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1.5 Key technical performance indicators

Resolution: SE 1.5nm@15kv BSE3nm @ 30kv Magnetization: 8 times~800,000 times

Electronic clamp: Schottky field emission electron gun Accelerating voltage: 0~30kV

Lens system: Electromagnetic lens Objective lens aperture: Three holes optional (the

position can be adjusted outside the vacuum) Chamber : Six switches connected to

two interfaces (1) Displacement of the standard manual sample stage: X = 80mm, Y =

60mm, Z = 50mm, T = -

5°~+90°, R = 360° Maximum sample diameter: Ф175mm

Maximum sample height: 40mm (2) Medium-sized automatic sample stage

displacement: X = 80mm, Y = 50mm, Z = 30mm, T = -5°~+70°, R = 360° Maximum

sample diameter: Ф175mm Maximum sample height: 20m (3) Large automatic

Sample stage displacement: X = 150mm, Y = 150mm, Z = 60mm, T = -10°~+65°, R =

360°Maximum sample diameter: Ф340mm Maximum sample height: 50m Remarks:

The collision warning function is preinstalled in all series of sample chambers.

Vacuum system: secondary ion pump, single turbo molecular pump, a rotary pump;

the vacuum degree of the sample chamber is higher than 2Pa and the vacuum degree

is higher than 7Pa

1.6 Size and weight

1.6.1 Dimension of instrument

Mainengine:800×800×1480(mm)Electrical

cabinet:1340×850×740(mm)

1.6.2 Weight of instrument

Total weight of instrument: 4 50Kg

1.7 Using Condition

Содержание A63.7080

Страница 1: ...A63 7080 81 Scanning Electron Microscope SEM Instruction Manual ...

Страница 2: ...lectron signals and forms images by focusedelectron beam scanning on the specimen surface spot by spot A63 7080 81 has following features 1 It uses a field emission electron gun with high brightness and large depth of field which is suitable for analyzing and observing rough surfaces and fractures the mirror image is vivid and easy to identify and explain 2 It can be used to observe the surface st...

Страница 3: ...is very good users can perform multi functional analysis by adding different signal detection equipment for example can use X ray energy spectrometer EDS for micro area component analysis or perform qualitative and quantitative analysis in different micro areas analysis 10 Windows operating system friendly interface simple and easy to master the image is displayed on the same screen and can be enl...

Страница 4: ...litative analysis of components For micro structure analysis spatial resolution can reach to submicron grade State measurement of grain boundary phase identification of crystal crystal grain When making micro area components analysis element distribution measurement can be carried out by rapid multi element mapping and line scan In modernin industrial production and scientific research material an...

Страница 5: ...ized automatic sample stage displacement X 80mm Y 50mm Z 30mm T 5 70 R 360 Maximum sample diameter Ф175mm Maximum sample height 20m 3 Large automatic Sample stage displacement X 150mm Y 150mm Z 60mm T 10 65 R 360 Maximum sample diameter Ф340mm Maximum sample height 50m Remarks The collision warning function is preinstalled in all series of sample chambers Vacuum system secondary ion pump single tu...

Страница 6: ...3 7080 81 is installed the room temperature is required to be constant and the humidity maintains low The temperature should be kept between 2018 and 2522 the relative humidity should be less than 670 and the instruments should be guaranteed to meet these requirements such as air conditioner dehumidifier dry and wet thermometer 1 7 3 Power supply requirements 1 7 3 1 Power requirements A63 7080 81...

Страница 7: ...on position of A63 7080 81 the vibration in any direction should be less than 3 μm The engineer of OPTOEDU will make a comprehensive measurement of the instrument before installation and analyze the data If the analysis results show that there is something wrong with the environment the user will be suggested to make improvement It should be noted that the vibration caused by too much sound can al...

Страница 8: ...ature and Operating Principle 2 1 General Structure A63 7080 81 ultilizes the interaction a certain energy electron beam and sample which will produce various physical signals The SE detector collects and amplifies secondary electronic signal then transmit the signal to electrics console converts to digital signal Finally the computer receive the signal and form a image The main structures of A63 ...

Страница 9: ...or the electron optical column is shown in Fig 2 1 The system has one set of electromagnetic shielding column outside the optical path which can eliminate the electromagnetic interference from the environment 2 2 1 Schottky field emission electron gun Schottky field emission electron gun has the characteristics of good monochrome and high brightness The electron beam emitted by the gun forms a ver...

