MKS Spectra 138A, Инструкция по эксплуатации

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PAS Trolley Manual
LP101017 Rev 1.02
Page 20
4.3. Switching on
After connecting the instrument to a suitable power supply it can be
switched on using the switch labeled
MAIN POWER . The indicator
above the switch should illuminate. Mains power will now be
supplied to the Laptop connector and to the Bakeout heater circuit.
The vacuum pumps can then be started by turning the
PUMPS
switch. This switch should illuminate to indicate that power has
been applied to both the primary (diaphragm) pump and the turbo
pump. The turbo pump will now take several minutes to run up to
full speed.
When full speed is reached the
AT SPEED indicator will illuminate.
The Cold Cathode gauge controller will also switch on at this point.
Press the lower button on the gauge controller to switch on the gauge
head. The controller display will now read the pressure (in mbar)
within the analyser housing. When the pressure goes below the
lower set point (5x10
-5
mbar) the power supply to the RGA
electronics is switched on. The instrument is now ready for use.
Refer to the Spectra RGA software manual to use the analyser.
4.4. Cold Cathode Gauge
The Cold Cathode gauge normally requires no setup. However the
pressure setpoint is used to protect the RGA, and this may need to be
adjusted depending upon the application. Refer to MKS before
adjusting them.
The normal setting is 5x10
-5
mbar (the pressure must go below this
point
before the analyser can be switched on)
Caution Incorrect setting of the Cold Cathode gauge trips
could result in damage to the instrument.