197 BN Casing Heating water cooling required optional only with CF fl...

Страница 8: ...p units which are ready for connection The turbo pumping station consists of a portable or mobile vacuum pumping unit with a turbopump and a specially matched back ing pump The display and control unit DCU serves to control and monitor the pumping sta tion Drive Electronic drive unit of the turbopump Cooling Air cooling Water cooling optional In the case of excess temperature the electronic drive ...

Страница 9: ...ith air cooling Protection category IP 20 Protection class I Relative humidity max 80 at T 31 C up to max 50 at T 40 C Atmospheric pressure 77 kPa 106 kPa Installation altitude 2000 m max Degree of pollution 2 Overvoltage category II Connection voltage TC 24 or 48 VDC 5 Limit value for HiPace 80 HiPace 300 HiPace 400 HiPace 700 Permissible magnetic field max 3 3 mT 5 5 mT 6 mT 6 mT Permissible irr...

Страница 10: ...e the device in systems where impact like stresses and vibrations or periodically forces occur 5 2 Preparatory work Î Ensure sufficient cooling for the pumping station Î When magnetic fields exceeding the approved values a suitable shielding must be used Check installation location and consult Pfeiffer Vacuum if needed Î The maximum permissible rotor temperature for the turbopump is 90 C If high t...

Страница 11: ...ross weight of superstructure on the pumping station HiCube Classic may not exceed 100 kg Î Observe barycentric shifting by using high or lateral protruding superstructure e g vacuum chamber Danger of tilting Î Install the high vacuum flange in accordance with the instructions in the opera ting manual of the turbopump Î Ensure the greatest possible cleanliness when installing any high vacuum parts...

Страница 12: ...ng manual of the turbo pump WARNING Ensure safe electrical installation Safe operation after installation is the responsibility of the operator ÎDo not independently modify or change the pump and electrical equipment ÎMake sure that the system is integrated in an emergency off safety circuit ÎAlways ensure a safe connection to the protective earthing conductor PE protection class I ÎConsult Pfeiff...

Страница 13: ...ket of the side panel Remove the side panel from the pumping station Î Unscrew the retral perforated plate from the casing of the pumping station 6x Allen head screw 59 Î Run the measuring cable via the measuring connection into the interior of the pumping station Î Plug the measuring cable in the connection X3 of the DCU Î Settings are possible with the extended parameter set at the DCU Fig 6 HiC...

Страница 14: ...ble cleanliness when installing any high vacuum parts Unclean components prolong the pump down time Î Observe the minimum strengh of 170 N mm2 for the flange material Connecting the fore vacuum side Î Extend the fore vacuum line between turbopump and backing pump Î Connect the fore vacuum line with small flange components or threaded hose couplings Do not narrow the free cross section of the fore ...

Страница 15: ...g pumps see label The transportation lock consists of two opposing knurled screws with spring suspension which fasten the backing pump s bottom plate Î Lift the carrying handle Î Loosen two retaining screws each from a side panel Î Remove the side panel Lift the side panel approx 2 3 cm from its adjustment and tilt it outwards Disconnect the earthing cable from the terminal socket of the side pane...

Страница 16: ...ion Fig 8 Filling the backing pump with operating fluid Î Unscrew operating fluid filler screw 25 1 Î Unscrew the operating fluid bottle s screw plug and screw the filler tube both included in the equipment pack Î Insert the filler tube into the rotary vane pump s filler opening Î Fill operating fluid according to rotary vane pump operating instructions Î Screw in operating fluid filler screw 25 1...

Страница 17: ...onsumption of the turbopump the electronic drive unit controls the backing pump operation type dependant A relation to the supplied fore vacuum pressure is derived from the power consumption Control of the back ing pump can reduce the overall power consumption of the pumping station and the operating temperature of the backing pump as well Intermittend mode only for diaphragm pumps No control for ...

Страница 18: ...tch off the pumping station via the ON OFF button on the DCU Î Venting possibilities see below Î Switch off the pumping station at the master switch Î For water cooling Shut off the water supply Venting Venting with Pfeiffer Vacuum Venting Valve Î Enable venting via the functions of the electronic drive unit Î Settings are possible via the RS485 by using DCU HPU or PC 1 When mains power is restore...

Страница 19: ...mination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials that damage health ÎIn the case of contamination carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances ÎDecontaminate affected parts before carrying out maintenance work NOTE Disclaimer of liability Pfeiffer Vacuum accepts no liabil...