Страница 10: ...according to 9 actual needs and align it with electron beam though adjust knobs in X and Y directions The final aperture influences depth of focus resolution and electron beam current 2 2 4 Scanning Coil Assembly Scanning coil assembly is installed inside of objective lens to make the electron beam deflect on the surface of specimen along X direction and Y direction When observing images at high m...

Страница 11: ...t analysis of samples 2 3 Specimen Chamber and Specimen Stage The specimen chamber is mounted on the vibration isolated frame Vacuum system is installed under chamber which electron optics column is installed above chamber The specimen stage is installed in the front of chamber Vent of chamber will not influence vacuum status of other parts The chamber provides a big working area for specimen Mean...

Страница 12: ...ard chamber for observing the state changes of specimen 2 4 Vacuum System The electron optical column and chamber must work on certain vacuum state The realization and control of vacuum state can be completed by vacuum system The automatic vacuum system is installed under chamber and directly connected with column through vacuum pipeline which is shown as Fig 2 2 The automatic vacuum system mainly...

Страница 13: ... started enabling the electron column to obtain ultra high vacuum 6 Cold Cathode Gauge CCG measure vacuum in real time and assist valves to realize vacuum control 7 Air compressor supplies power to each pneumatic valve The vacuum control part is installed on the rear of main frame The whole process from low vacuum to high vacuum is fully automatically controlled by software The system can realize ...

Страница 14: ...tem Computer operating system is Using Microsoft Windows 10 operating system 14 image can be stored at any time in large capacity hard disk or other storage media or directly printed out computer workstation configuration for the mainstream brand its configuration is not lower than I5 quad core 3 2 GHz HD video card 530 DDR4 8gb memory 24 LCD display 500G high speed hard disk Photoelectric mouse k...

Страница 15: ...on is shown in Fig 3 1 Double click the icon to open the user interface as shown in Fig 3 2 The SEM operating software includes filament high pressure control vacuum control image acquisition image analysis and other functions The user interface mainly includes menu bar toolbar image display area and scan control window 3 2 1 scan controlwindow As shown in Fig 3 3 and Fig 3 4 are the scan control ...

Страница 16: ...us magnification scan rotation Status Field Displays the vacuum and beam values Table 3 4 main functions of scan control window Instructions on mouse operation After clicking the slider on the toolbar drag the mouse to fine tune the corresponding parameters After double clicking the slider on the toolbar drag the mouse to make coarse adjustment of the corresponding parameters After the adjustment ...

Страница 17: ......

Страница 18: ... the toolbar drag the mouse to make coarse adjustment of the corresponding parameters After the adjustment click the right mouse button to determine the current parameter value 3 2 2 Get started 1 Operating the electron microscope operating software A63 7080 81 2 Click the SE button in the upper right corner of the control interface to load the power of each system ...

Страница 19: ... software on In this state the software system will automatically detect and record the operation parameters of the electron microscope Fig 3 6 Click the vacuum button to stop using 3 2 4 Function button The function button and state display of the scan control window are shown in the Fig 3 7 and the function button s meaning is shown in the table 3 1 ...

Страница 20: ...Fig 3 7 The function button and state display of the scan control window ...

Страница 21: ...a The pump button is used for automatic vacuuming of the system The drain button is used to replace the sample click to drain the sample chamber Open V1 valve button for the switch of V1 block valve Advanced features see step 4 below for details 2 Electron gun parameter setting area Acceleration voltage can be set Fine adjustment of gun lens voltage Note the gun lens voltage matches the accelerati...

Страница 22: ...indicates that there is an error click the clean hv error button Note the box is green indicating no errors The box is yellow indicating a communication error the box is red indicating a serious error 4 Click the advanced button to pop up the advanced function window as shown in Fig 3 9 Fig 3 9 advanced function window Power Settings can fine tune the parameters of the electron gun carefully used ...

Страница 23: ...lider with the left mouse button to make various adjustments Click once to display green for fine tuning Click twice for coarse tone the display is red 2 stigmator button for adjusting astigmatism 3 Beam shift used for adjusting electron beam alignment 4 Beam tilt used for adjusting electron beam alignment 5 wobbler when adjusting the aperture of the objective lens click the button to adjust the a...

