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EC DECLARATION OF CONFORMITY

          Spectra SensorTech Ltd.
          Cowley Way
          Crewe
          Cheshire
          CW1 6AG
          United Kingdom

DECLARES THAT THE FOLLOWING PRODUCTS:

          LM62, LM10 VACSCAN 100
          LM63, LM10, LM4 VACSCAN PLUS 100, 200
          LM61, LM10, LM4, LM9 SATELLITE 100, 200, 300
          LM56 MICROVISION
          LM70, LM76 MICROVISION PLUS
          LM77 VISION 1000P
          LM79 VISION 1000I
          LM89 VISION 1000B
          LM90 VISION 1000 C / E
          LM78 VAC CHECK
          LM80 MINILAB

ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN

DIRECTIVES:

89/336/EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE

73/23/EEC LOW VOLTAGE DIRECTIVE AS AMMENDED 93/68 EEC

THE APPLICABLE STANDARDS ARE:

EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT,

CONTROL & LABORATORY USE

EN 61010-1:1993 SAFETY REQUIREMENTS FOR ELECTRICAL

EQUIPMENT FOR MEASUREMENT,

CONTROL & LABORATRY USE.
SIGNED:

T.R.ROBINSON
EUROPEAN OPERATIONS MANAGER
DATE: 1

ST

JULY 2001

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Содержание Spectra 138A

Страница 1: ...Instruction Manual MKS Spectra Type 138A Portable Analytical System LP101017 Rev 1 02 April 2002 ...

Страница 2: ...dows 95 are trademarks of the Microsoft Corporation Swagelok is a registered trademark of the Crawford Fitting Company and is fully recognised Baratron is a registered trademark of MKS Instruments Inc Andover MA Cajon VCR and VCO are registered trademarks of Cajon Company Macedonia OH Channeltron is a registered trademark of the Gallilao Corp Viton is a registered trademark of Conflat is registere...

Страница 3: ...ION 1000I LM89 VISION 1000B LM90 VISION 1000 C E LM78 VAC CHECK LM80 MINILAB ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES 89 336 EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE 73 23 EEC LOW VOLTAGE DIRECTIVE AS AMMENDED 93 68 EEC THE APPLICABLE STANDARDS ARE EN 61326 1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT CONTROL LABORATORY USE EN 61010 1 1993 SAFETY REQUIREMENTS FOR ELECTRICAL EQUIPME...

Страница 4: ...r technical guidance on possible EMC and safety issues 6 The vacuum system on which the analyser RF head is mounted must be earthed to a protective earth preferably to the same protective earth as the control unit B OPERATION 1 The equipment is not authorised for use as a critical component in a life support or safety critical system without the express written approval of Spectra SensorTech Ltd 2...

Страница 5: ...epartment This warranty does not apply to any equipment that has not been used in accordance with the specifications recommended by MKS Spectra for the proper and normal use of the equipment MKS Spectra will not be liable under any circumstances for consequential or incidental damages in connection with or arising out of the sale performance or use of the equipment covered by this warranty INDEMNI...

Страница 6: ...ion of those chemicals or the use of the goods or services as part of that manufacturing facility Document Control Revision 1 00 Date 20 Feb 2001 Change New document based on MKS Instruments UK document 1380004D ...

Страница 7: ... 1 General 4 1 2 2 Other symbols 4 1 3 Safety procedures and precautions 5 Section 2 Overview 10 Section 3 Installation 15 3 1 Environmental Requirements 15 3 2 Electrical Connections 16 3 3 Testing 16 Section 4 Setup and operation 19 4 1 Setup 19 4 2 Operation 19 4 3 Switching on 20 4 4 Cold Cathode Gauge 20 4 5 Switching Off 21 4 6 Bakeout Heater 21 ...

Страница 8: ...eration with remote mounted analyser 23 4 10 Operation with atmospheric inlet 24 Section 5 Troubleshooting 27 Section 6 Troubleshooting 31 6 1 General 31 6 2 Primary Pump 31 6 3 Turbo Pump 31 6 4 Cold Cathode Gauge 31 6 5 RGA Head 32 6 6 Service Repair 32 Appendix 1 Related documents 35 Appendix 2 Returns form 37 ...

Страница 9: ...PAS Trolley Manual LP101017 Rev 1 02 Page i Errata and addenda This page is deliberately left blank ...