Страница 20: ... of the casing cover Î Lift the carrying handle Î Loosen two retaining screws each from a side panel Î Remove the side panel Lift the side panel approx 2 3 cm from its adjustment and tilt it outwards Disconnect the earthing cable from the terminal socket of the side panel Remove the side panel from the pumping station NOTE Note the factory settings The accessory connections on the turbopump have b...

Страница 21: ...and remove all Allen head screws 90 6x from the mounting plate Tightening torque for the fixing screws when mounted 33 Nm Î Take off the turbopump with the mounting plate from the casing The opening in the mounting plate makes it easy for customers to perform main tenance work on the turbopumpturbopump e g change the lubricant reservoir 9 Mounting plate 15 Turbopump 75 Casing 90 Allen head screw 9...

Страница 22: ...under the operating fluid duct Î Changing the operating fluid according to the operating instructions of the rotay vane pump Î Assembly of the pumping station in reverse order Î Re fasten the pumping station with all the lashing straps WARNING Operating fluid may contain toxic substances from the pumped media Danger of poisoning from the emission of harmful substances from the operating fluid ÎWea...

Страница 23: ... and commissioning in accordance with the operating instructions 8 3 Disposal Products or parts thereof mechanical and electrical components operating fluids etc may cause environmental burden Î Safely dispose of the materials according to the locally applicable regulations WARNING Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with material...

Страница 24: ...rive unit of the turbopump light up Electrical supply interrupted Ö Check the plug contacts at the relay box and the power supply unit Ö Check the supply lines of the pumping stati on Ö Check the output voltage 24 VDC at the DC out terminal of the power supply unit Ö Check the plug contacts on the power supp ly unit Incorrect operating voltage Ö Apply correct operating voltage Ö Observe the rating...

Страница 25: ... Leave electronic drive on the pump Î Close the flange openings by using the original protective covers Î If possible send pump or unit in the original packaging Sending of contaminated pumps or devices No units will be accepted if they are contaminated with micro biological explosive or radioactive substances Hazardous substances are substances and com pounds in accordance with the hazardous good...

Страница 26: ... 10 7 mbar 1 10 7 mbar 1 10 7 mbar Cooling method standard Air Air Air Air Air Power consumption max 230 W 290 W 360 W 270 360 Relative humidity of air 5 85 non conden sing 5 85 non conden sing 5 85 non conden sing 5 85 non conden sing 5 85 non conden sing Weight 31 5 kg 31 5 kg 41 4 kg 35 5 kg 44 kg Parameter HiCube 80 Classic DN 63 CF F MVP 015 HiCube 80 Classic DN 63 CF F MVP 040 HiCube 80 Clas...

Страница 27: ...CF F MVP 070 HiCube 400 Clas sic DN 100 CF F DUO 2 5 HiCube 400 Clas sic DN 100 CF F DUO 5 M Flange in DN 100 CF F DN 100 CF F DN 100 CF F Flange out G 1 2 G 1 2 G 1 2 Ultimate pressure 5 10 10 mbar 5 10 10 mbar 5 10 10 mbar Cooling method standard Air Air Air Power consumption max 670 580 670 Relative humidity of air 5 85 non conden sing 5 85 non conden sing 5 85 non conden sing Weight 57 5 kg 45...

Страница 28: ... 590 mm 581 mm 587 mm B 102 mm only with DUO 5 Dimensions HiCube 300 Classic DN 100 ISO K HiCube 300 Classic DN 100 CF F A 580 mm 592 mm B 102 mm only with DUO 5 Dimensions HiCube 400 Classic DN 100 ISO K HiCube 400 Classic DN 100 CF F A 624 mm 624 mm B 102 mm only with DUO 5 Dimensions HiCube 700 Classic DN 160 ISO K HiCube 700 Classic DN 160 CF F A 597 mm 609 mm B 102 mm only with DUO 5 ...

Страница 29: ...ible for compiling the technical documentation is Mr Jörg Stanzel Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Aßlar HiCube LASSIC Guidelines harmonised standards and national standards and specifications which have been applied DIN EN ISO 12100 1 2004 DIN EN 61000 3 2 2008 DIN EN ISO 12100 2 2004 DIN EN 61000 3 3 2006 DIN EN ISO 14121 1 2007 DIN EN 61326 1 2006 DIN EN 1012 2 1996 DIN EN 62061 20...

Страница 30: ...9 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service ...

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