Страница 24: ...lectrical displacement Fig 3 11 electric displacement adjustment Drag the slider to adjust the electrical displacement of the image Click once to display green for fine tuning Click twice for bold and display in red ...

Страница 25: ...mpensated 3 2 8 Grid and Status 3 2 8 1Grid Grid Represents the grid voltage fixed at 300V no adjustment 3 2 8 2 Status Status display recording instrument status 3 2 9 Main functional area The main functional areas of the scan control window are shown in Fig 3 12 including adjustment of brightness contrast focus and magnification ...

Страница 26: ...4 Automatic sample stage 4 1Sample stage control interface ...

Страница 27: ...g in X Y Z T and R directions Scanning Stage Control Panel control the movement of the sample stage Scan Area Panel can set different rows columns magnification splicing into an image Scaling is used to adjust the splicing accuracy The sample grounding alarm is set in the sample stage When the sample cup is directly grounded the clapper will ...

Страница 28: ...ut an alarm This function is to prevent the sample from touching lower pole piece 4 2 Sample stage control panel 1 status 2 Input values in the box in each direction to drive the movement of the sample stage ...

Страница 29: ...o control the movement of the sample stage Click the H button to return the sample stage to Home position Click the B button to perform a manual backlash Click the arrow buttons to mpve the sample stage by image fields in the indicated direction The settings in the checkboxes on the right hand side define the distance of the stage s movements Setting 1 corresponds to moving along the length to the...

Страница 30: ...the line will be turned vertical 6 Initialization During starting SEM control the dialog window Stage Reference Position will be displayed 6 Initialization During starting SEM control the dialog window Stage Reference Position will be displayed Click the button Initialization Run in the Stage Reference Position window to initialize the sample stage 4 3 Main control parameters of sample stage Struc...

Страница 31: ...esponding position 4 3 1Main Tab Editing Mode If the Main Table editing mode checkbox is activated in the Setup tab the Main tab will display additional buttons for changing the table values Fuction In Main Table editing mode the values in the Main tab as well as the values in the Position Table tab can be modified The following table contains information on ...

Страница 32: ...n Table editing mode 4 3 2 Stage Control Position Table Structure The following figure shows the Position Table tab of the Stage Control panel with its components Function The following table contains information on the components of the Position Table tab ...

Страница 33: ...4 3 3 Stage Control Setup Structure The following figure shows the Setup tab of the Stage Control panel with its components ...

Страница 34: ...The following table contains information on the components of the Setup tab 4 4Scan Area Settings 4 4 1 Scan Area Structure The following figure shows the Settings tab of the Scan Area panel with its components ...

Страница 35: ...Function The following table contains information on the components of the Settings tab ...

Страница 36: ...otocol tab of the Area panel Function In the Protocol tab all events of an area scan will be recorded 4 5 Image Acquisition 4 5 1 Software Interface The software control interface is shown in Fig 3 13 including menu bar toolbars image display area and scan control area ...

Страница 37: ... the image area to see the interface as shown in Fig 3 14 Click the corresponding options to make relevant Settings Click Settings to set the detector type scan speed synchronization mode etc as shown in Fig 3 15 Fig 3 15 Scan settings Right click the scan shortcut icon in the toolbar You can also set each scan shortcut button ...

Страница 38: ...hortcut to save the image in the toolbar as shown in Fig 3 17 and the storage location can be selected As shown in Fig 3 18 the file name can be edited Fig 3 18 Edit filename 4 5 4 Image Acquisition 1 The toolbar of the software interface is provided with a shortcut to scan the image as shown in Fig 3 19 The functions are shown in the table below ...

Страница 39: ...Fig 3 19 scan shortcut 2 Software provides a number of quick scan button can be personalized Settings Right click each icon you can set the corresponding Settings ...

Страница 40: ... the image can be set Scan cycle line average and frame average can be set Automatic brightness contrast adjustment after image scanning brightness contrast can be automatically optimized 3 Signal monitoring click the icon with the left mouse button to make relevant Settings The grayscale curve of the current image can be observed note analog signal level meter and gradient diagram cannot be adjus...

