MKS Spectra 138A, Инструкция по эксплуатации

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PAS Trolley Manual
LP101017 Rev 1.02
Page 24
The operation of the inlet valves is as described above.
Caution Follow the Switching off procedure before removing
the analyser from the cart.
Caution When mounting the analyser unit on any remote
process chamber or vacuum system ensure that it is
adequately supported. The entire weight of the
analyser should not be taken by the inlet flange alone.
4.10. Operation with atmospheric inlet
For higher process pressures, up to atmosphere, the atmospheric inlet
system should be attached to the analyser assembly. The
atmospheric inlet system consists of a capillary tube and isolation
valve; differential pumping across this device is achieved via the
turbo backing line.
To attach the atmospheric inlet, remove the clamp at the turbo end of
the backing line and secure the ‘T’ piece on the atmospheric
assembly between the backing line and the turbo. This will allow the
backing line to pump both the turbo and the atmospheric inlet.
The other end of the atmospheric inlet, which terminates in a DN
CF40 (Conflat) flange, should be bolted to the dual valve assembly
sealed with an appropriate copper gasket. To adjust the pressures in
the system, close the main high conductance valve and have the
needle valve closed with the isolation valve open. Adjust the needle
valve until a pressure of better than 5x10
-5
mbar is achieved.