Страница 10: ...PAS Trolley Manual LP101017 Rev 1 02 Page ii This page is deliberately left blank ...

Страница 11: ... sign denotes a hazard to personnel WARNING boxes are used where failure to observe the instructions could result in personal injury or death CAUTION The CAUTION sign denotes a hazard to equipment CAUTION boxes are used where failure to observe the instructions could result in damage to the equipment or associated equipment NOTE The NOTE sign denotes important information It calls attention to a p...

Страница 12: ...lained below The Exclamation Mark ISO 3864 No B 3 1 label Caution refer to the accompanying documents General caution Refer to the manual for detailed instructions The Electric Shock ISO 3864 No B 3 6 symbol Caution risk of electric shock This is generally used on the instruments to warn of the presence of hazardous voltages Hot Surface IEC 417 No 5041 symbol Caution risk of burns injury Generally...

Страница 13: ... in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment MKS Instruments assumes no liability for the customer s failure to comply with these requirements SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not attempt component replacement and internal adjustments Any service must be performed by qualified service...

Страница 14: ...pproved by a qualified agency such as VDE Semko or SEV USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors or between either of the supply conductors and ground than that specified in the manual USE THE PROPER FUSE Use only a fuse of the correct type voltage rating and current rating as specified for you...

Страница 15: ...LET PRESSURES Never operate at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pressure INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to...

Страница 16: ...gas TAKE PRECAUTIONS TO AVOID POTENTIAL EXPLOSIONS Precautions must be taken to avoid explosion due to overpressure during backfill operations If any thermal conductivity gauge is calibrated for air nitrogen the measured pressure may vary considerably as a function of true pressure for other gases Pressure indications above 100 Torr should not be used when backfilling In a system which is filled w...

Страница 17: ...PAS Trolley Manual LP101017 Rev 1 02 Page 9 This page is deliberately left blank ...

Страница 18: ...features of the instrument are as follows Self contained only requiring mains power connection Mobile Clean room compatible Dry pumping system no pump oils Complete RGA control via external PC Available with 100 200 and 300 amu mass ranges Available with faraday cup or electron multiplier detectors Atmospheric inlet optional Bakeout heaters optional Windows software optional Caution The MKS Portab...

Страница 19: ...PAS Trolley Manual LP101017 Rev 1 02 Page 11 ...

Страница 20: ...PAS Trolley Manual LP101017 Rev 1 02 Page 12 This page is deliberately left blank ...

Страница 21: ...PAS Trolley Manual LP101017 Rev 1 02 Page 13 ...

Страница 22: ......

Страница 23: ...etween 15 C and 30 C will always be maintained 2 Ensure that the instrument is always used in the correct orientation and kept away from any sources of dust oil or water 3 Do not attempt to move the instrument whilst connected to the mains power supply 4 Keep the ventilation panels and base of the instrument clear of any obstruction 5 Do not subject the instrument to sharp knocks or continuous vib...

Страница 24: ...ndard appliance connector BS4343 The required supply is 8 amps at 230 volts 50 Hz Warning Failure to observe the electrical connection requirements will result in damage to the equipment 3 3 Testing The customer should not connect or use the instrument until it has been checked and tested at the customers site by an MKS engineer ...

Страница 25: ...PAS Trolley Manual LP101017 Rev 1 02 Page 17 ...

Страница 26: ......

Страница 27: ... Analytical System has been designed to be easy to operate and self protection features have been built in Operation can be split into two parts operation of the vacuum system and use of the RGA control software This manual only describes the vacuum system the user should refer to the RGA manual before operating the RGA system The instrument can be used in two ways with the analyser system mounted...

Страница 28: ...auge controller will also switch on at this point Press the lower button on the gauge controller to switch on the gauge head The controller display will now read the pressure in mbar within the analyser housing When the pressure goes below the lower set point 5x10 5 mbar the power supply to the RGA electronics is switched on The instrument is now ready for use Refer to the Spectra RGA software man...

Страница 29: ...f contaminants particularly water vapour from the analyser Before switching on the heater remove the RGA power supply unit from the end of the analyser housing The bakeout heater is switched on using the switch marked HEATER the indicator above the switch should illuminate The heater temperature is controlled using the heater controller Refer to the temperature controller manual for instructions o...