Страница 41: ...trast of BSE images can be adjusted Click the signal monitor icon and the brightness and contrast of BSE image can be adjusted in the popup window can adjust the image brightness and contrast of 4 BSE channels at the same time click the adjustment button to adjust the image brightness and contrast of 4 BSE channels respectively 43 Click the channel mixing icon to merge 4 BSE channels and can add o...

Страница 42: ...0 81 check whether the knob is in the correct position 1 Whether the mechanical pump power switch is in the OFF position 2 Whether the power switch of the electrical cabinet is in the OFF position 5 1 3Panel installed correctly Before using A63 7080 81 it is necessary to check whether the panels and plate of A63 7080 81 main engine and electric cabinet are installed firmly so as to avoid the dange...

Страница 43: ...ess does not need to shutdown the power SEM is in a standby At this point V1 partition valve in the closed state the electron gun electrical system and vacuum system are in working state turned off when SEM not in use for a long time can also click on the gun automatic retreat button close the gun but must guarantee the normal work of the vacuum system stopped state in the course of carriage instr...

Страница 44: ...ly start the filament stable for 8 hours after normal launch the instrument can be normally used this step should be completed by a professional engineer 5 2 1 2OperationCautions In order to prevent the failure of the instrument the instrument is equipped with chain protection However some improper operations can still cause the instrument to fail For this purpose in addition to strictly following...

Страница 45: ... Click vent on the software interface and the vacuum system will automatically vent air to the sample chamber 3 After the venting the door of the sample chamber is loose and the sample chamber is in atmospheric state 5 2 2 2 Place or replace thes ample After the sample chamber is vented pull the sample stage out of the sample chamber do not try too hard Loosen the fixed jackscrew under the sample ...

Страница 46: ...tart to start the automatic gun program Note cold start vs hot start cold start has a 15 minute waiting time during starting gun Since the field emission electron source is ventd a lot when it is first used the vacuum may drop and it needs to wait for 15 minutes during the loading process High pressure HV and filament cannot be added until the vacuum degree is reached The vacuum and high pressure ...

Страница 47: ...justing electron beam tilt or electron beam shift should check the final aperture alignment state make appropriate adjustments when necessary Any adjust the action of final aperture after completion of the sympodial adjustment must eliminate astigmatism 1 When adjusting the alignment of the final aperture the following steps should be followed 1 Adjust the magnification to 500X 1000X acquire a rel...

Страница 48: ...3 Adjust the two knobs of the final aperture respectively to minimize the displacement or movement of the image First adjust one knob to make the move smaller then adjust another ...

Страница 49: ... the image 5 If the magnification is high you can continue to increase the magnification and fine tune the final aperture for better results 6 After the alignment make sure to carry out astigmatism adjustment please refer to 5 2 4 3 for details Change the final aperture 1 The final aperture rod is preinstalled with three apertures which are commonly configured as 70 microns 50 microns and 30 micro...

Страница 50: ...e final aperture is not alignment the image is hard to focus clear and the astigmatism is big when observing high expansion image effects more apparent After replacement the final aperture Must carry out astig matism adjustment specific see 5 2 4 3 5 2 4 3 Stigmator 1 When the magnification is higher than 3000x even if the focus is clear and the final aperture is well aligned the image is still no...

Страница 51: ...the clearest then adjust astigmatism Drag the slider to see the image change Astigmatism regulation standard is when the image is the clearest astigmatism regulation is the most appropriate Click stigmator button to make astigmatism adjustment function effective Adjustment mode click the slider with the left mouse button to make adjustments Click once to display green for fine tuning Click twice f...

Страница 52: ...nt Move it to the center of the screen It is necessary to adjust the final aperture alignment and eliminate astigmatism 5 2 5Sample preparation The sample preparation of scanning electron microscopy is very simple A piece of sample can be cut off and pasted onto the sample cup with conductive adhesive glue or tape If the sample is not conductive stick the sample on the sample cup with conductive g...

Страница 53: ...shall be recorded in detail and according to the steps down promptly notify the manufacturer for repair 5 3 2 Software performance Make sure the A63 7080 81 operating software is on and the system will automatically record the running log of the software 5 4 Deal with sudden power failure and recovery after power failure 5 4 1 Deal with sudden power failure 1 in the advanced Settings interface of ...

