OPTO-EDU A63.7080, Инструкция по эксплуатации

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positive voltage biased on the collect grid which is mounted in front of detector, can attract
low-energy SE to electron detector. A positive 10KV potential biased on the scintillator
accelerates SE. The photon produced by scintillator enters into the window of photomultiplier,
and output video signal. BSE: backscatter detector, used to receive backscattered electron
signals, used to characterize the atomic number contrast of sample.
2.2.7 A63.7080/81 accessories
Standard accessories which can be installed on A63.7080/81 are X-Ray Energy Dispersive
spectrometer (EDS), X-ray wave dispersive spectrometer, 10 Cathodoluminescence
spectrometer, etc. Currently, EDS is the most popular accessory of SEM. EDS consists of
detector and analysis system, which can realize the identification and quantification of the
specimen. Used for component analysis of samples.
2.3 Specimen Chamber and Specimen Stage
The specimen chamber is mounted on the vibration isolated frame. Vacuum system is
installed under chamber, which electron optics column is installed above chamber. The
specimen stage is installed in the front of chamber. Vent of chamber will not influence vacuum
status of other parts. The chamber provides a big working area for specimen. Meanwhile, it is
convenient for accessory installation. Specimen chamber accessories available are high -
temperature stage, low - temperature stage, drawing stage,,etc.
2.3.1 Specimen Chamber
Medium and large specimen chambers are available to match different specimen stage. The
chamber can be equipped with various stages and detectors, such as X-ray wave dispersive
spectrometer, X-ray energy dispersive spectrometer, cathodoluminescence spectrometer,
backscattered electrons detector, SE detector and other experimental instrument.
2.3.2 Manual specimen stage (standard)
Horizontal: X=80mm Y=60mm Vertical: Z =50mm Tilt= -5° ~ +90° Rotation = 360° Maximum