Страница 30: ...hat stainless steel bellows be used to connect the flange to the chamber under test It is good practice to minimise the length of the bellows to avoid water contamination from the inside surface of the bellows The bellows can be evacuated by either the RGA system pumps or preferably the system pumps prior to use The RGA system has a dual valve inlet This gives a wide operating pressure for the sys...

Страница 31: ...the connecting bellows and to minimise water contamination in the bellows the analyser assembly can be used remotely from the base unit cart This mode of operation also minimises any low background noise sometimes associated with close coupled diaphragm pumps Ensure that the instrument has been shut down and the mains power removed from the system In addition it is recommended to check that the tu...

Страница 32: ...tem consists of a capillary tube and isolation valve differential pumping across this device is achieved via the turbo backing line To attach the atmospheric inlet remove the clamp at the turbo end of the backing line and secure the T piece on the atmospheric assembly between the backing line and the turbo This will allow the backing line to pump both the turbo and the atmospheric inlet The other ...

Страница 33: ...PAS Trolley Manual LP101017 Rev 1 02 Page 25 Warning Under no circumstances must the analyser unit be removed from or replaced into the instrument with it still connected to the main electrical supply ...

Страница 34: ......

Страница 35: ...pump internal thermal trip 3 Primary pump cuts out Check primary pump temperature Allow to cool to reset pump internal thermal trip Check fan filters to ensure sufficient air flow 4 Pump switch lights turbo does not start Problem with turbo controller turbo pump refer to MKS Check fuse FS4 5 Turbo starts at speed indicator does not light Poor vacuum due to leak check all vacuum connections Poor va...

Страница 36: ...auge head Gauge head faulty contaminated refer to MKS 9 RGA does not work green LED on Electronics unit not lit Check RGA power supply cable connection Vacuum not low enough to trip low pressure trip point Check system for leaks Fault with RGA power supply refer to MKS 10 RGA does not work green LED on Electronics lit Problem with electronics unit refer to MKS 11 No power to Laptop computer Check ...

Страница 37: ...PAS Trolley Manual LP101017 Rev 1 02 Page 29 14 Heater controller indicates heater does not get hot Check fuse FS2 ...

Страница 38: ......

Страница 39: ...Primary Pump This item requires periodic maintenance to ensure full performance If a reduction in base pressure is observed the diaphragm and or valves may need replacing It is advisable to replace them after 5000 hours of operation Refer to the pump manual for more information 6 3 Turbo Pump This is also essentially a maintenance free item Refer to the turbo pump manual for more information 6 4 C...

Страница 40: ... Operation Manual for more information 6 6 Service Repair Contact MKS Instruments UK Ltd should any problems be experienced with the instrument Warning All returns to MKS Instruments must be free of harmful corrosive radioactive or toxic materials Note All returns to MKS Instruments must be authorised Please contact the UK office before returning ...

Страница 41: ...PAS Trolley Manual LP101017 Rev 1 02 Page 33 ...

Страница 42: ......

Страница 43: ...ctions for use 3 Varian Turbo V70LP pumps instruction manual 4 Varian Turbo V70 controller instruction manual 5 Varian 1 inch Stainless Steel Valve instruction manual 6 HPS 943 Digital Cold Cathode Controller operating manual if fitted 7 HPS I Mag Sensor operation manual if fitted 8 CAL 3200 Temperature Controller instruction manual if fitted Note all thwe MKS Spectra manuals will be found with th...

Страница 44: ...PAS Trolley Manual LP101017 Rev 1 02 Page 36 This page is deliberately left blank ...

Страница 45: ... sent by post to ensure that we have this information before we receive the equipment A further copy should be handed to the carrier with the equipment 3 Failure to complete the form or comply with the procedure will lead to delays in servicing the equipment We CANNOT work on any equipment that could have been in an environment where it could have been exposed to hazardous materials this includes ...

Страница 46: ...lease ensure that we have this information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Please Complete The Following Our returns number Customer P O No Customer Bill To Address Company Department Address City Zip Postal Code Customer Return To Address if differen...

Страница 47: ...PAS Trolley Manual LP101017 Rev 1 02 Page 39 City Zip Postal Code User s Name Phone No Equipment Shipped Item 1 Serial No Item 2 Serial No Item 3 Serial No ...

Страница 48: ... Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are named above that the information given is correct and that the following actions have been taken 1 The equipment has been securely packaged and labelled 2 The carrier has been informed of the hazardous nature of t...

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