Страница 54: ... state of green color 6 if CCG TMP is not turned on click the vent button and then click the pump button immediately the time interval is less than 1S CCG and TMP can work normally after a moment 7 after the vacuum condition is normal the filament can be started and click to start automatically which lasts for about 40 minutes 5 4 3 How to deal with it during the long vacation It is best to commun...

Страница 55: ... scintillator which will produce charge accumulation and discharge this may reduce the luminous efficiency of scintillator and the signal to noise ratio of image Generally the scintillator should be changed once a year The methods are as follows 1 Press OFF button close the V1 Vent specimen chamber and pull out the specimen stage fully 2 Take off collector screen of detector Take down the Collecto...

Страница 56: ...on The final aperture and the light mast should be removed as follows 1 Click on Vent until the sample door is loose Fig 5 1 Objective Diaphragm 2 Turn the knurled knob on the light lever counterclockwise until the thread is completely disengaged 3 Pull the light lever out by hand and place it on a clean lint free cloth The reverse side ie the matte side of the diaphragm is up as shown in Figure 5...

Страница 57: ...groove where the light is placed and carefully polish it with a thin bamboo stick against the lint free cloth carefully cut the three small holes in the groove with a fine cotton swab polishing Fig 5 2 Remove aperture from Bar 10 Dehydrate the optical mast with absolute ethanol and blow dry with a hot air blower 11 Install the rubber O ring that you just removed on the sealing groove of the light ...

Страница 58: ...t and thin When using stainless steel tweezers it is easy to scratch the surface of the enamel Especially when scratching the pupil it will affect the image quality so you need to be very careful Place the diaphragm on a clean lint free cloth and gently clip the edges with tweezers 13 The three objective lenses are mounted in the optical mast The back side is mounted upwards and is fixed with a to...

Страница 59: ...ving the A63 7080 81 to another place Such maintenance work must be done by professional engineers appointed by the manufacturer or engineers authorized by the manufacturer and specially trained and certified by the manufacturer 6 2 Inspection Period It is suggested to inspect the scanning electron microscope under normal working condition every year to eliminate the potential trouble 6 3Normal ma...

Страница 60: ... gases prevent inversion rain cold and insolation The temperature in the storage room is 10 40 and the relative humidity is no more than 80 Since the interior of the A63 7080 81 electronic optical column is in a vacuum state when it leaves the factory it is better to complete the installation within one month after the arrival of the goods so as to ensure the vacuum state inside the optical column...

Страница 61: ...check the packing list of A63 7080 81 products in time to avoid the loss of parts 8 2 Examination content In the process of unpacking the user shall confirm the complete set of A63 7080 81 and the appearance of the instrument 8 2 1 A63 7080 81 packing list NO NAME COUNT NOTE Mainframe Optical column 1 Specimen chamber 1 Five axis automatic sample stage 1 Schottky field emission electron gun 1 Fina...

Страница 62: ...See attachmen t 1 6 others 1 See attachmen t Delivery documentation 1 1 Packingl ist 1 2 manufacturer certificate 1 3 Instruction manuals 1 electronicve rsion 4 Operating software CD 1 category No Name specification count 1 specimen Cup φ32 5 2 Specimen cup φ13 5 Delivery consumables 3 Tungsten single crystal filament Oneinstalled 2 4 Carbon tape 6mm 4 5 vacuum grease 2 6 non woven fel 20 ...

Страница 63: ...ssories 1 Vent nozzle 5 2 Clean nitrogen pipe φ10 10 3 Hose clamps φ30 2 others 1 UPS unremittingpower SANTAKC 1 2 EDS XFLASH630M 1 3 Backscatter detector 1 4 CCD 1 8 2 2 Instrument appearance inspection Under the condition of sufficient light the instrument should be visually free from large scratches and stains 9 Other 9 1Guarantee after sales service contact ...

Страница 64: ...s the user will be notified to arrive in time for installation The main contents of the installation work are The installer will unpack and inspect the goods together with the user according to the Packing List After the installation and commissioning of the installer is completed the user will check the instrument item by item according to the requirements of the Installation Acceptance Report Af...

Страница 65: ... be explained to the user include To ensure the normal operation of the instrument please do not install any 69 applications and software that are not related to this in the instrument system computer to avoid damage to the system control Because there are high voltage power supplies and related equipment in the system if you have any related problems please contact our maintenance engineers first...

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