OPTO-EDU A63.7080, Инструкция по эксплуатации, Страница: 47 / 65

Final aperture alignment adjustment: in the actual use process, in order to obtain a
better image, need to adjust final aperture alignment. Click the wobbler button on the
software control interface (the selection function can be used). If the image moves on
the screen, it indicates that the final aperture is not well aligned and needs to be
adjusted. If the image is barely moving on the screen, the final aperture is well aligned,
and there is no need to adjust the final aperture.
Notes: After changing accelerating voltage or gun lens voltage, should check the final
aperture alignment state; make appropriate adjustments when necessary. After
adjusting electron beam tilt or electron beam shift, should check the final aperture
alignment state; make appropriate adjustments when necessary. Any adjust the
action of final aperture, after completion of the sympodial adjustment, must eliminate
astigmatism.
1 When adjusting the alignment of the final aperture, the following steps should
be followed: 1. Adjust the magnification to 500X-1000X, acquire a relatively clear
image. Use [ROI] scanning at a high speed scanning rate (usually set scanning rate
4), and select a “characteristic point” on image.
2. . After clicking the wobbler button, select the appropriate wobble frequency and
amplitude, and the characteristic points will move in a certain direction. The larger
the motion amplitude, the worse the condition of alignment. If alignment is not
good, it affects astigmatism extremely, it must be adjusted