MKS Spectra 138A, Инструкция по эксплуатации

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PAS Trolley Manual
LP101017 Rev 1.02
Page 28
Poor vacuum due to primary pump performance - refer to MKS
Turbo pump overheating. Check turbo cooling fan.
Problem with turbo controller/turbo pump - refer to MKS.
7. Cold Cathode gauge does not switch on.
Turbo pump not at speed.
Check fuse FS4.
Problem with gauge controller - refer to MKS.
8. Cold Cathode gauge does not indicate pressure.
Check connection to Cold Cathode gauge head.
Gauge head faulty/contaminated - refer to MKS.
9. RGA does not work - green LED on Electronics unit not lit.
Check RGA power supply cable connection.
Vacuum not low enough to trip low pressure trip point. Check
system for leaks.
Fault with RGA power supply - refer to MKS.
10. RGA does not work - green LED on Electronics lit.
Problem with electronics unit - refer to MKS.
11. No power to Laptop computer.
Check Laptop mains cable.
Check fuse FS5.
12. Heater Indicator does not illuminate.
Check fuse FS5.
13. Bakeout Heater indicator illuminates, heater controller does not indicate.
Problem with heater controller - refer to MKS