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CHECK AND ADJUSTMENT PROCEDURES: Surface Measurement (LMU) Calibration
3.4
Surface Measurement (LMU) Calibration
Calibrate surface measurement (LMU) using the provided RMU/LMU calibration jig as necessary
before size adjustment.
1
Enter service mode from the LE-700 home screen.
“3.2.1 Entering service mode” (page 20)
2
Press the “Maintenance” tab.
The maintenance screen appears.
3
To prevent the calibration jig from dropping
off, attach the trimmed double-coated adhe-
sive pad to the pattern holder.
Trim off the shaded area of the double-coated adhe-
sive pad with scissors as shown in the figure to the
right and attach the pad to the pattern holder.
CAUTION
• Clean the surface feelers before calibration. If the feeler is soiled, correct measurement may not be
possible.
• The RMU/LMU calibration jig easily comes loose from the lens adapter. As it may fall in the process-
ing chamber, be sure to hold the jig by hand to attach or remove the jig.
Trimmed double-
coated adhesive
pad
Pattern holder
Trim off the shaded area.
Double-coated
adhesive pad
Содержание LE-700
Страница 6: ...IV ...
Страница 24: ...18 INSTALLATION Cooling Water and Cleaning Water ...
Страница 78: ...72 CHECK AND ADJUSTMENT PROCEDURES Date and Time Setting ...